Patent US4970368A successfully refreshed from Google Patents.
US4970368A
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Laser scribing method
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1989-04-06
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Granted: 1990-11-13
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Expires: 2009-04-06
Abstract
Abstract In a method of making an electronic device having at least a transparent conductive layer, which includes at least a step of forming a transparent conductive layer member and a step of forming a transparent conductive layer by patterning the transparent conductive layer member using a spot-shaped or linear laser beam or beams, each of which has a short wavelength of 400 nm or less and optical energy greater than the optical energy band gap of the transparent conductive layer.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Kenji Itoh
- 👤 Susumu Nagayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 15:09
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/10; H10F77/16; H10F77/169; H10F77/1692; H10F19/00; H10F19/30; H10F19/31; H10F19/33; H10F77/20; H10F77/244; H10P; H10P50/00; H05; H05K; H05K3/00; H05K3/02; H05K3/027; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
74 words
A laser scribing method for producing a plurality of grooves on a laminate member disposed on a substrate or on a layer member comprising: expanding square- or rectangular-sectioned laser light; redirecting the expanded laser light by reflection upon a mirror; focusing the redirected laser light on said laminate member by a convex lens means in order to obtain concentrated laser light energy on said laminate member and sublime a part of said laminate member.
Claim 2
Dependent Claim
74 words
A laser scribing method for producing a plurality of grooves on a laminate member disposed on a substrate or on a layer member comprising: expanding square- or rectangular-sectioned laser light; redirecting the expanded laser light by reflection upon a mirror; focusing the redirected laser light on said laminate member by a convex lens means in order to obtain concentrated laser light energy on said laminate member and sublime a part of said laminate member.
Claim 3
Dependent Claim
104 words
A laser scribing method for producing a plurality of grooves on a laminate member disposed on a substrate or on a layer member comprising: expanding square- or rectangular-sectioned laser light; reflecting the expanding laser light on a mirror to redirect the expanded light; contracting the reflected laser light by a convex lens means; and disposing the laminate member substantially at the focal point of the convex lens means whereby the contracted laser light is focused on said laminate member to obtain concentrated laser light energy on said laminate member to thus sublime a part of said laminate member and form one of said grooves.
Claim 4
Dependent Claim
104 words
A laser scribing method for producing a plurality of grooves on a laminate member disposed on a substrate or on a layer member comprising: expanding square- or rectangular-sectioned laser light; reflecting the expanding laser light on a mirror to redirect the expanded light; contracting the reflected laser light by a convex lens means; and disposing the laminate member substantially at the focal point of the convex lens means whereby the contracted laser light is focused on said laminate member to obtain concentrated laser light energy on said laminate member to thus sublime a part of said laminate member and form one of said grooves.
Claim 5
Dependent Claim
108 words
A laser scribing method for producing a plurality of grooves on a laminate member disposed on a substrate or on a layer member comprising: expanding square- or rectangular-sectioned laser light; redirecting the expanded laser light by reflection upon a mirror; contracting the expanded laser light by a plurality of convex lenses; and disposing the laminate member substantially at the focal points of the plurality of convex lens means whereby the contracted laser light is focused on said laminate member so that said expanded laser light is separated into a plurality of laser rays with each laser ray respectively subliming said laminate member to produce said plurality of grooves.
Claim 6
Dependent Claim
108 words
A laser scribing method for producing a plurality of grooves on a laminate member disposed on a substrate or on a layer member comprising: expanding square- or rectangular-sectioned laser light; redirecting the expanded laser light by reflection upon a mirror; contracting the expanded laser light by a plurality of convex lenses; and disposing the laminate member substantially at the focal points of the plurality of convex lens means whereby the contracted laser light is focused on said laminate member so that said expanded laser light is separated into a plurality of laser rays with each laser ray respectively subliming said laminate member to produce said plurality of grooves.
Claim 7
Dependent Claim
19 words
A laser scribing method as defined in claim 1, wherein said convex lens means is a cylindrical convex lens.
Claim 8
Dependent Claim
19 words
A laser scribing method as defined in claim 2, wherein said convex lens means is a cylindrical convex lens.
Claim 9
Dependent Claim
20 words
A laser scribing method as defined in claim 3, wherein said plurality of convex lens means are cylindrical convex lenses.
Claim 10
Independent Claim
28 words
A method as in claims 1, 2, or 3 where said substrate has a surface of an insulator selected from the group consisting of organic and inorganic insulators.
Claim 11
Independent Claim
21 words
A method as in claims 1, 2, or 3 where the laminate member has a thickness of two μm or less.
Claim 12
Independent Claim
43 words
A method as in claims 1, 2, or 3 where the laminate member comprises transparent and non-transparent conductive layers and the transparent conductive layer of the laminate member consists principally of sublimable metallic compounds selected from the group consisting of oxides and nitrides.
Claim 13
Dependent Claim
53 words
A method as in claim 9 in which said sublimable metallic oxide is selected from the group consisting of SnO 2 , In 2 O 3 , and ITO (Indium-Tin Oxide), and in which said sublimable metallic nitride is selected from the group consisting of SbN, InN and Sn 3 N 4 .
Claim 14
Independent Claim
44 words
A method as in claims 1, 2, or 3 where the laminate member comprises transparent and non-transparent conductive layers and the non-transparent conductive layer of the laminate member consists principally of a metal selected from the group consisting of sublimable metals and non-sublimable metals.
Claim 15
Dependent Claim
41 words
The method as in claim 11 in which said sublimable metal is selected from the group consisting of Cr, Cr-Cu alloy, and Cr-N alloy and in which said non-sublimable metal is selected from the group consisting of Al, Cu and Ag.
Claim 16
Independent Claim
21 words
A method as in claims 1, 2, or 3 where the semiconductor layer member consists principally of a sublimable non-single-crystal semiconductor.
Claim 17
Dependent Claim
42 words
A method as in claim 13 in which said sublimable semiconductor is selected from the group consisting of Si, Si x Ge 1-x (where 0<x<0.5, Si x C 1-x (where 0<x<1), Si 3 N 4-x (where 0<x<2), and SiO 2-x (where 0<x<1).
Claim 18
Independent Claim
29 words
A method as in claims 1, 2, or 3 where said laser light comprises one of an excimer laser light, an argon laser light, or a nitrogen laser light.
Claim 19
Independent Claim
26 words
A method as in claims 1, 2, or 3 where the laser light is 3 to 60 μm wide in cross section on the laminate member.
Claim 20
Independent Claim
19 words
A method as in claims 1, 2, or 3 where said laminate member comprises transparent and non-transparent conductive layers.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-11-12 | 1994-05-14 | 1994-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-12 | 1998-05-14 | 1998-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-11-12 | 2002-05-14 | 2002-11-13 | $7700.00 | Window Closed / Lapsed |