Patent US5021129A successfully refreshed from Google Patents.
US5021129A
Expired / Lapsed
US
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Multilayer structures of different electroactive materials and methods of fabrication thereof
Assignee: International Business Machines Corp
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Filing: 1989-09-25
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Granted: 1991-06-04
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Expires: 2009-09-25
Abstract
Abstract Structures and methods of fabrication thereof wherein the method selectively supplies electrons to a first electroactive material in the presence of a second electroactive material wherein the first and second electroactive materials have different redox potentials. The electrons are selectively supplied either by electrochemical means or by appropriately chosen reducing agents. A structure fabricated by these methods has a first electroactive body disposed on a second electroactive body wherein the first body has a pattern therein exposing at the base thereof the surface of the second electroactive material body. Electrons can be selectively supplied to the surface of the second electroactive material body which is exposed at the base of the pattern in the first electroactive material body. Upon exposing the structure to a seeding solution seed is selectively supplied to those regions to which electrons have been selectively supplied. Electrically conductive material can then be electrolessly deposited onto the seed material to form an electrically conductive pattern in the pattern in the first electroactive body. The electroactive material bodies are preferably polyimide materials. The structures can be used as the top metallization levels of an electronic device such as a semiconductor chip or a semiconductor chip packaging substrate.
Inventors
- 👤 Gary V. Arbach
- 👤 Terrence R. O'Toole
- 👤 Alfred Viehbeck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 20:19
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; C; C23; C23C; C23C18/00; C23C18/16; C23C18/1601; C23C18/1603; C23C18/1607; C23C18/1608; C23C18/1633; C23C18/1635; C23C18/1639; C23C18/1641; C23C18/18; C23C18/20; C23C18/2006; C23C18/2046; C23C18/2073; C23C18/2086; C23C18/2093; C23C18/28; C23C18/30; C23C18/31; C23C18/32; C23C18/38; C23C18/42; C25; C25D; C25D5/00; C25D5/02; C25D5/022; C25D5/54; C25D5/56; H05; H05K; H05K3/00; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/184; H05K3/188; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/0346; H05K2201/00; H05K2201/01; H05K2201/0137; H05K2201/0154; H05K3/0011; H05K3/0017; H05K3/0023; H05K3/0041; H05K3/107; Y; Y10; Y10S; Y10S205/00; Y10S205/924; Y10S205/926
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
47 words
A structure comprising: a first electroactive body; a second electroactive body disposed against said first electroactive body; said second electroactive body having a pattern therein exposing at the base of said pattern said first electroactive body; said first and second electroactive bodies having different redox potential energies.
Claim 2
Dependent Claim
47 words
A structure comprising: a first electroactive body; a second electroactive body disposed against said first electroactive body; said second electroactive body having a pattern therein exposing at the base of said pattern said first electroactive body; said first and second electroactive bodies having different redox potential energies.
Claim 3
Dependent Claim
26 words
The structure of claim 1, wherein the redox potential energy of said first electroactive body is less than the redox potential of said second electroactive body.
Claim 4
Dependent Claim
21 words
The structure of claim 2, wherein at least a part of said first electroactive body is in a chemically reduced condition.
Claim 5
Dependent Claim
24 words
The structure of claim 2, further including a seed material on said exposed parts of said first body at said base of said pattern.
Claim 6
Dependent Claim
26 words
The structure of claim 4, wherein said seed material is selected from the group consisting of Pd, Pt, Ru, Au, Ag, Cu, Ni, Co and Sn.
Claim 7
Dependent Claim
14 words
The structure of claim 5, further including an electrically conducting material on said seed.
Claim 8
Dependent Claim
26 words
The structure of claim 5, wherein said electrically conducting material is selected from the group consisting of Pd, Ni, Cu, Ag, Au, Co Pt and Sn.
Claim 9
Dependent Claim
20 words
The structure of claim 1, wherein said pattern in said second body is substantially filled with an electrically conducting material.
