Abstract The invention relates to heat-resistant positive resists based upon precursor stages of highly heat-resistant polymers and light-sensitive diazoquinones, as well as to a method for preparing heat-resistant relief structures of such positive resists. The positive resists of the type mentioned are developed in such a manner that they are heat-resistant as well as have a long storage life and are easily processed. The invention provides for the use of oligomer and/or polymer precursor stages of polyoxazoles in the form of polycondensation products of aromatic and/or heterocyclic dihydroxydiamino compounds and dicarboxylic acid chlorides or esters. The positive resists according to the invention are suitable especially for applications in microelectronics.
In a heat-resistant positive resist prepared from precursor stages of highly heat-resistant polymers and light-sensitive diazoquinones, the improvement wherein said resist comprises oligomer and/or polymer precursor stages of polyoxazoles in the form of polycondensation products of aromatic and/or heterocyclic dihydroxydiamino compounds and dicarboxylic acid chlorides or dicarboxylic acid esters as said precursor stages.
Claim 2
Dependent Claim
53 words
In a heat-resistant positive resist prepared from precursor stages of highly heat-resistant polymers and light-sensitive diazoquinones, the improvement wherein said resist comprises oligomer and/or polymer precursor stages of polyoxazoles in the form of polycondensation products of aromatic and/or heterocyclic dihydroxydiamino compounds and dicarboxylic acid chlorides or dicarboxylic acid esters as said precursor stages.
Claim 3
Dependent Claim
22 words
A positive resist according to claim 1 wherein the polymer precursor stage is a condensation product of 3,3+-dihydroxy benzidine and isophthalic-acid dichloride.
Claim 4
Dependent Claim
22 words
A positive resist according to claim 1 wherein the polymer precursor stage is a condensation product of 3,3'-dihydroxy-4,4'-diaminodiphenyl ether and terephthalic-acid dichloride.
Claim 5
Dependent Claim
17 words
A positive resist according to claim 1 wherein said diazoquinone comprises the bis-naphthoquinone(1,2)-diazide-(2)-5-sulfonic acid ester of β,β-bis-(4-hydroxyphenyl)-propane.
Claim 6
Dependent Claim
13 words
A positive resist according to claim 1 wherein said diazoquinone is N-dehydroabietyl-6-diazo-5(6)-oxo-1-naphthalin sulfonamide.
Claim 7
Dependent Claim
25 words
A positive resist according to claim 1 wherein the weight ratio of said polymer precursor stage to said diazoquinone is between about 1:20 and 20:1.
Claim 8
Dependent Claim
17 words
A positive resist according to claim 6 wherein said weight ratio is between about 1:10 and 10:1.