Patent US4966676A successfully refreshed from Google Patents.
US4966676A
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Sputtering target
Assignee: Toshiba Corp
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Filing: 1989-05-01
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Granted: 1990-10-30
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Expires: 2009-05-01
Abstract
Abstract A sputtering target divided into respective target elements of two or more types arranged as a composite on a substrate, is disclosed. A thin sheet whose constituent material comprises one or more of the constituent materials of the target elements, and whose constituent material includes at least one metal material, is interposed between said substrate and target elements.
Inventors
- 👤 Yoshiharu Fukasawa
- 👤 Satoshi Yamaguchi
- 👤 Hideo Ishihara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 02:43
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
55 words
A sputtering target divided into respective target elements of two or more types arranged as a composite on a substrate, and a thin sheet consisting essentially of one or more of the materials of the target element interposed between said substrate and said target elements, wherein the thin sheet comprises at least one metal material.
Claim 2
Dependent Claim
55 words
A sputtering target divided into respective target elements of two or more types arranged as a composite on a substrate, and a thin sheet consisting essentially of one or more of the materials of the target element interposed between said substrate and said target elements, wherein the thin sheet comprises at least one metal material.
Claim 3
Dependent Claim
33 words
A sputtering target according to claim 1, wherein the material of said target elements is selected from the group consisting of Mo, W, Ta, Nb, Ti, Ni, V, Cr, Al, and combinations thereof.
Claim 4
Dependent Claim
32 words
A sputtering target according to claim 1, wherein said target elements constitute a composite target consisting of Mo and Ta, and the material of said sheet is selected from Mo and Ta.
Claim 5
Dependent Claim
20 words
A sputtering target according to claim 1, wherein the thickness of said thin sheet is about 0.05 to 0.6 mm.
Claim 6
Dependent Claim
20 words
A sputtering target according to claim 1, wherein the thickness of said thin sheet is about 0.1 to 0.55 mm.
Claim 7
Dependent Claim
17 words
A sputtering target according to claim 1, wherein the thin sheet comprises a metal of high purity.
Claim 8
Dependent Claim
21 words
A sputtering target according to claim 1, wherein the thin sheet comprises a metal having a purity greater than about 99.99%.
Claim 9
Dependent Claim
49 words
A sputtering target comprising: a substrate; a plurality of target elements arranged on the substrate, and; a thin sheet interposed between the substrate and the target elements and comprising at least one of the materials of the target elements, wherein the thin sheet comprises at least one metal material.
Claim 10
Dependent Claim
49 words
A sputtering target comprising: a substrate; a plurality of target elements arranged on the substrate, and; a thin sheet interposed between the substrate and the target elements and comprising at least one of the materials of the target elements, wherein the thin sheet comprises at least one metal material.
Claim 11
Dependent Claim
19 words
A sputtering target as claimed in claim 8, wherein the thin sheet comprises a high-meltingpoint metal of high purity.
Claim 12
Dependent Claim
34 words
A sputtering target as claimed in claim 8, wherein the material of the thin sheet is selected from the group consisting of Mo, W, Ta, Nb, Ti, Ni, V, Cr, Al and combinations thereof.
Claim 13
Dependent Claim
29 words
A sputtering target as claimed in claim 8, wherein the target elements comprise Mo and Ta and the material of the thin sheet is selected from Mo and Ta.
Claim 14
Dependent Claim
21 words
A sputtering target as claimed in claim 8, wherein the thickness of the thin sheet is about 0.05 to 0.6 mm.
Claim 15
Dependent Claim
21 words
A sputtering target as claimed in claim 8, wherein the thickness of the thin sheet is about 0.1 to 0.5 mm.
Claim 16
Dependent Claim
21 words
A sputtering target according to claim 8 wherein the thin sheet comprises a metal having a purity greater than about 99.99%.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-10-29 | 1994-04-30 | 1994-10-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-10-29 | 1998-04-30 | 1998-10-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-10-29 | 2002-04-30 | 2002-10-30 | $7700.00 | Window Closed / Lapsed |