Patent US4952386A successfully refreshed from Google Patents.
US4952386A
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Method and apparatus for purifying hydrogen fluoride
Assignee: Speedfam IPEC Corp
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Filing: 1988-05-20
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Granted: 1990-08-28
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Expires: 2008-05-20
Abstract
Abstract A method for purifying hydrofluoric acid, comprising the steps of filtering the hydrofluoric acid to remove particulates, passing the filtered acid through a cation exchange material and an anion exchange material to remove ions therefrom, at least periodically automatically monitoring the acid that has passed through at least a predetermined portion of the cation exchange material for a predetermined level of cationic impurity representative of actual or impending ionic breakthrough in the cation exchange material, at least periodically automatically monitoring the acid that has passed through at least a predetermined portion of the anion exchange material for a predetermined level of anionic impurity representative of ionic breakthrough in the anion exchange material, automatically interrupting flow of acid through the anionic or cationic exchange material at or prior to the time the breakthrough in such material occurs, while the flow is interrupted, regenerating the anionic or cationic exchange material, resuming the flow after the exchange material is regenerated, passing the acid from the cationic and anionic exchange materials through an ultrafilter and into a storage container, and monitoring the level of particulate impurities in acid that has passed through the anion and cation exchange materials and automatically passing the acid in the storage container through a filter when the level of particulates exceeds a predetermined level, until the particulates are below the predetermined level. Also disclosed is an apparatus for performing the foregoing process.
Inventors
- 👤 John B. Davison
- 👤 Chung-Tseng Hsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:41
CPC Classifications
C; C01; C01B; C01B7/00; C01B7/19; C01B7/191; C01B7/195; C01B7/197; C01B7/198; C01G; C01G49/00; C01G49/02; C01G49/08; Y; Y10; Y10S; Y10S210/00; Y10S210/902; Y10S210/915; Y10S423/00; Y10S423/09; Y10S423/14
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
181 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and anionic and cationic impurities; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurities by contacting said impure hydrofluoric acid with anion and cation ion exchange material having an affinity for said ionic impurities to provide a purified effluent, wherein said anion and cation ion exchange material is in separate beds and flow through the beds is sequential; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of an ionic impurity; automatically stopping the contacting step when said monitoring step indicates an elevated level of said ionic impurity representative of exhaustion of at least a portion of said ion exchange materials; and automatically regenerating said cation exchange material with an ultrapure strong acid having metallic impurities no greater than 50 parts per billion per metal and automatically regenerating said anion exchange material with an ultrapure strong base having metallic impurities no greater than 50 parts per billion per metal.
Claim 2
Independent Claim
181 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and anionic and cationic impurities; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurities by contacting said impure hydrofluoric acid with anion and cation ion exchange material having an affinity for said ionic impurities to provide a purified effluent, wherein said anion and cation ion exchange material is in separate beds and flow through the beds is sequential; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of an ionic impurity; automatically stopping the contacting step when said monitoring step indicates an elevated level of said ionic impurity representative of exhaustion of at least a portion of said ion exchange materials; and automatically regenerating said cation exchange material with an ultrapure strong acid having metallic impurities no greater than 50 parts per billion per metal and automatically regenerating said anion exchange material with an ultrapure strong base having metallic impurities no greater than 50 parts per billion per metal.
Claim 3
Dependent Claim
24 words
The method of claim 1, wherein said ionic impurities include one or more of fluosilicate, phosphorous, boron, calcium, arsenic, iron, platinum and sodium ion.
Claim 4
Independent Claim
176 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and anionic and cationic impurities; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurities by contacting said impure hydrofluoric acid with anion and cation ion exchange material having an affinity for said ionic impurities to provide a purified effluent; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of an ionic impurity; automatically stopping the contacting step when said monitoring step indicates an elevated level of said ionic impurity representative of exhaustion of at least a portion of said ion exchange materials; and automatically regenerating said cation exchange material with an ultrapure strong acid having metallic impurities no greater than 50 parts per billion per metal and automatically regenerating said anion exchange material with an ultrapure strong base having metallic impurities no greater than 50 parts per billion per metal, wherein said monitoring step comprises analyzing said hydrofluoric acid with an atomic absorption analyzer.
Claim 5
Independent Claim
176 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and anionic and cationic impurities; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurities by contacting said impure hydrofluoric acid with anion and cation ion exchange material having an affinity for said ionic impurities to provide a purified effluent; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of an ionic impurity; automatically stopping the contacting step when said monitoring step indicates an elevated level of said ionic impurity representative of exhaustion of at least a portion of said ion exchange materials; and automatically regenerating said cation exchange material with an ultrapure strong acid having metallic impurities no greater than 50 parts per billion per metal and automatically regenerating said anion exchange material with an ultrapure strong base having metallic impurities no greater than 50 parts per billion per metal, wherein said monitoring step comprises analyzing said hydrofluoric acid with an atomic absorption analyzer.
