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Radiation-polymerizable mixture

Assignee: Hoechst AG
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Filing: 1986-01-22
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Granted: 1990-09-11
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Expires: 2006-01-22
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Abstract

Abstract A radiation-polymerizable mixture, recording material and process for using the recording material in relief recordings. The radiation-polymerizable mixture contains: (a) a polymeric binder, (b) a compound of the formula: <IMAGE> 'in which A is O, NH or N-alkyl, Q is -CO-CpH2p-Z- or -CkH2kO-, Z is O or NH, R1 is H or alkyl, R2 is alkyl, alkenyl, cycloalkyl, aryl, aralkyl or SO2R3, R3 is alkyl, alkenyl, cycloalkyl, aryl, aralkyl or aryloxy, k is a number from 3 to 20, l is a number from 0 to 20, m is a number from 2 to 20, n is a number from 1 to 20 and p is a number from 2 to 10, and (c) a compound or a combination of compounds, which is capable of initiating the polymerization of the compound (b) under the action of actinic radiation. The mixture is especially suitable for the preparation of dry photoresist materials and is distinguished by good flexibility and adhesion to copper and by easy strippability in the light-cured state.

Inventors

  • 👤 Ulrich Geissler
  • 👤 Hartmut Steppan
  • 👤 Walter Herwig

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 10:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/111

