Patent US4990995A successfully refreshed from Google Patents.
US4990995A
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Low reflectance conductor in an integrated circuit
Assignee: Intersil Corp
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Filing: 1987-09-08
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Granted: 1991-02-05
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Expires: 2007-09-08
Abstract
Abstract A low reflectance conductor for an integrated circuit is disclosed. A layer of refractory metal is disposed over the aluminum alloy or silicide conductors commonly in use in integrated circuits. The layer of refractory metal is then treated in a plasma reactor to form a low reflective layer of refractory metal oxide on the surface.
Inventors
- 👤 Jer-shen Maa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 16:41
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4451; H10W20/425
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
68 words
In an integrated circuit, a low reflectance conductor having a reflectance of less than about 40% comprising: (a) a conductive layer; (b) a layer of refractory metal overlying said conductive layer and having a thickness of greater than about 300 angstroms; and (c) a layer of refractory metal oxide overlying said layer of refractory metal and having a thickness of between about 100 angstroms and about 200 angstroms.
Claim 2
Dependent Claim
68 words
In an integrated circuit, a low reflectance conductor having a reflectance of less than about 40% comprising: (a) a conductive layer; (b) a layer of refractory metal overlying said conductive layer and having a thickness of greater than about 300 angstroms; and (c) a layer of refractory metal oxide overlying said layer of refractory metal and having a thickness of between about 100 angstroms and about 200 angstroms.
Claim 3
Dependent Claim
20 words
The low reflectance conductor of claim 1 wherein said conductive layer is a layer of aluminum or aluminum alloy material.
Claim 4
Dependent Claim
27 words
The low reflectance conductor of claim 1 wherein said conductive layer is a composite of a layer of polycrystalline silicon and a layer of refractory metal silicide.
Claim 5
Dependent Claim
29 words
The low reflectance conductor of claim 3 wherein said layer of refractory metal is a similar metal to that from which said layer of refractory metal silicide is formed.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-04 | 1994-08-06 | 1995-02-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-04 | 1998-08-06 | 1999-02-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-04 | 2002-08-06 | 2003-02-05 | $7700.00 | Window Closed / Lapsed |