Claim 6
Independent Claim
176 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and anionic and cationic impurities; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurities by contacting said impure hydrofluoric acid with anion and cation ion exchange material having an affinity for said ionic impurities to provide a purified effluent; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of an ionic impurity; automatically stopping the contacting step when said monitoring step indicates an elevated level of said ionic impurity representative of exhaustion of at least a portion of said ion exchange materials; and automatically regenerating said cation exchange material with an ultrapure strong acid having metallic impurities no greater than 50 parts per billion per metal and automatically regenerating said anion exchange material with an ultrapure strong base having metallic impurities no greater than 50 parts per billion per metal, further comprising the step, after said regenerating step, of again performing said contacting step.
Claim 7
Independent Claim
176 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and anionic and cationic impurities; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurities by contacting said impure hydrofluoric acid with anion and cation ion exchange material having an affinity for said ionic impurities to provide a purified effluent; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of an ionic impurity; automatically stopping the contacting step when said monitoring step indicates an elevated level of said ionic impurity representative of exhaustion of at least a portion of said ion exchange materials; and automatically regenerating said cation exchange material with an ultrapure strong acid having metallic impurities no greater than 50 parts per billion per metal and automatically regenerating said anion exchange material with an ultrapure strong base having metallic impurities no greater than 50 parts per billion per metal, further comprising the step, after said regenerating step, of again performing said contacting step.
Claim 8
Dependent Claim
31 words
The method of claim 4, wherein said regenerating step comprises contacting said cation exchange material with ultrapure sulfuric acid having metallic impurities no greater than 50 parts per billion per metal.
Claim 9
Dependent Claim
19 words
The method of claim 5, wherein said metallic impurities are no greater than 30 parts per billion per metal.
Claim 10
Dependent Claim
41 words
The method of claim 4, wherein said ion exchange material includes anion exchange material and wherein said regenerating step comprises contacting said anion exchange material with ultrapure ammonium hydroxide, having metallic impurities no greater than 50 parts per billion per metal.
Claim 11
Dependent Claim
19 words
The method of claim 7, wherein said metallic impurities are no greater than 30 parts per billion per metal.
Claim 12
Dependent Claim
14 words
The method of claim 4, wherein said monitoring step comprises analyzing for fluosilicate ion.
Claim 13
Dependent Claim
17 words
The method of claim 9, wherein said fluosilicate ion is detected by means of a conductivity sensor.
Claim 14
Dependent Claim
60 words
The method of claim 10, wherein said contacting step comprises passing said acid through an anion exchange material, wherein the conductivity of said acid is measured before and after passing through at least a portion of said anion exchange material, and wherein said contacting step is automatically stopped in response to a decrease in the difference between the measured conductivities.
Claim 15
Dependent Claim
15 words
The method of claim 4, wherein said monitoring step comprises analyzing said effluent for phosphorus.
Claim 16
Dependent Claim
16 words
The method of claim 4, wherein said monitoring step comprises analyzing said effluent for sodium cation.
Claim 17
Dependent Claim
26 words
The method of claim 4, further comprising the step of contacting the acid with silicon material to remove metal ions that will deposit on said silicon.
Claim 18
Independent Claim
222 words
A method for purifying hydrofluoric acid, comprising the steps of: filtering said hydrofluoric acid to remove particulates; passing said filtered acid through a cation exchange material and an anion exchange material to remove ions therefrom; at least periodically automatically monitoring the acid that has passed through at least a portion of said cation exchange material for a level of cationic impurity representative of exhaustion of at least a portion of said cation exchange material; at least periodically automatically monitoring the acid that has passed through at least a portion of said anion exchange material for a level of anionic impurity representative of exhaustion of at least a portion of said anion exchange material; automatically interrupting flow of acid through said anionic or cationic exchange material at or prior to the time ionic breakthrough in such material occurs; while said flow is interrupted, regenerating said anionic or cationic exchange material; resuming said flow after said exchange material is regenerated; passing said acid from said cationic and anionic exchange materials through an ultrafilter and into a storage container; and monitoring the level of particulate impurities in acid that has passed through said anion and cation exchange materials and automatically passing said acid in said storage container through a filter until said particulates having a particle size of one micron or greater are substantially eliminated.
