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US4952994A Expired / Lapsed US ⏱️ 0.0 years remaining

Input protection arrangement for VLSI integrated circuit devices

Assignee: Hewlett Packard Development Co LP
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Filing: 1989-11-16
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Granted: 1990-08-28
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Expires: 2009-11-16
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Abstract

Abstract An input protection arrangement for diverting current from high voltages due to, for example electrostatic discharges into a bonding pad of an integrated circuit chip. The chip has a bonding pad connected to a conducting path and to a source or drain region of an insulated gate field effect transistor, the other region being connected to a power bus on the chip. The conducting path runs between the source and drain regions and operates as the gate terminal of the transistor. The conducting path is insulated from the surface of the chip by a field oxide insulating layer of a substantially uniform thickness to prevent rupture of the oxide between the gate and the source and drain regions in the event of high-voltages. The source and drain regions include regions of conventional doping levels having depths corresponding to the depths of the other corresponding regions on the chip, surrounded by large wells of lower doping levels. The input pad is separated from the chip substrate by an insulating oxide layer and by a doped well of the same conductivity type as the source and drain regions of the transistor to reduce the input capacitance and prevent punch through from the pad to the substrate.

Inventors

  • 👤 Chong M. Lin

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 10:00
CPC Classifications
H; H10; H10W; H10W72/00; H10D; H10D89/00; H10D89/60; H10D89/601; H10D89/811; H10W72/90

