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US4943970A Expired / Lapsed US ⏱️ 0.0 years remaining

Surface emitting laser

Assignee: Tacan Corp
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Filing: 1989-09-21
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Granted: 1990-07-24
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Expires: 2009-09-21
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Abstract

Abstract A laser fabricated from a substrate having top and bottom surfaces. A first stack of mirror layers of alternating different refractive indices are formed upon the substrate top surface. An active layer defining a mesa is formed on top of the first stack of mirror layers. A second stack of alternating different refractive indices mirror layers are formed upon the active layer mesa. A current confinement layer is formed about the side of the active laser mesa. A first contact is formed upon the substrate bottom surface while a second contact is formed upon a portion of said active layer remote from the active layer mesa.

Inventors

  • 👤 Eric M. Bradley

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 23:29
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; H01S5/18344; H01S5/1835; H01S5/02; H01S5/0206; H01S5/0207; H01S5/06; H01S5/068; H01S5/0683; H01S5/18341; H01S5/18361; H01S5/18369

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 176 words
A surface emitting laser diode comprising: a semiconductor substrate having top and bottom surfaces; a first plurality of alternating semiconductor mirror layers of differing refractive indicies formed upon said substrate; a semiconductor active layer formed upon said first plurality of semiconductor layers, said active layer having a central region and a surrounding outer region, said active layer central region being of greater thickness than said active layer outer region, wherein said active layer central region has a top and a side surface and said active layer outer region has a top surface intersecting said active layer central region side; a second plurality of said alternating semiconductor mirror layers formed upon said active central region top surface; a current confinement layer formed upon said active layer central region side surface and a portion of said active layer outer region top surface immediate said active layer central region side surface; first and second contacts respectively formed upon said substrate bottom surface and said active layer outer region top surface remote from said active layer central region side surface.
Claim 2
Dependent Claim 176 words
A surface emitting laser diode comprising: a semiconductor substrate having top and bottom surfaces; a first plurality of alternating semiconductor mirror layers of differing refractive indicies formed upon said substrate; a semiconductor active layer formed upon said first plurality of semiconductor layers, said active layer having a central region and a surrounding outer region, said active layer central region being of greater thickness than said active layer outer region, wherein said active layer central region has a top and a side surface and said active layer outer region has a top surface intersecting said active layer central region side; a second plurality of said alternating semiconductor mirror layers formed upon said active central region top surface; a current confinement layer formed upon said active layer central region side surface and a portion of said active layer outer region top surface immediate said active layer central region side surface; first and second contacts respectively formed upon said substrate bottom surface and said active layer outer region top surface remote from said active layer central region side surface.
Claim 3
Dependent Claim 38 words
The surface emitting laser of claim 1 wherein said active layer is formed of an n-type semiconductor material having a p-type region formed therein at said active layer central region side surface and said active layer outer region.
Claim 4
Dependent Claim 17 words
The surface emitting laser of claim 1 wherein said current confinement layer is formed of dielectric material.
Claim 5
Dependent Claim 18 words
The surface emitting laser of claim 2 wherein said current confinement layer is formed of a dielectric material.
Claim 6
Dependent Claim 35 words
The surface emitting laser of claim 1 wherein said current confinement layer comprises a p-type semiconductor material layer formed upon said active layer and an n-type semiconductor material layer formed upon said p-type semiconductor layer.
Claim 7
Dependent Claim 35 words
The surface emitting laser of claim 2 wherein said current confinement layer comprises a p-type semiconductor material layer formed upon said active layer and an n-type semiconductor material layer formed upon said p-type semiconductor layer.
Claim 8
Dependent Claim 123 words
A surface emitting laser comprising: a substrate having top and bottom surfaces; a first stack of mirror layers located upon said substrate top surface, said first stack layers of alternating indices of refraction; an active layer located upon said first stack, said active layer having a mesa extending above an adjacent base layer portion of said active layer; a second stack of mirror layers located upon a top surface of said mesa, said second stack layers of alternating indices of refraction; a current confinement layer located about said mesa and upon said adjacent base layer portion immediate said mesa; a first contact located upon said substrate bottom surface; and a second contact located upon said active layer adjacent to said base layer portion.
Claim 9
Dependent Claim 123 words
A surface emitting laser comprising: a substrate having top and bottom surfaces; a first stack of mirror layers located upon said substrate top surface, said first stack layers of alternating indices of refraction; an active layer located upon said first stack, said active layer having a mesa extending above an adjacent base layer portion of said active layer; a second stack of mirror layers located upon a top surface of said mesa, said second stack layers of alternating indices of refraction; a current confinement layer located about said mesa and upon said adjacent base layer portion immediate said mesa; a first contact located upon said substrate bottom surface; and a second contact located upon said active layer adjacent to said base layer portion.
Claim 10
Dependent Claim 16 words
The surface emitting laser of claim 7 wherein said substrate is formed of a semiconductor material.
Claim 11
Dependent Claim 21 words
The surface emitting laser of claim 7 wherein said first and second stack of mirror layers are formed of semiconductor materials.
Claim 12
Dependent Claim 17 words
The surface emitting laser of claim 7 wherein said active layer is formed of a semiconductor material.
Claim 13
Dependent Claim 17 words
The surface emitting laser of claim 7 wherein current confinement layer is formed of a dielectric material.
Claim 14
Dependent Claim 35 words
The surface emitting laser of claim 7 wherein said current confinement layer is comprised of a first layer of p-type semiconductor material having a second layer of n-type semiconductor material formed upon said first layer.
Claim 15
Dependent Claim 34 words
The surface emitting laser of claim 7 wherein said first and second contacts are respective layers of metalization with said second contact circumscribing said mesa and adjacent base layer portion immediately adjacent said mesa.
Claim 16
Dependent Claim 41 words
The surface emitting laser of claim 8 wherein said active layer is formed of an n-type semiconductor material, said active layer having a p-type region formed in said active layer surrounding and extending outwardly from a central portion of said mesa.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-07-23 1994-01-22 1994-07-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-07-23 1998-01-22 1998-07-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-07-23 2002-01-22 2002-07-24 $7700.00 Window Closed / Lapsed

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