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US5017981A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor memory and method for fabricating the same

Assignee: Micron Memory Japan Ltd
•
Filing: 1988-06-10
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Granted: 1991-05-21
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Expires: 2008-06-10
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Abstract

Abstract A semiconductor memory is provided having a capacitor formed by utilizing a groove formed in a semiconductor substrate and an insulated gate field effect transistor. In particular, an arrangement is provided to prevent a depletion region formed around the groove from growing into an adjacent capacitor. By virtue of this, both the area occupied by each memory cell and the distance between the memory cells can be made very small. Accordingly, high density integration is facilitated.

Inventors

  • 👤 Hideo Sunami
  • 👤 Tokuo Kure
  • 👤 Yoshifumi Kawamoto

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 01:06
CPC Classifications
G; G11; G11C; G11C11/00; G11C11/21; G11C11/34; G11C11/40; G11C11/401; G11C11/403; G11C11/404; H; H10; H10B; H10B12/00; H10B12/30; H10B12/37

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 242 words
A semiconductor memory comprising: capacitors formed at a main surface of a semiconductor substrate for storing information; insulated-gate field effect transistors formed at said main surface of the substrate for reading out the signal charges stored in said capacitors; word lines for applying signals to a gate electrode of the insulated-gate field effect transistors; and data lines for reading out the information stored in said capacitors, wherein the capacitors each include an electrode, the electrode having a first side wall and a second side wall, the first and second side walls being formed substantially vertical to the main surface of the substrate, and the second side wall being surrounded by the first side wall, said capacitor further including a capacitor plate, wherein said capacitor plate is formed adjacent to the first and second side walls and is separated from the first and second side walls by an insulating layer so that said first and second side walls respectively face predetermined portions of the capacitor plate and are respectively separated from said predetermined portions of the capacitor plate by said insulating layer, wherein a source or drain of each of said insulated-gate field effect transistors is respectively connected to said electrode, wherein a drain or source of each of said insulated-gate field effect transistors is connected to one of said data lines, and wherein the gate electrode of each of said insulated-gate field effect transistors is connected to one of said word lines.
Claim 2
Dependent Claim 242 words
A semiconductor memory comprising: capacitors formed at a main surface of a semiconductor substrate for storing information; insulated-gate field effect transistors formed at said main surface of the substrate for reading out the signal charges stored in said capacitors; word lines for applying signals to a gate electrode of the insulated-gate field effect transistors; and data lines for reading out the information stored in said capacitors, wherein the capacitors each include an electrode, the electrode having a first side wall and a second side wall, the first and second side walls being formed substantially vertical to the main surface of the substrate, and the second side wall being surrounded by the first side wall, said capacitor further including a capacitor plate, wherein said capacitor plate is formed adjacent to the first and second side walls and is separated from the first and second side walls by an insulating layer so that said first and second side walls respectively face predetermined portions of the capacitor plate and are respectively separated from said predetermined portions of the capacitor plate by said insulating layer, wherein a source or drain of each of said insulated-gate field effect transistors is respectively connected to said electrode, wherein a drain or source of each of said insulated-gate field effect transistors is connected to one of said data lines, and wherein the gate electrode of each of said insulated-gate field effect transistors is connected to one of said word lines.
Claim 3
Dependent Claim 18 words
The semiconductor memory according to claim 1, wherein said capacitor plate is made chiefly of highly doped poly-silicon.
Claim 4
Dependent Claim 38 words
The semiconductor memory according to claim 1, wherein the electrode has a third side wall formed substantially vertical to the main surface of the substrate, and wherein the third side wall is surrounded by the first side wall.
Claim 5
Dependent Claim 24 words
The semiconductor memory according to claim 1, wherein the first side wall is a side wall of a groove provided in the semiconductor substrate.
Claim 6
Dependent Claim 28 words
The semiconductor memory according to claim 1, wherein the second side wall is a side wall of a post provided in a groove provided in the semiconductor substrate.
Claim 7
Dependent Claim 28 words
The semiconductor memory according to claim 3, wherein the third side wall is a side wall of a post provided in a groove provided in the semiconductor substrate.
Claim 8
Dependent Claim 47 words
The semiconductor memory according to claim 1, wherein the insulating layer includes at least two insulating films comprised of materials selected from a group consisting of SiO 2 , Si 3 N 4 , Ta 2 O 5 , TiO 2 and Nb 2 O 5 .
Claim 9
Dependent Claim 18 words
The semiconductor memory according to claim 7, wherein said capacitor plate is made chiefly of highly doped poly-silicon.
Claim 10
Dependent Claim 18 words
The semiconductor memory according to claim 4, wherein said capacitor plate is made chiefly of highly doped poly-silicon.
Claim 11
Dependent Claim 17 words
The semiconductor memory according to claim 1, wherein the insulating layer includes Ta 2 O 5 .
Claim 12
Dependent Claim 17 words
The semiconductor memory according to claim 2, wherein the insulating layer includes Ta 2 O 5 .

References Cited (Backward Citations)

US3811076A Cited
US4017885A Cited
US4151607A Cited
US4164751A Cited
US4199772A Cited
US4621277A Cited
US4511911A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-05-20 1994-11-19 1995-05-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-05-20 1998-11-19 1999-05-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-05-20 2002-11-19 2003-05-21 $7700.00 Window Closed / Lapsed

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