US4631416A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer/mask alignment system using diffraction gratings
Assignee: Agilent Technologies Inc
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Filing: 1983-12-19
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Granted: 1986-12-23
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Expires: 2003-12-19
Abstract
Abstract An alignment method in which light is diffracted from a mask grating to a wafer grating and back through the mask grating to produce a set of output diffraction orders. The intensity of the zeroth output order is monitored and the mask is translated and rotated within the plane containing the mask to align the mask with the wafer. Alignment occurs when the intensity of the zeroth output order is at an extremum. The distance between the mask and wafer is also adjusted to extremize the intensity of the zeroth output order to make the wafer lie within the focal plane of the exposure optics. The wafer mask is preferrably a holographic phase grating to simplify production of the grating and to eliminate resist related interference. Two dimensional gratings can be used to achieve alignment with only one grating on each wafer.
Inventors
- 👤 William R. Trutna, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:17
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
110 words
A method of aligning a first object with a second object, said method comprising the steps of: (a) diffracting light from a first diffraction grating on the first object to the second object; (b) diffracting light from the first diffraction grating off of a second diffraction grating on the second object to produce a zeroth order output beam from the second grating; and (c) varying, in a first direction, the relative position between the first object and the second object until the intensity of the zeroth order output beam is at an extremum with respect to such positional variation in order to align these two objects in the first direction.
Claim 2
Independent Claim
110 words
A method of aligning a first object with a second object, said method comprising the steps of: (a) diffracting light from a first diffraction grating on the first object to the second object; (b) diffracting light from the first diffraction grating off of a second diffraction grating on the second object to produce a zeroth order output beam from the second grating; and (c) varying, in a first direction, the relative position between the first object and the second object until the intensity of the zeroth order output beam is at an extremum with respect to such positional variation in order to align these two objects in the first direction.
Claim 3
Dependent Claim
76 words
A method as in claim 1 wherein the first and second diffraction gratings are two dimensional gratings, said method further comprising the step of: (d) varying, in a second direction non-collinear with the first direction, the relative position between the first object and the second object until the intensity of the zeroth order output beam is at an extremum with respect to such positional variation in order to align these two objects in the second direction.
Claim 4
Dependent Claim
65 words
A method as in claim 2 further comprising the step of: (e) varying, in a third direction non-coplanar with the first and second directions, the relative position between the first object and the second object until the intensity of the zeroth order output beam is at an extremum with respect to such positional variation in order to align these two objects in the third direction.
Claim 5
Dependent Claim
26 words
A method as in claim 1 further comprising the step of; (f) focussing the light diffracted from the first diffraction grating onto the second diffraction grating
Claim 6
Dependent Claim
36 words
A method as in claim 1 further comprising before step (a) the step of: (g) diffracting light from the second diffraction grating to the first object to provide the light diffracted by the first diffraction grating.
Claim 7
Dependent Claim
74 words
A method as in claim 5 wherein the light diffracted from the first diffraction grating is diffracted in reflection mode and wherein the second grating is a phase grating selected to produce zero contribution to the intensity of the zeroth order output beam light reflected without diffraction from the first object, whereby any planar layers overlying the first grating will not produce reflections that contribute to the intensity of the zeroth order output beam.
Claim 8
Dependent Claim
25 words
A method as in claim 1 wherein at least one of the diffraction gratings is an amplitude grating which functions as a holographic phase grating.
Claim 9
Dependent Claim
57 words
A method as in claim 1 further comprising before step (a) the step of: (h) pre-aligning the first object to the second object to within a capture range in which alignment by steps (a)-(e) utilizes the extremum in the intensity of the zeroth order output beam corresponding to the desired alignment between the first and second objects.
Claim 10
Dependent Claim
105 words
A method as in claim 1 wherein step (c) comprises the steps of; (i) dithering in the first direction the relative position between the first and second objects, whereby a small oscillatory component is introduced into the intensity of the zeroth order output beam enabling the slope of the intensity of the zeroth order output beam as a function of motion in the first direction to be determined; (j) in response to the oscillatory component in the intensity of the zeroth order output beam, varying the relative position of the first and second sources in the first direction to produce said extremum in this intensity.
Claim 11
Dependent Claim
76 words
A method as in claim 9 wherein step (j) comprises the steps of; (k) producing a DC error signal proportional to the Fourier component in the intensity of the zeroth order output beam at the frequency at which the relative position of the first and second sources are dithered in the first direction; and (l) in response to the error signal, varying this relative position to a point at which this error signal is substantially zero.
Claim 12
Dependent Claim
120 words
A method as in claim 5 wherein the first object is a wafer, the second object is a mask, the first diffraction grating has zero amplitude so that it functions as a mirror, the second grating is a phase grating, and the mask and wafer each lie in a plane perpendicular to the first direction, said method further comprising the step of: (m) focussing the light diffracted between the mask and wafer with optical elements utilized to focus light used to expose the wafer during photolithographic processing, whereby the alignment in the first direction functions to adjust the separation in the first direction between the mask and wafer to adjust the focus of the light used to expose the wafer.
Claim 13
Independent Claim
152 words
A method of aligning a first object with a second object, said method comprising the steps of: (n) diffracting light from a first diffraction grating on the first object to the second object; (o) diffracting light from the first diffraction grating off of a second diffraction grating on the second object to produce from the second grating an output beam containing a single diffraction order; (p) dithering in a first direction the relative position between the first and second objects, whereby a small oscillatory component is introduced into the intensity of the output beam enabling the slope of the intensity of the output beam as a function of motion in the first direction to be determined; and (q) in response to the oscillatory component in the intensity of the output beam, varying the relative position of the first and second objects in the first direction to produce an extremum in this intensity.
Claim 14
Independent Claim
152 words
A method of aligning a first object with a second object, said method comprising the steps of: (n) diffracting light from a first diffraction grating on the first object to the second object; (o) diffracting light from the first diffraction grating off of a second diffraction grating on the second object to produce from the second grating an output beam containing a single diffraction order; (p) dithering in a first direction the relative position between the first and second objects, whereby a small oscillatory component is introduced into the intensity of the output beam enabling the slope of the intensity of the output beam as a function of motion in the first direction to be determined; and (q) in response to the oscillatory component in the intensity of the output beam, varying the relative position of the first and second objects in the first direction to produce an extremum in this intensity.
Claim 15
Independent Claim
136 words
A method of aligning a first object with a second object, said method comprising the steps of: (r) diffracting light from a first diffraction grating on the first object to the second object; (s) diffracting light from the first diffraction grating off of a second diffraction grating on the second object to produce an output beam from the second grating, at least one of the first and second diffraction gratings being a holographic phase grating; (t) in response to the output beam, producing a position signal that is indicative of the relative position of the first object relative to the second object; and (u) varying, in a first direction, the relative position between the first object and the second object until the position signal indicates that said relative position is equal to a reference aligned position.
Claim 16
Independent Claim
136 words
A method of aligning a first object with a second object, said method comprising the steps of: (r) diffracting light from a first diffraction grating on the first object to the second object; (s) diffracting light from the first diffraction grating off of a second diffraction grating on the second object to produce an output beam from the second grating, at least one of the first and second diffraction gratings being a holographic phase grating; (t) in response to the output beam, producing a position signal that is indicative of the relative position of the first object relative to the second object; and (u) varying, in a first direction, the relative position between the first object and the second object until the position signal indicates that said relative position is equal to a reference aligned position.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-22 | 1990-06-23 | 1990-12-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-22 | 1994-06-23 | 1994-12-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-22 | 1998-06-23 | 1998-12-23 | $7700.00 | Window Closed / Lapsed |