US4663268A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High-temperature resistant photoresists featuring maleimide binders
Assignee: Eastman Kodak Co
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Filing: 1986-02-24
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Granted: 1987-05-05
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Expires: 2006-02-24
Abstract
Abstract There is disclosed a resist comprising a radiation-sensitive sensitizer that produces, with a binder, imagewise differential solubility when imagewise exposed. The resist is improved in that the binder has a rigid heterocyclic ring structure with the formula ##STR1##
Inventors
- 👤 Sam R. Turner
- 👤 Conrad G. Houle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 10:59
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
109 words
In a photoresist comprising a sensitizer compound and a binder effective to produce imagewise differential solubility, upon imagewise exposure to acivating radiation, in the presence of a selected aqueous base solvent, the improvement wherein said binder comprises a polymer having recurring units with the structural formula ##STR29## wherein Ar is aryl of from 6 to 10 carbon ring atoms, R is hydrogen or alkyl of 1 to 5 carbon atoms, or aryl of 6 to 10 carbon atoms, R 1 and R 2 are individually H, --OH, --COOH or ##STR30## wherein alkyl contains from 1 to 5 carbon atoms, and n is an integer of from 0 to 3.
Claim 2
Dependent Claim
109 words
In a photoresist comprising a sensitizer compound and a binder effective to produce imagewise differential solubility, upon imagewise exposure to acivating radiation, in the presence of a selected aqueous base solvent, the improvement wherein said binder comprises a polymer having recurring units with the structural formula ##STR29## wherein Ar is aryl of from 6 to 10 carbon ring atoms, R is hydrogen or alkyl of 1 to 5 carbon atoms, or aryl of 6 to 10 carbon atoms, R 1 and R 2 are individually H, --OH, --COOH or ##STR30## wherein alkyl contains from 1 to 5 carbon atoms, and n is an integer of from 0 to 3.
Claim 3
Dependent Claim
80 words
A photoresist as defined in claim 1, wherein said polymer is a copolymer that further includes recurring units having the structure ##STR31## wherein R 4 is ##STR32## R 5 is H, alkyl of from 1 to 10 carbon atoms, or aryl of from 6 to 10 ring atoms, or together R 4 and R 5 form a fused naphthalene, R 6 is alkyl of 1 to 5 carbon atoms, R 7 is hydrogen, ##STR33## and m is 0 or 1.
Claim 4
Dependent Claim
17 words
A photoresist as defined in claim 1, wherein said polymer is the sole binder for said photoresist.
Claim 5
Dependent Claim
54 words
In a photoresist comprising a sensitizer compound and a binder effective to produce imagewise differential solubility, upon imagewise exposure to activating radiation, in the presence of a selected aqueous base solvent, the improvement wherein said binder comprises a polymer having recurring units with the structural formula ##STR34## wherein R 3 is H or OH.
Claim 6
Dependent Claim
54 words
In a photoresist comprising a sensitizer compound and a binder effective to produce imagewise differential solubility, upon imagewise exposure to activating radiation, in the presence of a selected aqueous base solvent, the improvement wherein said binder comprises a polymer having recurring units with the structural formula ##STR34## wherein R 3 is H or OH.
Claim 7
Dependent Claim
43 words
A photoresist as defined in claim 4, wherein said polymer is a copolymer that further includes recurring units having the structure ##STR35## wherein R 4 is ##STR36## R 6 is alkyl of 1 to 5 carbon atoms and m is 0 or 1.
Claim 8
Dependent Claim
17 words
A photoresist as defined in claim 5, wherein said polymer is the sole binder for said photoresist.
Claim 9
Dependent Claim
13 words
A photoresist as defined in claim 1, wherein said sensitizer compound is positive-working.
Claim 10
Dependent Claim
13 words
A photoresist as defined in claim 1, wherein said sensitzer compound is negative-working.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-05-04 | 1990-11-03 | 1991-05-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-05-04 | 1994-11-03 | 1995-05-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-05-04 | 1998-11-03 | 1999-05-05 | $7700.00 | Window Closed / Lapsed |