Patent US4984890A successfully refreshed from Google Patents.
US4984890A
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US
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Method and an apparatus for aligning first and second objects with each other
Assignee: Toshiba Corp
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Filing: 1989-12-20
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Granted: 1991-01-15
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Expires: 2009-12-20
Abstract
Abstract A distance between a mask and a wafer is set such that exposure light beams emerged from the mask are converged by the projection lens to be focused on the wafer. Two light beams with same wavelength of the alignment light beam emerge from a first point (b) which is located far away from the mask, and are focused on the wafer or neighborhood of it by the projection lens. Two mask marks of diffraction gratings are formed on the mask and spaced at a predetermined distance from each other. When the alignment light beams are applied to the mask marks, two diffracted light beams of predetermined order emerge individually from the mask marks in such a manner that the respective optical axes of the two diffracted light beams, which are directed oppositely to of the diffracted light beams, intersect each other on the first point. Thus, the diffracted light beams advance as if the diffracted light beams were the two light beams emerging from the first point. Therefore, the two diffracted light beams can be focused on the wafer or neighborhood of it or can be incident on a wafer mark which is a diffraction grating. Thus, rediffracted light beams emerge from the wafer mark and are detected, so that the mask and the wafer are aligned with each other. Accordingly, the alignment can be performed, despite a great diffraction between the wave-lengths of the exposure light beam and the alignment light beam.
Inventors
- 👤 Toru Tojo
- 👤 Osamu Kuwabara
- 👤 Masashi Kamiya
- 👤 Hisakazu Yoshino
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 11:54
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
159 words
A method for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having one first diffraction point, the second object having two second diffraction points spaced at a predetermined distance, said method comprising the steps of: directing a light beam emitted from a light source to the first diffraction point so that two diffracted light beams emerge from the first diffraction point; transferring the two diffracted light beams through the projection lens toward the two second diffraction points, the two diffracted light beams being converged by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; detecting the two re-diffracted light beams, thereby obtaining a detection signal which corresponds to a displacement between the first and second objects; and aligning the first and second objects in accordance with the displacement.
Claim 2
Independent Claim
159 words
A method for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having one first diffraction point, the second object having two second diffraction points spaced at a predetermined distance, said method comprising the steps of: directing a light beam emitted from a light source to the first diffraction point so that two diffracted light beams emerge from the first diffraction point; transferring the two diffracted light beams through the projection lens toward the two second diffraction points, the two diffracted light beams being converged by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; detecting the two re-diffracted light beams, thereby obtaining a detection signal which corresponds to a displacement between the first and second objects; and aligning the first and second objects in accordance with the displacement.
Claim 3
Dependent Claim
43 words
A method according to claim 1, wherein respective optical axes of the two diffracted light beams, which are directed in an advancing direction of the diffracted light beams, intersect each other at an intersection point at a predetermined distance from the second object.
Claim 4
Independent Claim
190 words
A method for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having one first diffraction point, the second object having two second diffraction points spaced at a predetermined distance, said method comprising the steps of: directing a light beam emitted from a light source to the first diffraction point, so that two diffracted light beams emerge from the first diffraction point; transferring the two diffracted light beams through the projection lens toward the two second diffraction points, the two diffracted light beams being converged by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; interfering the two re-diffracted light beams with each other, thereby generating a light beat in the two re-diffracted light beams; detecting the light beat, thereby obtaining a phase difference of the detected beat with respect to a reference beat, and the phase difference corresponding to a displacement between the first and second objects; and aligning the first and second objects in accordance with the displacement.
Claim 5
Independent Claim
190 words
A method for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having one first diffraction point, the second object having two second diffraction points spaced at a predetermined distance, said method comprising the steps of: directing a light beam emitted from a light source to the first diffraction point, so that two diffracted light beams emerge from the first diffraction point; transferring the two diffracted light beams through the projection lens toward the two second diffraction points, the two diffracted light beams being converged by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; interfering the two re-diffracted light beams with each other, thereby generating a light beat in the two re-diffracted light beams; detecting the light beat, thereby obtaining a phase difference of the detected beat with respect to a reference beat, and the phase difference corresponding to a displacement between the first and second objects; and aligning the first and second objects in accordance with the displacement.
