US4430190A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for cathode sputtering of at least two different materials
Assignee: Siemens AG
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Filing: 1982-12-09
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Granted: 1984-02-07
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Expires: 2002-12-09
Abstract
Abstract Device for cathode sputtering of at least two different materials, including a holder, a device for cooling the holder, a heat-conducting layer disposed on the holder, a target being connected to the holder with the heat-conducting layer disposed therebetween, the target being formed of one of the materials to be sputtered and the target having a plurality of blind holes formed therein, and pins formed of another material to be admixed in the sputtering being fitted in at least one of the blind holes.
Inventors
- 👤 Carl-Ernst Eilers
- 👤 Horst Pachonik
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 21:49
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
88 words
Device for cathode sputtering of at least two different materials comprising a holder, means for cooling said holder, a heat-conducting layer disposed on said holder, a target connected to said holder with said heat-conducting layer disposed therebetween, said target being exchangeably screwed to said holder said target being formed of one of the materials to be sputtered and having a plurality of blind holes formed therein, and pins formed of another material to be admixed in the sputtering being fitted in at least some of said blind holes.
Claim 2
Dependent Claim
88 words
Device for cathode sputtering of at least two different materials comprising a holder, means for cooling said holder, a heat-conducting layer disposed on said holder, a target connected to said holder with said heat-conducting layer disposed therebetween, said target being exchangeably screwed to said holder said target being formed of one of the materials to be sputtered and having a plurality of blind holes formed therein, and pins formed of another material to be admixed in the sputtering being fitted in at least some of said blind holes.
Claim 3
Dependent Claim
19 words
Device according to claim 1, wherein said heat-conducting layer between said target and said holder is a heat-conducting paste.
Claim 4
Dependent Claim
19 words
Device according to claim 1, wherein said heat-conducting layer between said target and said holder is a metal powder.
Claim 5
Dependent Claim
19 words
Device according to claim 1, wherein said heat-conducting layer between said target and said holder is a metal foil.
References Cited (Backward Citations)
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US4275126A
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Cited
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Cited
US4350578A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-06 | 1987-08-08 | 1988-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-06 | 1991-08-08 | 1992-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-06 | 1995-08-08 | 1996-02-07 | $7700.00 | Window Closed / Lapsed |