Process for selectively growing thin metallic film of copper or gold

Claim 2

A process for growing a thin metallic film, comprising the steps of: maintaining a substrate, having on the surface thereof a first material consisting of metal or a metallic silicide and a second material selected from the group consisting of silicon oxide, silicon nitride and titanium nitride, under a reduced pressure; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said first material, of a vapor of said evaporated starting material; and feeding a gas stream consisting essentially of the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof and a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of said first material.

Claim 3

A process for growing a thin metallic film as claimed in claim 1, wherein said organic complex or organic compound is at least one member selected from a group consisting of β-diketonato compounds of copper or gold and cyclopentadienyl compounds of copper or gold.

Claim 4

A process for growing a thin metallic film as claimed in claim 2, wherein said organic complex or organometallic compound is at least one member selected from the group consisting of bis-acetylacetonato-copper, bis-hexafluoroacetylacetonato-copper, bis-dipivaloylmethanato-copper, dimethyl-gold-hexafluoro-acetylacetonato, cyclopentadienyl-triethylphosphine-copper complex, and dimethyl-gold-acetylacetonato.

Claim 5

A process for growing a thin metallic film as claimed in claim 1, wherein said first material is at least one member selected from the group consisting of aluminum, copper, gold, silicon, titanium, tungsten, chromium, molybdenum, zirconium, tantalum, vanadium and silicides thereof.

Claim 6

A process for growing a thin metallic film as claimed in claim 3, wherein said organic complex or organometallic compound is bis-hexafluoroacetylacetonato-copper, which is evaporated by heating at a temperature of 50° to 150° C. to form a vapor thereof, which is then fed through a gas ejecting orifice being heated at a temperature equal to or higher than 50° C. but lower than 200° C. onto said substrate being heated at a temperature of 250° to 450° C.

Claim 7

A process for growing a thin metallic film as claimed in claim 3, wherein said organic complex or organometallic compound is bis-acetylacetonato-copper or dimethyl-gold-acetylacetonato, which is evaporated by heating at a temperature of 100° to 150° C. to form a vapor thereof, which is then fed through a gas ejecting orifice being heated at a temperature equal to or higher than 100° C. but lower than 200° C. onto said substrate being heated at a temperature of 200° to 450° C.

Claim 8

A process for growing a thin metallic film, comprising the steps of: heating a starting material consisting of bis-dipivaloylmethanato-copper or dimetyl-gold-hexafluoroacetylaacetonato at a temperature of 70° to 180° C. to evaporate the same; heating a substrate having on the surface thereof a metal or a metallic silicide as a first material and an oxide or a nitride as a second material to a temperature of 200 ° to 450° C; feeding the vapor of said evaporated starting material through a gas ejecting orifice being heated at a temperature equal to or higher than 70° C. but lower than 200° C. together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of said first material.

Claim 9

A process for growing a thin metallic film, comprising the steps of: heating a starting material consisting of bis-dipivaloylmethanato-copper or dimetyl-gold-hexafluoroacetylaacetonato at a temperature of 70° to 180° C. to evaporate the same; heating a substrate having on the surface thereof a metal or a metallic silicide as a first material and an oxide or a nitride as a second material to a temperature of 200 ° to 450° C; feeding the vapor of said evaporated starting material through a gas ejecting orifice being heated at a temperature equal to or higher than 70° C. but lower than 200° C. together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of said first material.

Claim 10

A process for growing a thin metallic film comprising the steps of: heating a starting material consisting of cyclopentadienyl-triethylphosphine-copper at a temperature of 50° to 120° C. to evaporate the same; heating a substrate having on the surface thereof a metal or a metallic silicide as a first material and an oxide or a nitride as a second material to a temperature of 200° to 350° C; feeding the vapor of said evaporated starting material through a gas ejecting orifice being heated at a temperature equal to or higher than 50° C. but lower than 200° C. together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of copper only on the surface of said first material.

