US5002010A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum vessel
Assignee: Novellus Systems Inc
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Filing: 1989-10-18
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Granted: 1991-03-26
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Expires: 2009-10-18
Abstract
Abstract Pre- and post-processing of a semiconductor wafer within a main vacuum chamber is accomplished by a wafer holder disposed within a clam shell-like device. The clam shell device includes a first member disposed above the wafer holder and a second member disposed below the wafer holder in a facing relationship to the first member. The first member and the second member each have a respective mating surface. The first member and the second member are movable between a closed position wherein the mating surface of each of the first member and second member hermetically engage each other in an open position. The clam shell device forms an interior chamber when in its closed position. Gases are evacuated from the interior chamber, exteriorally of the main chamber, when the clam shell device is in in a closed position to avoid contamination of the vacuum environment.
Inventors
- 👤 Richard S. Weinberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:41
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3306; C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/564; H10P72/04; H10P72/0451; H10P72/0462; H10P72/3308; H10P72/70; H10P72/76; H10P72/7604; H10P72/7612
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
149 words
An apparatus to permit processing of a semiconductor wafer within a main vacuum chamber, said apparatus comprising a main vacuum chamber; a wafer holder; a clam shell device including a first member disposed above said wafer holder and a second member disposed below said wafer holder in a facing relationship to said first member, said first member and said second member each having a respective mating surface, said first member and said second member being movable between an open position and a closed position wherein said mating surface of said first member is hermetically engaged with said mating surface of said second member, said clam shell device forming an interior chamber located inside of and sealed from the main chamber when in said closed position; and means for evacuating gases from said interior chamber exteriorally of said main chamber when said clam shell device is in a closed position.
Claim 2
Independent Claim
149 words
An apparatus to permit processing of a semiconductor wafer within a main vacuum chamber, said apparatus comprising a main vacuum chamber; a wafer holder; a clam shell device including a first member disposed above said wafer holder and a second member disposed below said wafer holder in a facing relationship to said first member, said first member and said second member each having a respective mating surface, said first member and said second member being movable between an open position and a closed position wherein said mating surface of said first member is hermetically engaged with said mating surface of said second member, said clam shell device forming an interior chamber located inside of and sealed from the main chamber when in said closed position; and means for evacuating gases from said interior chamber exteriorally of said main chamber when said clam shell device is in a closed position.
Claim 3
Dependent Claim
32 words
An apparatus as set forth in claim 1 wherein said mating surface of one of said first member and said second member includes a channel and an O-ring disposed in said channel.
Claim 4
Dependent Claim
25 words
An apparatus as set forth in claim 1 further comprising: means for cooling said wafer when said clam shell device is in a closed position.
Claim 5
Dependent Claim
45 words
An apparatus as set forth in claim 3 wherein said cooling means includes: means for positioning said wafer holder within said interior chamber so that said wafer contacts an interior face of said second member; and means for introducing a coolant within said second member.
Claim 6
Dependent Claim
40 words
An apparatus as set forth in claim 3 wherein said cooling means includes: means for introducing a gas into said interior chamber when said clam shell device is in said closed position, said gas being evacuated by said evacuating means.
Claim 7
Dependent Claim
47 words
An apparatus as set forth in claim 5 wherein said introducing means includes: a fitting disposed in said first member and having an opening in communication with said interior chamber, said fitting being adapted to be coupled to a source of gas external of said vacuum chamber.
Claim 8
Dependent Claim
33 words
An apparatus as set forth in claim 6 wherein said introducing means further includes a baffle disposed in said interior chamber proximate said opening to disperse said gas introduced into said interior chamber.
Claim 9
Dependent Claim
34 words
An apparatus as set forth in claim 1 wherein said first member includes: an optically transparent window hermetically sealed therein such that optical radiation may be directed through said window to heat said wafer.
Claim 10
Dependent Claim
46 words
An apparatus as set forth in claim 1 wherein said evacuating means includes: a fitting disposed in said first member and having an opening in communication with said interior chamber, said fitting being adapted to be coupled to a vacuum pump exterior of said vacuum chamber.
Claim 11
Dependent Claim
67 words
An apparatus as set forth in claim 1 wherein said wafer holder includes: a plurality of upright pins; a plurality of openings disposed through said second member, each of said pins being disposed in one of said openings, said pins being slidable between a raised position and a lowered position, said wafer being in contact with said second member when said pins are in said lowered position.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-25 | 1994-09-24 | 1995-03-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-25 | 1998-09-24 | 1999-03-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-25 | 2002-09-24 | 2003-03-26 | $7700.00 | Window Closed / Lapsed |