Claim 10
Dependent Claim
15 words
The structure of claim 1, wherein said first and said second bodies are polymeric materials.
Claim 11
Dependent Claim
12 words
The structure of claim 9, wherein said polymeric materials are polyimide materials.
Claim 12
Dependent Claim
18 words
The structure of claim 1, wherein said electroactive materials are capable of transporting electrons in a reversible manner.
Claim 13
Dependent Claim
35 words
The structure of claim 1, wherein said first and said second electroactive body contains a material including one or more of the groups selected from the group consisting of BPDA, BTDA, NTDA, PMDA and HFDA.
Claim 14
Dependent Claim
41 words
The structure of claim 1, wherein said first electroactive body is selected from the group of BPDA-PDA, BTDA-ODA, BTDA-DAPI, BTDA-APB, NTDA-ODA, PMDA-ODA, PMDA-HDA, PMDA-MCA, BTDA-ODA and BPDA-ODA polyimdes and said second electroactive material is selected from another member of said group.
Claim 15
Independent Claim
74 words
A method comprising: providing a solution capable of transporting electric charge; immersing in said solution a first and second electroactive body; said first electroactive body having a redox potential energy greater than the redox potential energy of said second electroactive body; providing electrons to said first and said second electroactive bodies having an energy sufficient to be transferred to said second electroactive body but not sufficient to be transferred to said first electroactive body.
Claim 16
Independent Claim
74 words
A method comprising: providing a solution capable of transporting electric charge; immersing in said solution a first and second electroactive body; said first electroactive body having a redox potential energy greater than the redox potential energy of said second electroactive body; providing electrons to said first and said second electroactive bodies having an energy sufficient to be transferred to said second electroactive body but not sufficient to be transferred to said first electroactive body.
Claim 17
Dependent Claim
34 words
The method of claim 14, wherein said electrons are provided by a reducing agent in said solution, said reducing agent being energetically disposed to transferring electron(s) to redox sites on said second electroactive body.
Claim 18
Dependent Claim
26 words
The method of claim 15, wherein said reducing agent is generated in solution by applying a voltage between an anode and cathode immersed in said solution.
Claim 19
Dependent Claim
11 words
The method of claim 14, wherein said electrons are provided electrochemically.
Claim 20
Dependent Claim
15 words
The method of claim 14, wherein said first body is disposed against said second body.
Claim 21
Dependent Claim
27 words
The method of claim 18, wherein one of said first and said second bodies has a pattern therein exposing the other of said bodies in said pattern.
Claim 22
Dependent Claim
30 words
The method of claim 19, further including exposing said first and second bodies to a seeding solution resulting in seed being deposited at the exposed surface of said second body.
Claim 23
Dependent Claim
25 words
The method of claim 20, wherein said seed is selected from the group consisting of Pd, Pt, Ru, Au, Ag, Cu, Ni, Co and Sn.
Claim 24
Dependent Claim
15 words
The method of claim 21, wherein a conductive material is electrolessly disposed on said seed.
Claim 25
Dependent Claim
26 words
The method of claim 22, wherein said electrolessly deposited material is selected from the group consisting of Pd, Cu, Ni, Au, Ag, Co, Pt and Sn.
Claim 26
Dependent Claim
19 words
The method of claim 14, wherein at least one of said first and said second bodies are polymeric bodies.
Claim 27
Dependent Claim
16 words
The method of claim 14, wherein at least one of said bodies comprises a polyimide material.
Claim 28
Dependent Claim
35 words
The structure of claim 24, wherein said first and said second electroactive bodies contain a material including one or more of the groups selected from the group consisting of BPDA, BTDA, NTDA, PMDA and HFDA.
Claim 29
Dependent Claim
42 words
The method of claim 24, wherein one of said electroactive bodies is selected from the group consisting of BTDA-DAPI, BTDA-APB, NTDA-ODA, PMDA-ODA. PMDA-HDA, PMDA-MCA, BTDA-ODA and BPDA-ODA polyimides and the other of said bodies is selected from another member of said group.
