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US4935384A
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Method of passivating semiconductor surfaces
Assignee: United States Department of Energy
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Filing: 1988-12-14
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Granted: 1990-06-19
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Expires: 2008-12-14
Abstract
Abstract A method of passivating Group III-V or II-VI semiconductor compound surfaces. The method includes selecting a passivating material having a lattice constant substantially mismatched to the lattice constant of the semiconductor compound. The passivating material is then grown as an ultrathin layer of passivating material on the surface of the Group III-V or II-VI semiconductor compound. The passivating material is grown to a thickness sufficient to maintain a coherent interface between the ultrathin passivating material and the semiconductor compound. In addition, a device formed from such method is also disclosed.
Inventors
- 👤 Mark W. Wanlass
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:03
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/30; H10F77/306; H10F77/311; H10P; H10P14/00; H10P14/20; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3218; H10P14/3221; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H10P14/3421; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S148/00; Y10S148/015; Y10S148/065; Y10S148/097; Y10S438/00; Y10S438/902
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
115 words
A method of passivating Group III-V and II-VI semiconductor compound surfaces comprising selecting a passivating material having a lattice constant substantially mismatched to the lattice constant of said semiconductor compound, and growing an ultrathin epitaxial layer of said passivating material on the surface of said semiconductor compound to a thickness sufficient to maintain a coherent interface between said passivating material and said semiconductor compound; wherein said passivating material comprises a higher bandgap composition to form a window layer on said semiconductor compound surface; and wherein the maximum thickness of said ultrathin passivating material comprises that thickness above which dislocations begin to nucleate because of excessive strain energy between said passivating material and said semiconductor compound.
Claim 2
Independent Claim
115 words
A method of passivating Group III-V and II-VI semiconductor compound surfaces comprising selecting a passivating material having a lattice constant substantially mismatched to the lattice constant of said semiconductor compound, and growing an ultrathin epitaxial layer of said passivating material on the surface of said semiconductor compound to a thickness sufficient to maintain a coherent interface between said passivating material and said semiconductor compound; wherein said passivating material comprises a higher bandgap composition to form a window layer on said semiconductor compound surface; and wherein the maximum thickness of said ultrathin passivating material comprises that thickness above which dislocations begin to nucleate because of excessive strain energy between said passivating material and said semiconductor compound.
Claim 3
Dependent Claim
21 words
The method as claimed in claim 1, wherein said passivating material comprises a composition selected from Group III-V or II-VI materials.
Claim 4
Dependent Claim
42 words
The method as claimed in claim 1, wherein said passivating material on semiconductor compound combinations are selected from the group consisting of GaP on GaAs 1-x P x , GaP on GaAs, AlInAs on InP, AlInP on InP, and GaAsP on GaAs.
Claim 5
Dependent Claim
18 words
The method as claimed in claim 1, wherein the maximum thickness of said ultrathin layer comprises 50-500 Angstroms.
Claim 6
Dependent Claim
26 words
The method as claimed in claim 1, wherein said passivating material is grown on said semiconductor compound utilizing Molecular Beam Epitaxy or Chemical Vapor Deposition techniques.
Claim 7
Independent Claim
124 words
A method of forming heterostructures of Group III-V and II-VI semiconductor materials comprising: forming a p-n junction semiconductor device from said semiconductor materials; and growing an ultrathin epitaxial layer of passivating material on the surface of said semiconductor device of sufficient thickness to maintain coherency in said passivating material, said passivating material being selected from compositions substantially lattice-mismatched to said semiconductor device; wherein said passivating material has a higher bandgap than said p-n junction semiconductor device to form a window thereon; and wherein said ultrathin layer is grown on said p-n junction semiconductor device to a thickness below which the biaxial strain between said ultrathin layer and said p-n junction device is sufficient to nucleate dislocations in the surface layer due to lattice-mismatch therebetween.
Claim 8
Independent Claim
124 words
A method of forming heterostructures of Group III-V and II-VI semiconductor materials comprising: forming a p-n junction semiconductor device from said semiconductor materials; and growing an ultrathin epitaxial layer of passivating material on the surface of said semiconductor device of sufficient thickness to maintain coherency in said passivating material, said passivating material being selected from compositions substantially lattice-mismatched to said semiconductor device; wherein said passivating material has a higher bandgap than said p-n junction semiconductor device to form a window thereon; and wherein said ultrathin layer is grown on said p-n junction semiconductor device to a thickness below which the biaxial strain between said ultrathin layer and said p-n junction device is sufficient to nucleate dislocations in the surface layer due to lattice-mismatch therebetween.
Claim 9
Dependent Claim
17 words
The method as claimed in claim 6, wherein the maximum thickness of said layer is 50-500 Angstroms.
Claim 10
Dependent Claim
42 words
The method as claimed in claim 6, wherein said passivating material and semiconductor compound combinations are selected from the group consisting of GaP on GaAs 1-x P x , GaP on GaAs, AlInAs on InP, AlInP on InP, and GaAsP on GaAs.
Claim 11
Dependent Claim
25 words
The method as claimed in claim 6, wherein said p-n junction device and said ultrathin layer are both selected from Group III-V and II-VI materials.
Claim 12
Dependent Claim
27 words
The method as claimed in claim 6, wherein said passivating material is grown directly on said semiconductor compound utilizing Molecular Beam Epitaxy or Chemical Vapor Deposition techniques.
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