Claim 6
Dependent Claim
43 words
A method according to claim 3, wherein respective optical axes of the two diffracted light beams, which are directed in an advancing direction of the diffracted light beams, intersect each other at an intersection point at a predetermined distance from the second object.
Claim 7
Dependent Claim
35 words
A method according to claim 3, wherein respective directing step includes a step for generating two light beams of different frequencies and a step for directing the two light beams onto the first diffraction point.
Claim 8
Independent Claim
197 words
A method for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having two first diffraction points spaced at a predetermined distance, the second object having two second diffraction points spaced at a predetermined distance, said method comprising the steps of: directing two light beams emitted from a light source to the two first diffraction points so that two diffracted light beams emerge respectively from the two first diffraction points; transferring the two diffracted light beams through the projection lens toward the two second diffraction points, the two diffracted light beams being converged by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; interfering the two re-diffracted light beams with each other, thereby generating a light beat in the two re-diffracted light beams; detecting the light beat, thereby obtaining a phase difference of the detected beat with respect to a reference beat, the phase difference corresponding to a displacement between the first and second objects; and aligning the first and second objects in accordance with the displacement.
Claim 9
Independent Claim
197 words
A method for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having two first diffraction points spaced at a predetermined distance, the second object having two second diffraction points spaced at a predetermined distance, said method comprising the steps of: directing two light beams emitted from a light source to the two first diffraction points so that two diffracted light beams emerge respectively from the two first diffraction points; transferring the two diffracted light beams through the projection lens toward the two second diffraction points, the two diffracted light beams being converged by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; interfering the two re-diffracted light beams with each other, thereby generating a light beat in the two re-diffracted light beams; detecting the light beat, thereby obtaining a phase difference of the detected beat with respect to a reference beat, the phase difference corresponding to a displacement between the first and second objects; and aligning the first and second objects in accordance with the displacement.
Claim 10
Dependent Claim
45 words
A method according to claim 6, wherein respective optical axes of the two diffracted light beams, which are directed opposite to an advancing direction of the two diffracted light beams, intersect each other at an inspection point at a predetermined distance from the first object.
Claim 11
Dependent Claim
43 words
A method according to claim 6, wherein respective optical axes of the two diffracted light beams, which are directed in an advancing direction of the diffracted light beams, intersect each other at an intersection point at a predetermined distance from the second object.
Claim 12
Dependent Claim
37 words
A method according to claim 6, wherein said directing step includes a step for generating two light beams of different frequencies and a step for individually directing the two light beams onto the two first diffraction points.
Claim 13
Independent Claim
173 words
A method for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having two first diffraction points spaced at a predetermined distance, the second object having one second diffraction point, said method comprising the steps of: directing two light beams emitted from a light source to the two first diffraction points, so that two diffracted light beams emerge from the two first diffraction points; transferring the two diffracted light beams through the projection lens toward the second diffraction points, the two diffracted light beams being forced on the second diffraction point by the projection lens, so that one re-diffracted and interfered light beam emerges from the second diffraction point; detecting a light beat generated in the re-diffracted and interfered light beam, thereby obtaining a phase difference of the detected beat with respect to a reference beat, the phase difference corresponding to a displacement between the first and second objects; and aligning the first and second objects in accordance with the displacement.
Claim 14
Independent Claim
173 words
A method for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having two first diffraction points spaced at a predetermined distance, the second object having one second diffraction point, said method comprising the steps of: directing two light beams emitted from a light source to the two first diffraction points, so that two diffracted light beams emerge from the two first diffraction points; transferring the two diffracted light beams through the projection lens toward the second diffraction points, the two diffracted light beams being forced on the second diffraction point by the projection lens, so that one re-diffracted and interfered light beam emerges from the second diffraction point; detecting a light beat generated in the re-diffracted and interfered light beam, thereby obtaining a phase difference of the detected beat with respect to a reference beat, the phase difference corresponding to a displacement between the first and second objects; and aligning the first and second objects in accordance with the displacement.
