US4929322A — Apparatus and process for arc vapor depositing a …

Claim 1

Independent Claim 342 words

A process for coating an object with source material in a vacuum chamber which comprises; (a) providing within said vacuum chamber a solid cathode and an anode with each being spaced apart from one another and from said object and with said cathode having an evaporable and surface for supplying said source material; (b) arranging said cathode in said vacuum chamber with its evaporable end surface facing said object; (c) evacuating said vacuum chamber to an operating pressure of between 10 -1 and 5×10 -4 torr; (d) surrounding said cathode with an elongated member uniform in cross sectional dimension over its length to form a narrow space between the elongated member and said cathode with said elongated member having an open end extending beyond the evaporable end surface of the cathode a distance calculated from the ratio of x/d of from 0.07 to 2 forming a cathode chamber between said evaporable end surface and said open end where "x" represents the axial dimension between said evaporable end surface and said open end and "d" represents the major dimension of the cross-section of said evaporable end surface; (e) generating an electric arc between the evaporable end surface of the cathode and the anode; (f) maintaining said elongated member electrically insulated from both the cathode and the anode for preventing arcing between the cathode and said member and from between said member and the anode; (g) introducing gas into said narrow space at a pressure higher than the operating pressure established within the vacuum chamber and in a direction so as to envelop the arc in said cathode chamber before entering the vacuum chamber such that the arc termination at the cathode is confined to the evaporable end surface with the arc caused to traverse a path extending from said evaporable end surface around the open end of said elongated member to said anode; (h) withdrawing gas from the vacuum chamber to maintain the pressure within the vacuum chamber at said operating pressure; and (i) depositing a coating of source material upon the object.

Claim 2

Dependent Claim 342 words

A process for coating an object with source material in a vacuum chamber which comprises; (a) providing within said vacuum chamber a solid cathode and an anode with each being spaced apart from one another and from said object and with said cathode having an evaporable and surface for supplying said source material; (b) arranging said cathode in said vacuum chamber with its evaporable end surface facing said object; (c) evacuating said vacuum chamber to an operating pressure of between 10 -1 and 5×10 -4 torr; (d) surrounding said cathode with an elongated member uniform in cross sectional dimension over its length to form a narrow space between the elongated member and said cathode with said elongated member having an open end extending beyond the evaporable end surface of the cathode a distance calculated from the ratio of x/d of from 0.07 to 2 forming a cathode chamber between said evaporable end surface and said open end where "x" represents the axial dimension between said evaporable end surface and said open end and "d" represents the major dimension of the cross-section of said evaporable end surface; (e) generating an electric arc between the evaporable end surface of the cathode and the anode; (f) maintaining said elongated member electrically insulated from both the cathode and the anode for preventing arcing between the cathode and said member and from between said member and the anode; (g) introducing gas into said narrow space at a pressure higher than the operating pressure established within the vacuum chamber and in a direction so as to envelop the arc in said cathode chamber before entering the vacuum chamber such that the arc termination at the cathode is confined to the evaporable end surface with the arc caused to traverse a path extending from said evaporable end surface around the open end of said elongated member to said anode; (h) withdrawing gas from the vacuum chamber to maintain the pressure within the vacuum chamber at said operating pressure; and (i) depositing a coating of source material upon the object.

Claim 3

Dependent Claim 33 words

A process as defined in claim 1 wherein the gas introduced into said narrow space is inert and is selected from the class consisting of argon, neon, krypton, xenon, helium and combinations thereof.

Claim 4

Dependent Claim 38 words

A process as defined in claim 2 wherein the gas introduced into said narrow space is reactive and is selected from the class consisting of nitrogen, oxygen, hydrocarbons, carbon dioxide, carbon monoxide, diborene, air, silane and combinations thereof.

Claim 5

Dependent Claim 27 words

A process as defined in claim 1 wherein the object is biased to a negative potential difference relative to the anode of between 50 and 400 volts.

Claim 6

Dependent Claim 31 words

A process as defined in claim 1 wherein the object is biased to a negative potential difference relative to both the anode and the cathode of between 50 and 400 volts.

Claim 7

Dependent Claim 23 words

A process as defined in claim 1 wherein the elongated member has a circular cross-section and wherein the cathode has a circular cross-section.

Claim 8

Dependent Claim 14 words

A process as defined in claim 1 wherein x/d is between 0.3 and 1.0.

Claim 9

Dependent Claim 30 words

A process as defined in claim 7 wherein the object is composed of a material selected from the class consisting of refractory metals, superalloys, stainless steels, and a ceramic composites.

Claim 10

Dependent Claim 24 words

A process as defined in claim 8 wherein the object is positioned between the solid cathode evaporable end surface and an electrically insulated surface.

Claim 11

Dependent Claim 15 words

A process as defined in claim 7 wherein the object is composed of titanium alloy.