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 322 words
A radiation-polymerizable mixture, consisting essentially of: (a) an amount of a polymeric binder selected from the group consisting of (i) a polymeric binder that is water-insoluble and soluble or at least swellable in aqueous-alkaline solutions, (ii) a polyacrylate and (iii) a polymethacrylate, said amount ranging from 25% to 75% by weight, based on the total weight of non-volatile constituents; (b) from 25% to 75% by weight, based on the total weight of non-volatile constituents, of polymerizable material, comprising (1) up to 95% by weight, based on the weight of polymerizable material, of a compound that is polymerizable by free radicals, that has a boiling point above 100° C. at atmospheric pressure, and that contains at least two ethylenically unsaturated polymerizable groups and (2) from 5% to 100% by weight, based on the weight of polymerizable material, of an acrylic or alkacrylic acid derivative that is polymerizable by free radicals and that has a boiling point above about 100° C. at atmospheric pressure, wherein the weight-percentages in (a) and (b) are based, respectively, on the total weight of non-volatile constituents; and (c) from 0.01 to 10% by weight, based on the total weight of non-volatile constituents, of at least one initiator compound capable of initiating the polymerization of said acid derivative under the action of actinic radiation, wherein said acid derivative is represented by the formula: ##STR5## wherein A is O, NH, or N-alkyl, Q is --CO--C p H 2p --Z-- or --C k H 2k O--, Z is O or NH, R 1 is H or alkyl, R 2 is alkyl, alkenyl, cycloalkyl, aryl, aralkyl or SOT 2 R 3 , R 3 is alkyl, alkenyl, cycloalkyl, aryl aralkyl or aryloxy, k is a number from 3 to 20, l is a number from 0 to 20, m is a number from 2 to 20 n is a number from 1 to 20, and p is a number from 2 to 10.
Claim 2
Dependent Claim 322 words
A radiation-polymerizable mixture, consisting essentially of: (a) an amount of a polymeric binder selected from the group consisting of (i) a polymeric binder that is water-insoluble and soluble or at least swellable in aqueous-alkaline solutions, (ii) a polyacrylate and (iii) a polymethacrylate, said amount ranging from 25% to 75% by weight, based on the total weight of non-volatile constituents; (b) from 25% to 75% by weight, based on the total weight of non-volatile constituents, of polymerizable material, comprising (1) up to 95% by weight, based on the weight of polymerizable material, of a compound that is polymerizable by free radicals, that has a boiling point above 100° C. at atmospheric pressure, and that contains at least two ethylenically unsaturated polymerizable groups and (2) from 5% to 100% by weight, based on the weight of polymerizable material, of an acrylic or alkacrylic acid derivative that is polymerizable by free radicals and that has a boiling point above about 100° C. at atmospheric pressure, wherein the weight-percentages in (a) and (b) are based, respectively, on the total weight of non-volatile constituents; and (c) from 0.01 to 10% by weight, based on the total weight of non-volatile constituents, of at least one initiator compound capable of initiating the polymerization of said acid derivative under the action of actinic radiation, wherein said acid derivative is represented by the formula: ##STR5## wherein A is O, NH, or N-alkyl, Q is --CO--C p H 2p --Z-- or --C k H 2k O--, Z is O or NH, R 1 is H or alkyl, R 2 is alkyl, alkenyl, cycloalkyl, aryl, aralkyl or SOT 2 R 3 , R 3 is alkyl, alkenyl, cycloalkyl, aryl aralkyl or aryloxy, k is a number from 3 to 20, l is a number from 0 to 20, m is a number from 2 to 20 n is a number from 1 to 20, and p is a number from 2 to 10.
Claim 3
Dependent Claim 42 words
A radiation-polymerizable mixture as claimed in claim 1, wherein said polymerizable compound having at least two polymerizable groups is selected from the group consisting of esters of a polyhydric alcohol and acrylic acid, and esters of a polyhydric alcohol and methacrylic acid.
Claim 4
Dependent Claim 37 words
A radiation-polymerizable mixture as claimed in claim 1, wherein said mixture contains from about 25 to about 75% by weight of the sum of said acid derivative and said polymerizable compound having at least two polymerizable groups.
Claim 5
Dependent Claim 70 words
A radiation-polymerizable mixture as claimed in claim 1, wherein said mixture contains from about 40 to about 60% by weight polymeric binder, from about 40 to about 60% by weight of the sum of said acid derivative and said polymerizable compound having at least two polymerizable groups, and from about 0.05 to about 4% by weight of said at least one initiator, relative to the total quantity of non-volatile constituents.
Claim 6
Dependent Claim 14 words
Aradiation-polymerizable mixture as claimed in claim 1, wherein A and Z are oxygen atoms.
Claim 7
Dependent Claim 16 words
A radiation-polymerizable mixture as claimed in claim 1, wherein 1=0 to 10 and p=3 to 6.
Claim 8
Dependent Claim 19 words
A radiation-polymerizable mixture as claimed in claim 1, wherein k=3 to 6, m=2 to 4 and n=1 to 10.
Claim 9
Dependent Claim 17 words
A radiation-polymerizable mixture as claimed in claim 1, wherein R 2 has at least 4 carbon atoms.
Claim 10
Dependent Claim 32 words
A radiation-polymerizable mixture as claimed in claim 1, wherein R 2 has from 4 to 12 carbon atoms and is selected from the group consisting of straight chain alkyl and alkenyl radicals.
Claim 11
Dependent Claim 50 words
A radiation-polymerizable mixture as claimed in claim 1, wherein R 3 is selected from the group consisting of an alkyl radical having from 2 to 8 carbon atoms, a mononuclear aryl radical having from 6 to 10 carbon atoms and an aryloxy radical having from 6 to 10 carbon atoms.
Claim 12
Dependent Claim 16 words
A radiation-polymerizable mixture as claimed in claim 1, wherein said mixture is a dry photoresist material.
Claim 13
Dependent Claim 24 words
A radiation-polymerizable mixture as claimed in claim 1, wherein said polymeric binder is water-insoluble but soluble or at least swellable in a aqueous-alkaline solution.
Claim 14
Dependent Claim 39 words
A radiation-polymerizable mixture as claimed in claim 12, wherein said polymeric binder is selected from the group consisting of a maleate resin, a styrene/maleic anhydride copolymer, a homopolymer or copolymer of β-(methacryloyloxy)-ethyl N-(p-tolyl-sulfonyl)-carbamate, and an alkyl methacrylate/methacrylic acid copolymer.
Claim 15
Dependent Claim 34 words
A radiation-polymerizable mixture as claimed in claim 1, wherein said polymeric binder is a copolymer of methacrylic acid and an alkyl methacrylate, said copolymer having an alkyl group of 4 to 15 carbon atoms.
Claim 16
Dependent Claim 21 words
A radiation-polymerizable mixture as claimed in claim 14, wherein said polymeric binder has a molecular weight between about 20,000 and 200,000.
Claim 17
Dependent Claim 64 words
A radiation-polymerizable mixture as claimed in claim 1, wherein said polymeric binder is a copolymer of (A) an unsaturated carboxylic acid, (b) an alkyl methacrylate with at least 4 carbon atoms in the alkyl group, and (C) an additional monomer which is capable of copolymerization with monomers (A) and (B) and whose corresponding homopolymer has a glass transition temperature of at leat 80° C.
Claim 18
Dependent Claim 124 words
A radiation-polymerizable mixture as claimed in claim 1, wherein said polymeric binder is a copolymer comprising (A) 20 to 60 mole-% of acrylic acid or methacrylic acid; (b) 25 to 80 mole-% of an alkyl methacrylate having at least 4 carbon atoms in the alkyl group, a homopolymer of said methacrylate (b) having a glass transition temperature of not more than 20° C.; and (C) up to 30 mole-% of a monomeric ethylenically unsaturated compound which is copolymerizable with said acid (A) and said methacrylate (B), a homopolymer of said compound (C) having a glass transition temperature of at least 80° C., wherein said copolymer has a mean molecular weight in the range from about 65,000 to 150,000 and is prepared by mass polymerization.
Claim 19
Dependent Claim 22 words
A radiation-polymerizable mixture as claimed in claim 17, wherein compound (c) is present in an amount ranging between 3 and 20 mole-%.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-09-10 1994-03-12 1994-09-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-09-10 1998-03-12 1998-09-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-09-10 2002-03-12 2002-09-11 $7700.00 Window Closed / Lapsed

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