Positive photoresists containing preformed polyglutarimide polymer

Claim 2

A positive photoresist comprising a preformed, non-crosslinked polyglutarimide polymer formed from an ester of (meth)acrylic acid and having at least five percent by weight glutarimide units of the structure ##STR5## where R 1 , R 2 and R 3 independently represent hydrogen or unsubstituted or substituted alkyl, aryl, aralky, or alkaryl hydrocarbons having from one to twenty carbon atoms and where at least 20 mole percent of the R 3 substituents are hydrogen, dissolved in a non-aqueous, spinning solvent, and where the photoresist is developable with an aqueous solution.

Claim 3

The positive photoresist of claim 1 further comprising a positive acting photosensitizer dissolved in said non-aqueous spinning solvent.

Claim 4

The positive photoresist of claim 1 comprising from about 5 to about 30 weight non-crosslinked polyglutarimide and from about 95 to about 70 weight percent non-aqueous, spinning solvent.

Claim 5

The positive photoresist of claim 3 comprising from about 10 to about 20 weight percent non-crosslinked polyglutarimide and from about 90 to about 80 weight percent non-aqueous, spinning solvent.

Claim 6

The positive photoresist of claim 2 where the concentration of said photosensitizer is from about 5 to about 30 weight percent based on the weight of said preformed, non-crosslinked polyglutarimide.

Claim 7

The positive photoresist of claim 2 wherein said photosensitizer is selected from the group consisting of diazooxides, and bis(o-nitrobenzyl)-1,7 heptane dioate.

Claim 8

The positive photoresist of claim 1 wherein the polyglutarimide has an atomic ratio of carbon to nitrogen of at least 8 and a glass transition temperature of at least 140° C.

Claim 9

The positive photoresist of claim 1 where said preformed polyglutarimide is formed by imidizing a polymethyl methacrylate polymer with ammonia.

Claim 10

The positive photoresist of claim 8 wherein said preformed polyglutarimide is formed by imidizing a polymethyl methacrylate polymer with a mixed reactant system comprising at least 20 weight percent ammonia and at least one alkylamine.

Claim 11

The positive photoresist of claim 1 wherein the non-aqueous, spinning solvent comprises a non-solvent for polyglutarimides selected from the group consisting of: acetyl acetone; 1-methoxy-2-propanol; cyclohexanone; chlorobenzene; mixtures of ethylene glycol monoethylether acetate, xylene and butyl acetate; xylene, toluene; butyl acetate; 1,2-dimethoxyethane; and ethylene glycol monomethyl ether in combination with one or more of the non-spinning solvents or mixtures thereof selected from the group consisting of: amide, polar, aprotic solvents; hydroxylic, polar, protic solvents; polar, aprotic, ketonic solvents; small chain, polar, carboxylic acids; and polar, basic, ethers.

Claim 12

The photoresist of claim 2 wherein the photosensitizer absorbs near, mid or deep UV radiation.

Claim 13

A surface comprising an adherent, uniform, aqueous base developable, film having a thickness of about one micrometer, of the photoresist of claims 1 or 2.

Claim 14

The surface film of claim 12 having a thickness of about 0.5 micrometer to about 3.0 micrometers.

Claim 15

A multilayer photoresist comprising as a planarizing layer the photoresist of claim 1 and at least one other layer capable of being imaged on said planarizing layer.

Claim 16

The multilayer photoresist of claim 14 in which the planarizing layer and the adjacent layer deposited on said planarizing layer do not form an interfacial scum.

Claim 17

The photoresist of claim 1 being thermally resistant to temperatures of from about 140° C. to about 240° C.

Claim 18

The photoresist of claim 1 being resistant to reactive ion etching.

Claim 19

A process for forming an image on a surface comprising depositing an adherent positive acting film on said surface from the photoresist of claim 1, exposing a portion of said film to a source of energy that increases the dissolution rate of said polyglutarimide in a developer, and developing the exposed portion of said film with said developer to form said image.

Claim 20

The process of claim 18 wherein said film is deposited from said photoresist of claim 2.

Claim 21

The process of claim 18 wherein said source of energy is selected from the group consisting of ultraviolet, e-beam, ion beam and x-ray.

Claim 22

The process of claim 18 further comprising softbaking said film prior to exposing said film to said source of energy.

Claim 23

A process for forming an image on a surface comprising depositing an adherent, planarizing film on said surface forming a second surface, said planarizing film comprising a preformed non-crosslinked polyglutarimide polymer formed from an ester of (meth)acrylic acid and having at least five percent by weight glutarimide units of the structure ##STR6## where R 1 , R 2 and R 3 independently represent hydrogen or unsubstituted or substituted alkyl, aryl, aralky, or alkaryl hydrocarbons having from one to twenty carbon atoms and where at least 20 mole percent of the R 3 substituents are hydrogen, dissolved in a non-aqueous, spinning solvent, depositing a second film capable of being imaged on said second surface, exposing a portion of said second film to a source of radiation, developing the exposed portion of said second film to create a mask on the planarizing film, and transferring said image from said second film through said mask and the planarizing film and onto said surface.

Claim 24

A process for forming an image on a surface comprising depositing an adherent, planarizing film on said surface forming a second surface, said planarizing film comprising a preformed non-crosslinked polyglutarimide polymer formed from an ester of (meth)acrylic acid and having at least five percent by weight glutarimide units of the structure ##STR6## where R 1 , R 2 and R 3 independently represent hydrogen or unsubstituted or substituted alkyl, aryl, aralky, or alkaryl hydrocarbons having from one to twenty carbon atoms and where at least 20 mole percent of the R 3 substituents are hydrogen, dissolved in a non-aqueous, spinning solvent, depositing a second film capable of being imaged on said second surface, exposing a portion of said second film to a source of radiation, developing the exposed portion of said second film to create a mask on the planarizing film, and transferring said image from said second film through said mask and the planarizing film and onto said surface.

Claim 25

The process of claim 22 wherein said second film comprises a positive acting photoresist.

Claim 26

The process of claim 22 wherein said image formed on said second film is transferred through said planarizing film onto said surface using reactive ion etching.

Claim 27

The process of claim 22 wherein said second film is a negative acting photoresist.

Claim 28

The process of claim 23 wherein said planarizing film is exposed to deep UV and developed using an aqueous base developer to transfer said image formed on said second film onto said surface.

Claim 29

The process of claim 26 wherein said planarizing film further comprises a photosensitizer sensitive to deep UV.

Claim 30

The process of claim 22 further comprising adding at least one layer, intermediate to said planarizing film and said second film, onto said planarizing film, said intermediate layer being resistant to said developing means used to create an image on said second film, and wherein said intermediate layer is developed through said mask formed on said second film to form a second image using plasma or wet etching to form a mask for transferring said second image onto said surface through said planarizing layer.

Claim 31

The process of claim 19 wherein said second image on said intermediate layer is transferred onto said surface by dry etching said planarizing layer through said mask formed on said intermediate layer.

Claim 32

The spinning solvent of the photoresist of claim 2 comprising a non-solvent for polyglutarimides selected from the group consisting of: acetyl acetone; 1-methoxy-2-propanol; cyclohexanone; chlorobenzene; mixtures of ethylene glycol monoethylether acetate, xylene and butyl acetate; xylene; toluene; butyl acetate; 1,2-dimethoxyethane; and ethylene glycol monomethyl ether, in combination with one or more of the non-spinning solvents or mixtures thereof selected from the group consisting of: amide, polar, aproptic solvents; hydroxylic, polar, protic solvents; polar, aprotic, ketonic solvents; small chain, polar, carboxylic acids; and polar, basic, ethers.