Claim 30
Dependent Claim
39 words
The method of claim 15, wherein said chemical reducing agent is a neutral organic compound whereby all or a portion of the said neutral organic compound has been electrochemically reduced in an aprotic solvent containing a supporting electrolyte salt.
Claim 31
Dependent Claim
53 words
The method of claim 28, wherein said neutral organic compound is at least one specie selected from the group of unsaturated aromatic hydrocarbons, aromatic carbonyl compounds, imides, diimides, carbodiimides, anhydrides, quinones, quaternary aromatic nitrogen compounds, aromatic heterocyclic nitrogen compounds, azomethines, immonium salts, azo compounds, amine oxides, nitro and nitroso compounds and organometallic compounds.
Claim 32
Dependent Claim
42 words
The method of claim 15 wherein said reducing agent is selected from the group of benzoin dianion, benzil anion, anthracene anion, dibenzoylmethane radical anion, benzophenone anion, anthraquinone anion, 9-fluorenone, N-n-butylphthalimide anion, N,N'-di-n-butyl-3,3',4,4'-biphenyltetracarboxylic diimide anion, N,N'-di-n-butylpyromellitic diimide anion, acridine anion and 1-azafluoranthene anion.
Claim 33
Dependent Claim
62 words
The method of claim 28 wherein said supporting electrolyte salt contains a cation which is at least one member of the group of tetraalkylammonium, tetraalkylphosphonium, alkali metal, mixed alkyl-aryl ammonium, mixed alkyl-aryl phosphonium, or chelated metal and said supporting electrolyte salt anion is at least one member selected from the group of tetrafluoroborate, hexafluorophosphate, perchlorate, halide, aryl sulfonate, and aromatic organic compounds.
Claim 34
Dependent Claim
37 words
The method of claim 28 wherein said supporting electrolyte salt contains at least one member selected from the group of tetrabutylammonium tetrafluoroborate, tetraethylammonium, tetrafluoroborate, tetrabutylammonium, hexafluorophosphate, tetraethylammonium bromide, lithium tetrafluoroborate, lithium perchlorate, benzyltributylammonium tetrafluoroborate and sodium naphthalenide.
Claim 35
Dependent Claim
35 words
The method of claim 28 wherein said aprotic solvent is at least one member selected from the group of nitriles, nitro compounds, amide, cyclic amide, amines, esters, cyclic esters, ethers, carbonates, oxides and sulfo compounds.
Claim 36
Dependent Claim
37 words
The method of claim 17, wherein said electrons are supplied electrochemically by a cathode in contact with said first and said second electroactive bodies in an electrochemical circuit using an aprotic solvent containing a supporting electrolyte salt.
Claim 37
Dependent Claim
28 words
The method of claim 28, wherein the electrochemical reduction of said reducing agent is done by either control of the current supply or control of the applied potential.
Claim 38
Dependent Claim
60 words
The method of claim 34 wherein said supporting electrolyte salt contains a cation of at least one member of the group tetraalkylammonium, tetraalkylphosphonium, alkali metal, mixed alkyl-aryl ammonium, mixed alkyl-aryl phosphonium, or chelate metal and said supporting electrolyte salt anion is selected from at least one member of the group tetrafluoroborate, hexafluorophosphate, perchlorate, halide, aryl sulfonate or aromatic organic compounds.
Claim 39
Dependent Claim
37 words
The method of claim 34 wherein said supporting electrolyte salt is at least one member selected from the group tetrabutylammonium tetrafluoroborate, tetraethylammonium tetrafluoroborate, tetrabutylammonium hexafluorophosphate, tetraethylammonium bromide, lithium tetrafluorophosphate, tetraethylammonium bromide, lithium tetrafluoroborate, lithium perchlorate, benzyltributylammonium tetrafluoroborate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-06-03 | 1994-12-03 | 1995-06-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-06-03 | 1998-12-03 | 1999-06-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-06-03 | 2002-12-03 | 2003-06-04 | $7700.00 | Window Closed / Lapsed |