US4981778A
Expired / Lapsed
US
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Polysiloxane, resist for ion beam and electron beam lithography
Assignee: Raytheon Co
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Filing: 1986-07-11
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Granted: 1991-01-01
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Expires: 2006-07-11
Abstract
Abstract A method for providing a high temperature imaging resist layer for use in a multilayer resist system. A relatively thick planarizing resist layer is coated onto a suitable substrate to provide a planarizing resist layer having a planar surface. A relatively thin layer of a solvent soluble polysilsesquioxane polymer resist is applied to the planar surface to form an imaging resist which remains solvent soluble at temperatures up to 250 DEG C. The hydroxyl or alkoxy content of the polysilsesquioxane must be 0.05 weight percent or less in order to prevent cross linking of the polysilsesquioxane. The polysiloxane polymer resist is prepared by hydrolizing and polymerizing trichlorosilanes having the formula RSiCl3 where R is methyl, phenyl, vinyl, n-butyl, t-butyl, chlorophenyl, or chloromethyl-phenyl. The hydroxyl content of the polysilsesquioxane is reduced to 0.05 weight percent by capping the polymer with monoreactive silanes. The polysiloxane imaging resist is designed for use in high temperature electron beam and ion beam lithography.
Inventors
- 👤 Robert G. Brault
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:15
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; G03F7/075; G03F7/0757
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
129 words
A method for providing a high temperature imaging resist layer in a multilayer resist system comprising the steps of: providing a substrate having a relatively thick planarizing resist layer coated thereon, said planarizing resist layer having a planar surface upon which an imaging resist layer may be coated; and applying a relatively thin layer of a solvent soluble polysiloxane polymer resist on said planar surface to form said imaging resist layer, said polysiloxane polymer resist being a polymer made from the hydrolysis and polymerization of a trichlorosilane having the formula RSiCl 3 where R is methyl, phenyl, vinyl, n-butyl, t-butyl, chlorophenyl or chloromethylphenyl and wherein the hydroxyl content of said polysiloxane is reduced to approximately 0.05 weight percent or below by end capping said polysiloxane with a monoreactive silane.
Claim 2
Independent Claim
129 words
A method for providing a high temperature imaging resist layer in a multilayer resist system comprising the steps of: providing a substrate having a relatively thick planarizing resist layer coated thereon, said planarizing resist layer having a planar surface upon which an imaging resist layer may be coated; and applying a relatively thin layer of a solvent soluble polysiloxane polymer resist on said planar surface to form said imaging resist layer, said polysiloxane polymer resist being a polymer made from the hydrolysis and polymerization of a trichlorosilane having the formula RSiCl 3 where R is methyl, phenyl, vinyl, n-butyl, t-butyl, chlorophenyl or chloromethylphenyl and wherein the hydroxyl content of said polysiloxane is reduced to approximately 0.05 weight percent or below by end capping said polysiloxane with a monoreactive silane.
Claim 3
Dependent Claim
29 words
A method according to claim 1 wherein said monoreactive silane is selected from the group of monohalosilanes consisting of ethyldimethylchlorosilane, t-butyldimethylchlorosilane, n-butyldimethylchlorosilane, triethylchlorosilane, triethylbromosilane, trimethylchlorosilane, trimethylbromosilane, triisopropylchlorosilane and vinyldimethylchlorosilane.
Claim 4
Dependent Claim
37 words
A method according to claim 1 wherein the monoreactive silane is used to cap the OWENS-ILLINOIS GR 908 Glass Resin, methylphenylsilsesquioxane, in order to reduce the alkoxy content to approximately 0.05 weight percent or less, is trimethylchlorosilane.
Claim 5
Dependent Claim
16 words
A method according to claim 2 wherein said solvent soluble polysiloxane polymer resist is a phenylpolysiloxane.
Claim 6
Dependent Claim
29 words
A method according to claim 4 wherein said monoreactive silane used to cap the phenylpolysiloxane to reduce the hydroxyl content to approximately 0.05 weight percent or less is trimethylchlorosilane.
Claim 7
Dependent Claim
38 words
A method according to claim 1 wherein the monoreactive silane that is used to cap the OWENS-ILLINOIS GR 908 Glass Resin, methylphenylsilsesquioxane, in order to reduce the alkoxy content to approximately 0.05 weight percent or less, is vinyldimethylchlorosilane.
Claim 8
Independent Claim
157 words
A method for providing a patterned imaging resist layer in a multilayer resist system comprising the steps of: providing a substrate having a planarizing resist layer coated thereon, said planarizing resist layer having a planar surface upon which an imaging resist layer may be coated; applying a layer of a solvent soluble polysilsesquioxane polymer resist on said planar surface to form said imaging resist layer, said polysilsesquioxane having a hydroxyl or alkoxy content of approximately 0.05 weight percent or less, said polysilsesquioxane polymer resist remaining solvent soluble at temperatures up to 250° C.; exposing selected areas of said polysilsesquioxane imaging resist layer to a sufficiently intense ion beam or electron beam to cause polymerization of the exposed area to form solvent insoluble areas; treating said polysilsesquioxane imaging resist layer with sufficient solvent to remove the unexposed and solvent soluble ares of said imaging resist layer; and converting the remaining solvent insoluble areas to a silicon containing oxide.