Claim 11

A process for growing a thin metallic film comprising the steps of: heating a starting material consisting of cyclopentadienyl-triethylphosphine-copper at a temperature of 50° to 120° C. to evaporate the same; heating a substrate having on the surface thereof a metal or a metallic silicide as a first material and an oxide or a nitride as a second material to a temperature of 200° to 350° C; feeding the vapor of said evaporated starting material through a gas ejecting orifice being heated at a temperature equal to or higher than 50° C. but lower than 200° C. together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of copper only on the surface of said first material.

Claim 12

A process for growing a thin metallic film, comprising steps of: forming an insulating layer made of an oxide or a nitride on a semiconductor substrate; forming a hole in a predetermined area of said insulating layer to partially expose the surface of said substrate in an area thereof corresponding to said predetermined area; forming on the exposed surface of said substrate a priming layer made of at least one member selected from the group consisting of aluminum, silicon, titanium, tungsten, chromium, molybdenum, zirconium, tantalum, vanadium, and silicides thereof; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on said priming layer.

Claim 13

A process for growing a thin metallic film, comprising steps of: forming an insulating layer made of an oxide or a nitride on a semiconductor substrate; forming a hole in a predetermined area of said insulating layer to partially expose the surface of said substrate in an area thereof corresponding to said predetermined area; forming on the exposed surface of said substrate a priming layer made of at least one member selected from the group consisting of aluminum, silicon, titanium, tungsten, chromium, molybdenum, zirconium, tantalum, vanadium, and silicides thereof; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on said priming layer.

Claim 14

A process for growing a thin metallic film as claimed in claim 9, further comprises, after said step of selective growth of gold or copper, the step of: forming a metallic layer made of a member selected from the group consisting of aluminum, gold and copper on the remaining insulating layer and said thin metallic film of gold or copper.

Claim 15

A process for growing a thin metallic film as claimed in claim 10, wherein said priming layer is formed on the source/drain region of said semiconductor substrate, and wherein said metallic layer is a wiring layer while said thin metallic film of gold or copper is a layer serving to electrically connect said source/drain region to said wiring layer.

Claim 16

A process for growing a thin metallic film as claimed in claim 11, wherein said semiconductor substrate is made of silicon.

Claim 17

A process for growing a thin metallic film as claimed in claim 11, wherein said semiconductor substrate is made of GaAs.

Claim 18

A process for growing a thin metallic film as claimed in claim 11, wherein said metallic layer is formed by a chemical vapor deposition method.

Claim 19

A process for growing a thin metallic film as claimed in claim 10, further comprises, after said step of formation of said metallic layer, the steps of: forming a second insulating layer on said metallic layer; forming a hole in a predetermined area of said second insulating layer to partially expose said metallic layer; growing a thin metallic film of gold or copper on the exposed surface of said metallic layer to fill up therewith said hole; and forming a second metallic layer on the remaining second insulating layer and the thin metallic film of gold or copper.

Claim 20

A process for growing a thin metallic film as claimed in claim 15, wherein each of said metallic layer and said second metallic layer is a layer made of a member selected from the group consisting of aluminum, gold and copper, and constituting a middle layer of a sandwich structure comprising said middle layer sandwiched between two layers each made of at least one member selected from the group consisting of aluminum, titanium, chromium, zirconium, tungsten, molybdenum, tantalum, vanadium, and silicides thereof.

Claim 21

A process for growing a thin metallic film, comprising steps of: forming a second layer made of an oxide or a nitride on an priming layer serving as a first layer and made of a metal or a metallic silicide; forming a hole in a predetermined area of said second layer to partially expose the surface of said priming layer in an area thereof corresponding to said predetermined area; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said priming layer together with said second layer to a temperature equal to or higher than the decomposition temperature, on said priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated priming layer and said second layer to selectively grow a thin metallic film of gold or copper only on the exposed surface of said priming layer.

Claim 22

A process for growing a thin metallic film, comprising steps of: forming a second layer made of an oxide or a nitride on an priming layer serving as a first layer and made of a metal or a metallic silicide; forming a hole in a predetermined area of said second layer to partially expose the surface of said priming layer in an area thereof corresponding to said predetermined area; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said priming layer together with said second layer to a temperature equal to or higher than the decomposition temperature, on said priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated priming layer and said second layer to selectively grow a thin metallic film of gold or copper only on the exposed surface of said priming layer.

