Wafer transfer apparatus

Claim 2

Apparatus for transferring semiconductor wafers, comprising a wafer-pickup element with at least two openings each located closer to the edge of a wafer than to the wafer's center, and means for providing a below-atmospheric pressure or vacuum at said openings for the purpose of adhering a wafer to said wafer-pickup surface, whereby wafers may be picked up with greater certainty as to the locations of their edges with respect to said pickup element, said openings being surrounded by raised portions such that the region of said wafer-pickup element between said openings is at a lower elevation than said raised portions, whereby warped wafers may be picked up.

Claim 3

The apparatus of claim 1 wherein said raised portions are formed of Teflon.

Claim 4

The apparatus of claim 1 wherein there are four said openings, each elongated along a parallel direction transverse to the radial direction of said wafers, and each surrounded by a said raised portion.

Claim 5

The apparatus of claim 1 further comprising means for moving said wafer-pickup element along a predetermined path having a known relationship with corresponding desired paths for said edges, wherein said apparatus includes a boat having slots for receiving said edges of said wafers, and said desired paths for said edges are along the centers of a pair of slots, whereby knowing the precise locations of said edges with respect to said pickup element permits said edges to be inserted into said slots without contacting portions of said boat defining said slots and without scraping the wafer during insertion.

Claim 6

The apparatus of claim 1 further comprising means for moving said wafer-pickup element along a predetermined path having a known relationship with corresponding desired paths for said edges, and wherein said edges travel along said corresponding desired paths.

Claim 7

Apparatus for transferring semiconductor wafers, comprising a wafer-pickup element with at least two openings each located closer to the edge of a wafer than to the wafer's center, means for providing a below-atmospheric pressure or vacuum at said openings for the purpose of adhering a wafer to said wafer-pickup surface, whereby wafers may be picked up with greater certainty as to the locations of their edges with respect to said pickup element, individual pressure sensors for sensing pressure at said openings to sense when respective openings have been closed, means for transporting said wafer-pickup element relative to a wafer holder in a direction normal to the plane of a wafer held on said element, means for slowing wafer transport speed in response to an indication from one of said pressure sensors that one vacuum opening has been closed, indicating initial contact with the wafer surface, and means for halting wafer transport in response to an indication that a plurality of said openings have been closed.

Claim 8

Apparatus for transferring semiconductor wafers, comprising a wafer-pickup element with at least two openings each located closer to the edge of a wafer than to the wafer's center, means for providing a below-atmospheric pressure or vacuum at said openings for the purpose of adhering a wafer to said wafer-pickup surface, whereby wafers may be picked up with greater certainty as to the locations of their edges with respect to said pickup element, individual pressure sensors for sensing pressure at said openings to sense when respective openings have been closed, means for transporting said wafer-pickup element relative to a wafer holder in a direction normal to the plane of a wafer held on said element, means for slowing wafer transport speed in response to an indication from one of said pressure sensors that one vacuum opening has been closed, indicating initial contact with the wafer surface, and means for halting wafer transport in response to an indication that a plurality of said openings have been closed.