Claims Analysis

Total Claims: 15
Claim 1
Independent Claim 196 words
An input protection arrangement for an integrated circuit device on a semiconductor substrate of a first conductivity type having a bonding pad for forming an external electrical connection, said bonding pad being connected to a conducting path on said substrate for electrically connecting said pad to internal circuitry on said integrated circuit, said integrated circuit further including a reference voltage path, said input protection arrangement comprising two regions of a second conductivity type on opposing sides of at least a portion of said conducting path, said region and the area therebetween being covered with a layer of insulating material, each of said regions including an inner portion of enhanced doping level separated from said substrate by a well portion having a reduced doping level, means defining apertures in said insulating material for connecting one of said regions to said pad and means for connecting the other region to said reference voltage path, whereby said regions define source and drain regions and the conducting path defines the gate terminal of an insulated gate field effect transistor which conducts input current associated with voltages in excess of a selected level between said pad and said reference voltage path.
Claim 2
Dependent Claim 196 words
An input protection arrangement for an integrated circuit device on a semiconductor substrate of a first conductivity type having a bonding pad for forming an external electrical connection, said bonding pad being connected to a conducting path on said substrate for electrically connecting said pad to internal circuitry on said integrated circuit, said integrated circuit further including a reference voltage path, said input protection arrangement comprising two regions of a second conductivity type on opposing sides of at least a portion of said conducting path, said region and the area therebetween being covered with a layer of insulating material, each of said regions including an inner portion of enhanced doping level separated from said substrate by a well portion having a reduced doping level, means defining apertures in said insulating material for connecting one of said regions to said pad and means for connecting the other region to said reference voltage path, whereby said regions define source and drain regions and the conducting path defines the gate terminal of an insulated gate field effect transistor which conducts input current associated with voltages in excess of a selected level between said pad and said reference voltage path.
Claim 3
Dependent Claim 36 words
An input protection arrangement as defined in claim 1 wherein said conducting path is formed on field oxide, the thickness of which is substantially uniform in the area of said regions of said second conductivity type.
Claim 4
Dependent Claim 15 words
An input protection arrangement as defined in claim 1 wherein said conducting path is polysilicon.
Claim 5
Dependent Claim 15 words
An input protection arrangement as defined in claim 1 wherein said conducting path is metal.
Claim 6
Dependent Claim 40 words
An input protection arrangement as defined in claim 1 wherein said bonding pad is supported by an insulating layer, said insulating layer in turn being supported on a third region comprising a relatively deep well of said second conductivity type.
Claim 7
Dependent Claim 64 words
An input protection arrangement as defined in claim 1 wherein said bonding pad comprises a metal layer situated adjacent to the region connected thereto, said metal extending to said adjacent region and connecting thereto to provide an electrical path between said adjacent region and said conducting path to thereby interconnect said adjacent region and said gate terminal of said insulated gate field effect transistor.
Claim 8
Dependent Claim 27 words
An input protection arrangement as defined in claim 1 wherein said conducting path covers at least a portion of the well regions without covering the inner portions.
Claim 9
Dependent Claim 208 words
An input protection arrangement for an integrated circuit device on a semiconductor substrate of a first conductivity type having a bonding pad for forming an external electrical connection, said bonding pad being connected to a conducting path on said substrate for electrically connecting said pad to internal circuitry on said integrated circuit, said integrated circuit further including a reference voltage path, said input protection arrangement comprising two regions of a second conductivity type on opposing sides of at least a portion of said conducting path, said regions and the area therebetween being covered with a layer of insulating material having a substantially uniform thickness corresponding to the thickness of field oxide, each of said regions including an inner portion of enhanced doping levels separated from said substrate by a well portion having a reduced doping level, means defining apertures in said insulating material for connecting one of said regions to said pad in means for connecting the other region to said reference voltage path, whereby said regions define source and drain regions and the conducting path defines the gate terminal of an insulated gate field effect transistor which conducts input current associated with voltages in excess of a selected level between said path and said reference voltage path.
Claim 10
Dependent Claim 208 words
An input protection arrangement for an integrated circuit device on a semiconductor substrate of a first conductivity type having a bonding pad for forming an external electrical connection, said bonding pad being connected to a conducting path on said substrate for electrically connecting said pad to internal circuitry on said integrated circuit, said integrated circuit further including a reference voltage path, said input protection arrangement comprising two regions of a second conductivity type on opposing sides of at least a portion of said conducting path, said regions and the area therebetween being covered with a layer of insulating material having a substantially uniform thickness corresponding to the thickness of field oxide, each of said regions including an inner portion of enhanced doping levels separated from said substrate by a well portion having a reduced doping level, means defining apertures in said insulating material for connecting one of said regions to said pad in means for connecting the other region to said reference voltage path, whereby said regions define source and drain regions and the conducting path defines the gate terminal of an insulated gate field effect transistor which conducts input current associated with voltages in excess of a selected level between said path and said reference voltage path.
Claim 11
Dependent Claim 15 words
An input protection arrangement as defined in claim 8 wherein said conducting path is polysilicon.
Claim 12
Dependent Claim 15 words
An input protection arrangement as defined in claim 8 wherein said conducting path is metal.
Claim 13
Dependent Claim 40 words
An input protection arrangement as defined in claim 8 wherein said bonding pad is supported by an insulating layer, said insulating layer in turn being supported on a third region comprising a relatively deep well of said second conductivity type.
Claim 14
Dependent Claim 64 words
An input protection arrangement as defined in claim 8 wherein said bonding pad comprises a metal layer situated adjacent to the region connected thereto, said metal extending to said adjacent region and connecting thereto to provide an electrical path between said adjacent region and said conducting path to thereby interconnect said adjacent region and said gate terminal of said insulated gate field effect transistor.
Claim 15
Dependent Claim 27 words
An input protection arrangement as defined in claim 8 wherein said conducting path covers at least a portion of the well regions without covering the inner portions.

References Cited (Backward Citations)

US3400310A Cited
US3395290A Cited
JPS54136278A Cited
JPS54137286A Cited
JPS5586159A Cited
JPS5667962A Cited
US4400711A Cited
GB2113468A Cited
US4730208A Cited
EP0106417A2 Cited
JPS6058652A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-08-27 1994-02-26 1994-08-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-08-27 1998-02-26 1998-08-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-08-27 2002-02-26 2002-08-28 $7700.00 Window Closed / Lapsed

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