Method of producing an image reversal negative photoresist having a photo-labile blocked imide

Claim 3

The method of claim 1 wherein the polymer is an imide-containing polymer where the imide functionalities have been blocked with an acid-labile group.

Claim 4

The method of claim 2 wherein the polymer is poly(N-tert-butyloxycarbonyl maleimide-co-styrene).

Claim 5

The method of claim 2 wherein the polymer is poly(N-tert-butyloxycarbonyl maleimide-co-4-tert-butyl styrene).

Claim 6

The method of claim 2 wherein the polymer is poly(N-tert-butyloxycarbonyl maleimide-co-decyl vinyl ether).

Claim 7

The method of claim 2 wherein the polymer is poly(dimethyl-N-tert-butyloxycarbonyl glutarimide).

Claim 8

The method of claim 2 wherein the polymer is poly(N-tert-butyloxycarbonyl maleimide).

Claim 9

The method of claim 2 wherein the blocking group is tert-butyloxycarbonyl.

Claim 10

The method of claim 2 wherein the blocking group is benzyloxycarbonyl.

Claim 11

The method of claim 1 wherein the polymer is a phenol containing polymer where the hydroxy functionalities have been blocked with an acid-labile group.

Claim 12

The method of claim 10 wherein the polymer is poly(tert-butyloxycarbonyloxy-alpha-alkyl styrene).

Claim 13

The method of claim 10 wherein the polymer is poly(tert-butyloxycarbonyloxy styrene).

Claim 14

The method of claim 10 wherein the blocking group is tert-butyloxycarbonyl.

Claim 15

The method of claim 10 wherein the blocking group is benzyloxycarbonyl.

Claim 16

The method of claim 1 wherein the polymer is a carboxylic acid containing polymer where the acid functionalities have been blocked with an acid-labile group.

Claim 17

The method of claim 15 wherein the polymer is poly(tert-butyl methacrylate).

Claim 18

The method of claim 15 wherein the polymer is poly(tert-butyl p-vinylbenzoate).

Claim 19

The method of claim 2 wherein the acid labile group is an oxycarbonyl group.

Claim 20

The method of claim 1 wherein said polymer contains imide groups blocked by a methylol group or substituted methylol group and further blocked to form an acetal or ketal moiety.

Claim 21

The method of claim 19 wherein said polymer is a homopolymer of blocked maleimide.

Claim 22

The method of claim 19 wherein said polymer of (a) is a copolymer containing no more than 5 units of the comonomer for each blocked imide group.

Claim 23

The method of claim 19 wherein said copolymer contains up to about one unit of comonomer for each blocked imide group.

Claim 24

The method of claim 19 wherein the polymer has the structure ##STR6## where: R 0 is H or methyl R 0 1 is aryl, O-alkyl, or O-aryl R 1 and R 2 are H or C 1 to C 4 alkyl R 3 is ##STR7## where: R 4 , R 5 are H or C 1 to C 4 alkyl R 6 is C 1 to C 10 alkyl R 7 is C 1 to C 4 alkyl or H

Claim 25

The method of claim 23 wherein R 0 1 is aryl or substituted aryl.

Claim 26

The method of claim 24 wherein R 0 1 is phenyl.

Claim 27

The method of claim 23 wherein R 0 1 is --O--(C 1 to C 10 alkyl) or --O--aryl.

Claim 28

The method of claim 26 wherein R 0 1 is --O--(n-decyl).

Claim 29

The method of claim 23 wherein R 0 1 is phenyl and R 3 is --C(CH 3 ) 2 OCH 3 .

Claim 30

The method of claim 23 wherein R 0 1 is phenyl and R 3 is --C(CH 3 )(H)OCH 3 .

Claim 31

The method of claim 23 wherein R 0 1 is phenyl and R 3 is ##STR8##

Claim 32

The method of claim 23 wherein R 0 1 is phenyl and R 3 is ##STR9##

Claim 33

The method of claim 1 wherein the oxime sulfonate ester component comprises one or more compounds selected from the group consisting of ##STR10## where n is 1 or 2, R 1 is --COO alkyl or --COO aryl or --CN, and R 2 is alkyll or aryl, or phenyl unsubstituted or substituted by C 1 -C 6 alkyl,--OH, --CN, C 1 -C 4 -alkoxy, aryloxy, --COO aryl, --COO alkyl, or NO 2 or R 2 and R 1 together with the atom to which they are bound form a C 5 -C 10 carbocyclic or heterocyclic ring; and X and Y are independently selected from the group consisting of a direct bond, --CH 2 --, or unsubstituted or substituted C 2 -C 5 alkylene, and R 3 is, when n=1, C 1 -C 18 -alkyl or phenyl which may be unsubstituted or substituted by --OH, --CN, halogen, C 1 -C 12 -alkyl, C 1 -C 4 -alkoxy, or NO 2 ; or naphthyl which is unsubstituted or substituted, or R 3 and R 2 , or R 3 and R 1 together with the atoms to which they are bonded form a C 5 -C 12 heterocyclic ring, and R 3 is, when n=2, a (CH 2 ) m group, wherein m is 2 to 8, or phenylene or naphthylene which are unsubstituted or substituted; and R 4 is arylene, substituted arylene, methylene, C 2 -C 6 straight, branched, or cyclic alkylene; and R 5 is cyano, or a --COO alkyl or --COO aryl group; and R 6 is, when n=1, a hydrogen atom, or C 1 -C 8 alkyl, or phenyl, phenyl substituted with --OH, CN, C 1 -C 4 alkoxy, aryloxy, --COO alkyl, --COO aryl, NO 2 , or, or halogen; or R 5 and R 6 together with the atoms to which they are bound form a C 6 -C 12 carbocyclic or heterocyclic ring; and R 7 is phenyl, unsubstituted or substituted by --OH, --CN, alkoxy, halogen, or C 1 -C 5 alkyl, C 1 -C 18 straight or branched alkyl which may be substituted or unsubstituted; or C 6 -C 12 aryl, substituted or unsubstituted, or R 7 and R 6 or R 5 and R 7 , together with the atoms to which they are bound, form a C 6 -C 12 heterocyclic ring.

Claim 34

The method of claim 1 wherein said composition comprises a residual solvent component comprising of one or more components selected from the group consisting of propylene glycol monoalkyl ether and propylene glycol monoalkyl ether acetate.

Claim 35

The method of claim 1 wherein said composition further comprises one or more components selected from the group consisting of colorants, dyes, anti-striation agents, leveling agents, plasticizers, adhesion promoters, speed enhancers, solvents and surfactants.

Claim 36

The method of claim 1 wherein said substrate is selected from the group consisting of silicon, aluminum, polymeric resins, silicon dioxide, doped silicon dioxide, silicon nitride, tantalum, copper, polysilicon, ceramics and aluminum/copper mixtures.