Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
255 words
Apparatus for processing articles in controlled environments comprising a tunnel whose wall is provided with an opening which gives access to a chamber which is connected to the tunnel in a vacuum-tight manner and in which a processing step can be carried out, a conveyor present in the tunnel for transporting the articles through the tunnel, which conveyor has seats for receiving holders that can support the articles, transport means by which the articles supported by a holder which is carried by the conveyor into a position opposite to the opening in the wall of the tunnel, can be introduced into the chamber and recovered from the chamber into the tunnel and means by which a controlled environment can be created in the chamber, characterized in that the tunnel is endless and the conveyor follows a closed path, the tunnel has in its wall several openings each giving access to a respective processing chamber which is connected to the tunnel in a vacuum-tight manner, and an opening giving access to a lock chamber which is connected to the tunnel in a vacuum-tight manner and in which articles can be locked through; in that the apparatus can be sealed from its surroundings in a vacuum-tight manner by means of a panel in the outside wall of the lock chamber; in that the chambers can be sealed from the tunnel in a vacuum-tight manner; and in that the lock chamber, processing chambers and the tunnel each have means by which a controlled environment can be created therein.
Claim 2
Dependent Claim
255 words
Apparatus for processing articles in controlled environments comprising a tunnel whose wall is provided with an opening which gives access to a chamber which is connected to the tunnel in a vacuum-tight manner and in which a processing step can be carried out, a conveyor present in the tunnel for transporting the articles through the tunnel, which conveyor has seats for receiving holders that can support the articles, transport means by which the articles supported by a holder which is carried by the conveyor into a position opposite to the opening in the wall of the tunnel, can be introduced into the chamber and recovered from the chamber into the tunnel and means by which a controlled environment can be created in the chamber, characterized in that the tunnel is endless and the conveyor follows a closed path, the tunnel has in its wall several openings each giving access to a respective processing chamber which is connected to the tunnel in a vacuum-tight manner, and an opening giving access to a lock chamber which is connected to the tunnel in a vacuum-tight manner and in which articles can be locked through; in that the apparatus can be sealed from its surroundings in a vacuum-tight manner by means of a panel in the outside wall of the lock chamber; in that the chambers can be sealed from the tunnel in a vacuum-tight manner; and in that the lock chamber, processing chambers and the tunnel each have means by which a controlled environment can be created therein.
Claim 3
Dependent Claim
25 words
Apparatus as claimed in claim 1, characterized in that the openings in the wall of the tunnel can be kept sealed at the same time.
Claim 4
Dependent Claim
43 words
Apparatus as claimed in claim 1 or 2, characterized in that the opening in the wall of the tunnel giving access to the lock chamber can be sealed in a vacuum-tight manner by means of a seat for a holder of the conveyor.
Claim 5
Dependent Claim
37 words
Apparatus as claimed in claim 3, characterized in that each opening in the wall of the tunnel giving access to a respective processing chamber can be sealed in a vacuum-tight manner by means of an opposed holder.
Claim 6
Dependent Claim
54 words
Apparatus as claimed in claim 3, characterized in that the openings in the wall of the tunnel are situated above the conveyer and in that lifting means are provided below the conveyor for lifting the sealing means and for introducing the articles supported by the holders into a respective processing chamber or lock chamber.
Claim 7
Dependent Claim
44 words
Apparatus as claimed in claim 1 or 2, characterized in that the openings in the wall of the tunnel giving access to the processing chambers can be sealed in a vacuum-tight manner by means of a respective seat for a holder of the conveyor.
Claim 8
Dependent Claim
37 words
Apparatus as claimed in claim 6, characterized in that each opening in the wall of the tunnel giving access to a respective processing chamber can be sealed in a vacuum-tight manner by means of an opposed holder.
Claim 9
Dependent Claim
53 words
Apparatus as claimed in claim 7, characterized in that the openings in the wall of the tunnel are situated above the conveyor and in that lifting means are provided below the conveyor for lifting the sealing means and for introducing the articles supported by the holders into a respective processing chamber or lock.
Claim 10
Dependent Claim
53 words
Apparatus as claimed in claim 6, characterised in that the openings in the wall of the tunnel are situated above the conveyor and in that lifting means are provided below the conveyor for lifting the sealing means and for introducing the articles supported by the holders into a respective processing chamber or lock.