Claim 23

A process for growing a thin metallic film, comprising steps of: forming a first insulating layer on a semiconductor substrate; forming a hole in a predetermined area of said first insulating layer to partially expose the surface of said substrate; forming a polycrystalline silicon layer on the remaining first insulating layer and the exposed surface of said substrate; forming on said polycrystalline silicon layer a priming layer made of at least one member selected from the group consisting of aluminum, titanium, tungsten, molybdenum, chromium, zirconium, tantalum, vanadium, and silicides thereof; patterning said polycrystalline silicon layer together with said priming layer; forming a second insulating layer on the remaining priming layer; forming a hole in predetermined area of said second insulating layer to partially expose the surface of said remaining priming layer; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said remaining priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the exposed surface of said remaining priming layer.

Claim 24

A process for growing a thin metallic film, comprising steps of: forming a first insulating layer on a semiconductor substrate; forming a hole in a predetermined area of said first insulating layer to partially expose the surface of said substrate; forming a polycrystalline silicon layer on the remaining first insulating layer and the exposed surface of said substrate; forming on said polycrystalline silicon layer a priming layer made of at least one member selected from the group consisting of aluminum, titanium, tungsten, molybdenum, chromium, zirconium, tantalum, vanadium, and silicides thereof; patterning said polycrystalline silicon layer together with said priming layer; forming a second insulating layer on the remaining priming layer; forming a hole in predetermined area of said second insulating layer to partially expose the surface of said remaining priming layer; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said remaining priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the exposed surface of said remaining priming layer.

Claim 25

A process for growing a thin metallic film as claimed in claim 18, wherein said priming layer is formed on said polycrystalline silicon layer with a layer of an electroconductive metallic nitride formed therebetween.

Claim 26

A process for growing a thin metallic film as claimed in claim 18, wherein said priming layer is formed on said polycrystalline silicon layer with a layer of an electroconductive metallic nitride and a layer of a metallic silicide formed therebetween.

Claim 27

A process for growing a thin metallic film, comprising steps of: forming a first insulating layer on a semiconductor substrate; forming a hole in a predetermined area of said first insulating layer to partially expose the surface of said substrate; forming a polycrystalline silicon layer on the remaining first insulating layer and the exposed surface of said substrate; patterning said polycrystalline silicon layer; forming a second insulating layer on the remaining polycrystalline silicon layer; forming a hole in a predetermined area of said second insulating layer to partially expose the surface of said remaining polycrystalline silicon layer; forming on the exposed surface of said remaining polycrystalline silicon layer a priming layer made of at least one member selected from the group consisting of aluminum, titanium, tungsten, molybdenum, chromium, zirconium, tantalum, vanadium, and silicides thereof to fill up therewith said hole; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of said priming layer.

Claim 28

A process for growing a thin metallic film, comprising steps of: forming a first insulating layer on a semiconductor substrate; forming a hole in a predetermined area of said first insulating layer to partially expose the surface of said substrate; forming a polycrystalline silicon layer on the remaining first insulating layer and the exposed surface of said substrate; patterning said polycrystalline silicon layer; forming a second insulating layer on the remaining polycrystalline silicon layer; forming a hole in a predetermined area of said second insulating layer to partially expose the surface of said remaining polycrystalline silicon layer; forming on the exposed surface of said remaining polycrystalline silicon layer a priming layer made of at least one member selected from the group consisting of aluminum, titanium, tungsten, molybdenum, chromium, zirconium, tantalum, vanadium, and silicides thereof to fill up therewith said hole; heating an organic complex or organometallic compound of gold or copper as a starting material to evaporate the same; heating said substrate to a temperature equal to or higher than the decomposition temperature, on said priming layer, of a vapor of said starting material; and feeding the vapor of said evaporated starting material being kept at a temperature lower than the decomposition temperature thereof together with a reducing gas onto said heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of said priming layer.