Claim 19
Independent Claim
222 words
A method for purifying hydrofluoric acid, comprising the steps of: filtering said hydrofluoric acid to remove particulates; passing said filtered acid through a cation exchange material and an anion exchange material to remove ions therefrom; at least periodically automatically monitoring the acid that has passed through at least a portion of said cation exchange material for a level of cationic impurity representative of exhaustion of at least a portion of said cation exchange material; at least periodically automatically monitoring the acid that has passed through at least a portion of said anion exchange material for a level of anionic impurity representative of exhaustion of at least a portion of said anion exchange material; automatically interrupting flow of acid through said anionic or cationic exchange material at or prior to the time ionic breakthrough in such material occurs; while said flow is interrupted, regenerating said anionic or cationic exchange material; resuming said flow after said exchange material is regenerated; passing said acid from said cationic and anionic exchange materials through an ultrafilter and into a storage container; and monitoring the level of particulate impurities in acid that has passed through said anion and cation exchange materials and automatically passing said acid in said storage container through a filter until said particulates having a particle size of one micron or greater are substantially eliminated.
Claim 20
Dependent Claim
26 words
The method of claim 15, further comprising the step of contacting the acid with silicon material to remove metal ions that will deposit on said silicon.
Claim 21
Independent Claim
124 words
The method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and at least one ionic impurity; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurity by contacting said impure hydrofluoric acid with ion exchange material having an affinity for said ionic impurity to provide a purified effluent, wherein said ion exchange material comprises anion and cation ion exchange material in separate beds and flow through the beds is sequential; determining when a portion of the exchange capacity of said ion exchange material has been exhausted and automatically stopping said contacting step at that point; automatically regenerating said ion exchange material while said contacting step is stopped; and automatically restarting said contacting step.
Claim 22
Independent Claim
124 words
The method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and at least one ionic impurity; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurity by contacting said impure hydrofluoric acid with ion exchange material having an affinity for said ionic impurity to provide a purified effluent, wherein said ion exchange material comprises anion and cation ion exchange material in separate beds and flow through the beds is sequential; determining when a portion of the exchange capacity of said ion exchange material has been exhausted and automatically stopping said contacting step at that point; automatically regenerating said ion exchange material while said contacting step is stopped; and automatically restarting said contacting step.
Claim 23
Dependent Claim
23 words
The method of claim 17, wherein said determining step comprises determining the volume of acid that has passed through said ion exchange material.
Claim 24
Independent Claim
138 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and at least one ionic impurity; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurity by contacting said impure hydrofluoric acid with cation exchange material having an affinity for said ionic impurity to provide a purified effluent; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of said ionic impurity; interrupting said extracting step when said monitoring step detects a level of said ionic impurity indicative of exhaustion of at least a portion of said cation exchange material; and regenerating said cation exchange material with ultrapure sulfuric acid having metallic impurities no greater than 50 parts per billion per metal; and again performing said contacting step.
Claim 25
Independent Claim
138 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and at least one ionic impurity; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurity by contacting said impure hydrofluoric acid with cation exchange material having an affinity for said ionic impurity to provide a purified effluent; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of said ionic impurity; interrupting said extracting step when said monitoring step detects a level of said ionic impurity indicative of exhaustion of at least a portion of said cation exchange material; and regenerating said cation exchange material with ultrapure sulfuric acid having metallic impurities no greater than 50 parts per billion per metal; and again performing said contacting step.
Claim 26
Independent Claim
133 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and at least one ionic impurity, which impurity comprises fluosilicic acid; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurity by contacting said impure hydrofluoric acid with anion exchange material having an affinity for said ionic impurity to provide a purified effluent; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of said fluosilicic ionic impurity by means of a conductivity sensor; interrupting said extracting step when said monitoring step detects a level of said ionic impurity indicative of exhaustion of at least a portion of said anion exchange material; regenerating said anion exchange material; and again performing said contacting step.
Claim 27
Independent Claim
133 words
A method for purifying hydrofluoric acid, comprising the steps of: obtaining impure hydrofluoric acid containing particulate material and at least one ionic impurity, which impurity comprises fluosilicic acid; filtering the impure hydrofluoric acid to remove said particulate material; extracting said ionic impurity by contacting said impure hydrofluoric acid with anion exchange material having an affinity for said ionic impurity to provide a purified effluent; monitoring the hydrofluoric acid that has contacted at least a portion of said ion exchange material for the presence of said fluosilicic ionic impurity by means of a conductivity sensor; interrupting said extracting step when said monitoring step detects a level of said ionic impurity indicative of exhaustion of at least a portion of said anion exchange material; regenerating said anion exchange material; and again performing said contacting step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-27 | 1994-02-26 | 1994-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-27 | 1998-02-26 | 1998-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-27 | 2002-02-26 | 2002-08-28 | $7700.00 | Window Closed / Lapsed |