Claim 15
Dependent Claim
45 words
A method according to claim 10, wherein respective optical axes of the two diffracted light beams, which are directed opposite to an advancing direction of the two diffracted light beams, intersect each other at an intersection point at a predetermined distance from the first object.
Claim 16
Dependent Claim
37 words
A method according to claim 10, wherein said directing step includes a step for generating two light beams of different frequencies and a step for individually directing the two light beams onto the two first diffraction points.
Claim 17
Independent Claim
173 words
An apparatus for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having one first diffraction point, the second object having two second diffraction points spaced at predetermined distance, comprising: a light source for emitting an alignment light beam; means for directing the alignment light beam to the first diffraction point, so that two diffracted light beams emerge from the first diffraction point, the two diffracted light beams passing through the projection lens toward the two second diffraction points, being converted by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; means for detecting the re-diffracted light beams and generating a detection signal which corresponds to a displacement between the first and second objects; and means for adjusting said first and second objects relative to each other in response to the detection signal, thereby aligning said first and second objects with each other.
Claim 18
Independent Claim
173 words
An apparatus for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having one first diffraction point, the second object having two second diffraction points spaced at predetermined distance, comprising: a light source for emitting an alignment light beam; means for directing the alignment light beam to the first diffraction point, so that two diffracted light beams emerge from the first diffraction point, the two diffracted light beams passing through the projection lens toward the two second diffraction points, being converted by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; means for detecting the re-diffracted light beams and generating a detection signal which corresponds to a displacement between the first and second objects; and means for adjusting said first and second objects relative to each other in response to the detection signal, thereby aligning said first and second objects with each other.
Claim 19
Dependent Claim
43 words
An apparatus according to claim 13, wherein respective optical axes of the two diffracted light beams, which are directed in an advancing direction of the diffracted light beam, intersect each other at an intersection point at a predetermined distance from the second object.
Claim 20
Independent Claim
203 words
An apparatus for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having one first diffraction point, the second object having two second diffraction points spaced at a predetermined distance, comprising: a light source for emitting an alignment light beam; means for directing the alignment light beam to the first diffraction point, so that two diffracted light beams emerge from the first diffraction point, the two diffracted light beams passing through the projection lens toward the two second diffraction points, being converted by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; means for receiving the re-diffracted light beams and producing a beat signal which is generated by interfering the re-diffracted light beams with each other, thereby obtaining a phase difference of the heat signal with respect to a reverence beat signal, the phase difference corresponding to a displacement between the first and second objects; and means for adjusting said first and second objects relative to each other in accordance with the displacement, thereby aligning said first and second objects with each other.
Claim 21
Independent Claim
203 words
An apparatus for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having one first diffraction point, the second object having two second diffraction points spaced at a predetermined distance, comprising: a light source for emitting an alignment light beam; means for directing the alignment light beam to the first diffraction point, so that two diffracted light beams emerge from the first diffraction point, the two diffracted light beams passing through the projection lens toward the two second diffraction points, being converted by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; means for receiving the re-diffracted light beams and producing a beat signal which is generated by interfering the re-diffracted light beams with each other, thereby obtaining a phase difference of the heat signal with respect to a reverence beat signal, the phase difference corresponding to a displacement between the first and second objects; and means for adjusting said first and second objects relative to each other in accordance with the displacement, thereby aligning said first and second objects with each other.
Claim 22
Dependent Claim
43 words
An apparatus according to claim 15, wherein respective optical axes of the two diffracted light beams, which are directed in an advancing direction of the diffracted light beam, intersect each other at an intersection point at a predetermined distance from the second object.
Claim 23
Dependent Claim
23 words
An apparatus according to claim 15, wherein said alignment light beam directed on the first diffraction point includes two beams of different frequencies.
Claim 24
Independent Claim
210 words
An apparatus for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having two first diffraction points, spaced at a predetermined distance, the second object having two second diffraction points spaced at a predetermined distance, comprising: means for emitting two alignment light beams; means for directing the two alignment light beams to the two first diffraction points, so that two diffracted light beams emerge respectively from the two first diffraction points, the two diffracted light beams passing through the projection lens toward the two second diffraction points, being converged by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; means for receiving the re-diffracted light beams and producing a beat signal which is generated by interfering the re-diffracted light beams with each other, thereby obtaining a phase difference of the heat signal with respect to a reverence beat signal, the phase difference corresponding to a displacement between the first and second objects; and means for adjusting said first and second objects relative to each other in accordance with the displacement, thereby aligning said first and second objects with each other.