Claim 9
Independent Claim
157 words
A method for providing a patterned imaging resist layer in a multilayer resist system comprising the steps of: providing a substrate having a planarizing resist layer coated thereon, said planarizing resist layer having a planar surface upon which an imaging resist layer may be coated; applying a layer of a solvent soluble polysilsesquioxane polymer resist on said planar surface to form said imaging resist layer, said polysilsesquioxane having a hydroxyl or alkoxy content of approximately 0.05 weight percent or less, said polysilsesquioxane polymer resist remaining solvent soluble at temperatures up to 250° C.; exposing selected areas of said polysilsesquioxane imaging resist layer to a sufficiently intense ion beam or electron beam to cause polymerization of the exposed area to form solvent insoluble areas; treating said polysilsesquioxane imaging resist layer with sufficient solvent to remove the unexposed and solvent soluble ares of said imaging resist layer; and converting the remaining solvent insoluble areas to a silicon containing oxide.
Claim 10
Dependent Claim
78 words
A multilayer resist system adapted for use at temperatures up to 250° C. comprising: a substrate having a planarizing resist layer coated thereon, said planarizing resist layer having a planar surface; a layer of a solvent soluble polysilsesquioxane polymer resist coated on said planar surface to form an imaging resist layer, said polysilsesquioxane having a hydroxyl or alkoxy content of approximately 0.05 weight percent or less and said polysilsesquioxane remaining solvent soluble at temperatures up to 250° C.
Claim 11
Dependent Claim
78 words
A multilayer resist system adapted for use at temperatures up to 250° C. comprising: a substrate having a planarizing resist layer coated thereon, said planarizing resist layer having a planar surface; a layer of a solvent soluble polysilsesquioxane polymer resist coated on said planar surface to form an imaging resist layer, said polysilsesquioxane having a hydroxyl or alkoxy content of approximately 0.05 weight percent or less and said polysilsesquioxane remaining solvent soluble at temperatures up to 250° C.
Claim 12
Dependent Claim
111 words
A multilayer resist system adapted for use at temperatures of up to 250° C. comprising: a substrate having a relatively thick planarizing resist layer coated thereon, said planarizing resist layer having a planar surface; a relatively thin layer of a solvent soluble polysiloxane polymer resist coated on said planar surface to form an imaging resist layer said polysiloxane is a polymer made from the hydrolysis and polymerization of a trichlorosilane having the formula RSiCl 3 where R is methyl, phenyl, vinyl, n-butyl, t-butyl, chlorophenyl or chloromethylphenyl and wherein the hydroxyl content of said polysiloxane is reduced to 0.05 weight percent or below by end capping said polysiloxane with a monoreactive silane.
Claim 13
Dependent Claim
111 words
A multilayer resist system adapted for use at temperatures of up to 250° C. comprising: a substrate having a relatively thick planarizing resist layer coated thereon, said planarizing resist layer having a planar surface; a relatively thin layer of a solvent soluble polysiloxane polymer resist coated on said planar surface to form an imaging resist layer said polysiloxane is a polymer made from the hydrolysis and polymerization of a trichlorosilane having the formula RSiCl 3 where R is methyl, phenyl, vinyl, n-butyl, t-butyl, chlorophenyl or chloromethylphenyl and wherein the hydroxyl content of said polysiloxane is reduced to 0.05 weight percent or below by end capping said polysiloxane with a monoreactive silane.
Claim 14
Dependent Claim
31 words
A multilayer resist system according to claim 9 wherein said monoreactive silanes are selected from the group of monohalosilanes consisting of: ethyldimethylchlorosilane, t-butyldimethylchlorosilane, n-butyldimethylchlorosilane, triethylchlorosilane, triethylbromosilane, trimethylchlorosilane, trimethylbromosilane, triisopropylchlorosilane and vinyldimethylchlorosilane.
Claim 15
Dependent Claim
18 words
A multilayer resist system according to claim 10 wherein said solvent soluble polysiloxane polymer resist is a phenylpolysiloxane.
Claim 16
Dependent Claim
31 words
A multilayer resist system according to claim 11 wherein said monoreactive silane used to cap the phenylpolysiloxane to reduce the hydroxyl content to approximately 0.05 weight percent or less is trimethylchlorosilane.
Claim 17
Dependent Claim
39 words
A multilayer resist system according to claim 8 wherein the monoreactive silane that is used to cap the GR 908 Glass Resin, methylphenylsilsesquioxane, in order to reduce the alkoxy content to approximately 0.05 weight percent or less, is vinyldimethylchlorosilane.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-31 | 1994-07-02 | 1995-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-31 | 1998-07-02 | 1999-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-31 | 2002-07-02 | 2003-01-01 | $7700.00 | Window Closed / Lapsed |