US4340305A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plate aligning
Assignee: Massachusetts Institute of Technology
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Filing: 1979-12-26
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Granted: 1982-07-20
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Expires: 1999-12-26
Abstract
Abstract First and second plates are formed with like periodic patterns. A laser beam illuminates the second plate through the alignment marks of the first plate to provide a pair of diffracted beams that are detected with alignment being indicated when the beams are of the same intensity.
Inventors
- 👤 Henry I. Smith
- 👤 Stewart S. Austin
- 👤 Dale C. Flanders
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 00:31
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049; G11; G11B; G11B15/00; G11B15/60; G11B15/602; G11B17/00; G11B17/34; G11B21/00; G11B21/02; G11B21/10
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
184 words
Alignment apparatus comprising: first and second relatively movable plates each having diffraction grating means of the same period for diffracting incident wave energy; a source of substantially monochromatic wave energy; means for illuminating with said wave energy the diffraction grating means on said second plate through the diffraction grating means on said first plate to produce at least one pair of diffracted beams of wave energy; detecting means for detecting the relative intensities of said at least one pair of diffracted beams; means for carrying an information channel; means for scanning said information channel; one of said diffraction grating means being supported in fixed relationship to said means for scanning said information channel; the other of said diffraction grating means being maintained in fixed relationship with said means for carrying said information channel that is movable relative to said scanning means in a first scanning direction and in a second direction, orthogonal to said first direction; whereby said one and said other diffraction grating means may be brought into a predetermined relative position representative of said first and second plates being in predetermined alignment.
Claim 2
Dependent Claim
184 words
Alignment apparatus comprising: first and second relatively movable plates each having diffraction grating means of the same period for diffracting incident wave energy; a source of substantially monochromatic wave energy; means for illuminating with said wave energy the diffraction grating means on said second plate through the diffraction grating means on said first plate to produce at least one pair of diffracted beams of wave energy; detecting means for detecting the relative intensities of said at least one pair of diffracted beams; means for carrying an information channel; means for scanning said information channel; one of said diffraction grating means being supported in fixed relationship to said means for scanning said information channel; the other of said diffraction grating means being maintained in fixed relationship with said means for carrying said information channel that is movable relative to said scanning means in a first scanning direction and in a second direction, orthogonal to said first direction; whereby said one and said other diffraction grating means may be brought into a predetermined relative position representative of said first and second plates being in predetermined alignment.
Claim 3
Dependent Claim
16 words
Alignment apparatus in accordance with claim 1 wherein said means for carrying comprises a rotating disc.
Claim 4
Dependent Claim
15 words
Alignment apparatus in accordance with claim 1 wherein said means for carrying comprises a tape.
References Cited (Backward Citations)
US4200395A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-07-19 | 1986-01-18 | 1986-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-07-19 | 1990-01-18 | 1990-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-07-19 | 1994-01-18 | 1994-07-20 | $7700.00 | Window Closed / Lapsed |