Claim 12

Dependent Claim 264 words

Apparatus for depositing a coating of source material upon an object in an evacuated vacuum chamber comprising: (a) a cathode having an evaporable end surface for supplying said source material, with said cathode disposed in said vacuum chamber with its evaporable end surface facing said object; (b) an anode spaced apart from the cathode and the object; (c) means for evacuating said vacuum chamber to an operating pressure of between 10 -1 and 5×10 -4 torr; (d) an elongated member surrounding the cathode to form a narrow space there between with said elongated member being uniform in cross-sectional dimension over its length and having an open end projecting beyond the evaporable end surface of the cathode a distance calculated from the ratio x/d of from 0.07 to 2 for forming a cathode chamber between said evaporable end surface and said open end where "x" represents the axial dimension between said evaporate end surface and said open end and "d" represents the major dimension of the cross section of said evaporable end surface; (e) means for generating an electric arc between the evaporable end surface of the cathode and the anode; (f) means for introducing gas into said narrow space at a pressure higher than the operating pressure established within the vacuum chamber and in a direction to flow through the cathode chamber before entering the vacuum chamber; (g) means for maintaining said elongated member electrically insulated from both said cathode and said anode; and (h) means for withdrawing the gas injected into the vacuum chamber to maintain said operating pressure in said vacuum chamber.

Claim 13

Dependent Claim 264 words

Apparatus for depositing a coating of source material upon an object in an evacuated vacuum chamber comprising: (a) a cathode having an evaporable end surface for supplying said source material, with said cathode disposed in said vacuum chamber with its evaporable end surface facing said object; (b) an anode spaced apart from the cathode and the object; (c) means for evacuating said vacuum chamber to an operating pressure of between 10 -1 and 5×10 -4 torr; (d) an elongated member surrounding the cathode to form a narrow space there between with said elongated member being uniform in cross-sectional dimension over its length and having an open end projecting beyond the evaporable end surface of the cathode a distance calculated from the ratio x/d of from 0.07 to 2 for forming a cathode chamber between said evaporable end surface and said open end where "x" represents the axial dimension between said evaporate end surface and said open end and "d" represents the major dimension of the cross section of said evaporable end surface; (e) means for generating an electric arc between the evaporable end surface of the cathode and the anode; (f) means for introducing gas into said narrow space at a pressure higher than the operating pressure established within the vacuum chamber and in a direction to flow through the cathode chamber before entering the vacuum chamber; (g) means for maintaining said elongated member electrically insulated from both said cathode and said anode; and (h) means for withdrawing the gas injected into the vacuum chamber to maintain said operating pressure in said vacuum chamber.

Claim 14

Dependent Claim 24 words

Apparatus as defined in claim 11 wherein the means for generating the electric arc includes power supply means located external of the vacuum chamber.

Claim 15

Dependent Claim 15 words

Apparatus as defined in claim 12 wherein said elongated member is composed of nonmagnetic material.

Claim 16

Dependent Claim 23 words

Apparatus as defined in claim 13 wherein said elongated member has a geometrical shape substantially corresponding to the geometrical shape of the cathode.

Claim 17

Dependent Claim 15 words

Apparatus as defined in claim 14 wherein said narrow space is an annular in cross-section.

Claim 18

Dependent Claim 25 words

Apparatus as defined in claim 15 wherein the electrical potential of the object is at a negative potential relative to the anode and the cathode.

Claim 19

Dependent Claim 16 words

Apparatus as defined in claim 16 wherein the negative potential is between 50 and 400 volts.

Claim 20

Dependent Claim 17 words

Apparatus as defined in claim 15 wherein the anode is an integral part of the vacuum chamber.

Claim 21

Dependent Claim 14 words

Apparatus as defined in claim 15 wherein the anode is connected to ground potential.

Claim 22

Dependent Claim 16 words

Apparatus as defined in claim 15 wherein the anode is isolated electrically from the vacuum chamber.

Claim 23

Dependent Claim 22 words

Apparatus as defined in claim 15 wherein the surface of an electrically insulated member is positioned opposite the cathode evaporable end surface.

Claim 24

Dependent Claim 24 words

Apparatus as defined in claim 21 wherein the object is placed between the surface of electrically insulated member and the cathode evaporable end surface.

Claim 25

Dependent Claim 34 words

Apparatus as defined in claim 15 wherein the cathode is selected from the class consisting of Si, Cu, Al, W, Mo, Cr, Ta, Nb, V, Hf, Zr, Ti, Ni, Co, Fe and their alloys.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1993-05-28	1993-11-27	1994-05-29	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1997-05-28	1997-11-27	1998-05-29	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2001-05-28	2001-11-27	2002-05-29	$7700.00	Window Closed / Lapsed

Apparatus and process for arc vapor depositing a coating in an evacuated chamber

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