Claim 25
Independent Claim
210 words
An apparatus for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having two first diffraction points, spaced at a predetermined distance, the second object having two second diffraction points spaced at a predetermined distance, comprising: means for emitting two alignment light beams; means for directing the two alignment light beams to the two first diffraction points, so that two diffracted light beams emerge respectively from the two first diffraction points, the two diffracted light beams passing through the projection lens toward the two second diffraction points, being converged by the projection lens and then being incident on the two second diffraction points, so that two re-diffracted light beams emerge respectively from the two second diffraction points; means for receiving the re-diffracted light beams and producing a beat signal which is generated by interfering the re-diffracted light beams with each other, thereby obtaining a phase difference of the heat signal with respect to a reverence beat signal, the phase difference corresponding to a displacement between the first and second objects; and means for adjusting said first and second objects relative to each other in accordance with the displacement, thereby aligning said first and second objects with each other.
Claim 26
Dependent Claim
44 words
An apparatus according to claim 18, wherein respective optical axes of the two diffracted light beams, which are directed opposite to an advancing direction of the diffracted light beam, intersect each other at an intersection point at a predetermined distance from the first object.
Claim 27
Dependent Claim
43 words
An apparatus according to claim 18, wherein respective optical axes of the two diffracted light beams, which are directed in an advancing direction of the diffracted light beam, intersect each other at an intersection point at a predetermined distance from the second object.
Claim 28
Dependent Claim
26 words
The apparatus according to claim 18, wherein each of said alignment light beams directed on the two second diffraction points includes two beam having different frequencies.
Claim 29
Independent Claim
197 words
An apparatus for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having two first diffraction points, spaced at a predetermined distance, the second object having one second diffraction point comprising: means for emitting two alignment light beams; means for directing the two alignment light beams to the two first diffraction points, so that two diffracted light beams emerge respectively from the two first diffraction points, the two diffracted and interfered light beams passing through the projection lens toward the second diffraction point, and forced on the second diffraction point by the projection lens, so that one re-diffracted light beam emerges from the second diffraction point; means for receiving the re-diffracted light beam and producing a beat signal which is generated by interfering light beams with each other, thereby obtaining a phase difference of the heat signal with respect to a reverence beat signal, the phase difference corresponding to a displacement between the first and second objects; and means for adjusting said first and second objects relative to each other in accordance with the displacement, thereby aligning said first and second objects with each other.
Claim 30
Independent Claim
197 words
An apparatus for aligning first and second objects with each other, a projection lens disposed between the first and second objects, the first object having two first diffraction points, spaced at a predetermined distance, the second object having one second diffraction point comprising: means for emitting two alignment light beams; means for directing the two alignment light beams to the two first diffraction points, so that two diffracted light beams emerge respectively from the two first diffraction points, the two diffracted and interfered light beams passing through the projection lens toward the second diffraction point, and forced on the second diffraction point by the projection lens, so that one re-diffracted light beam emerges from the second diffraction point; means for receiving the re-diffracted light beam and producing a beat signal which is generated by interfering light beams with each other, thereby obtaining a phase difference of the heat signal with respect to a reverence beat signal, the phase difference corresponding to a displacement between the first and second objects; and means for adjusting said first and second objects relative to each other in accordance with the displacement, thereby aligning said first and second objects with each other.
Claim 31
Dependent Claim
45 words
An apparatus according to claim 22, wherein respective optical axes of the two diffracted light beams, which are directed opposite to an advancing direction of the two diffracted light beams, intersect each other at an intersection point at a predetermined distance from the first object.
Claim 32
Dependent Claim
26 words
An apparatus according to claim 22, wherein each of said alignment light beams directed on the two first diffraction points includes two beams having different frequencies.
References Cited (Backward Citations)
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