US4512867A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for controlling plasma generation in vapor deposition
Assignee: Individual
•
Filing: 1983-08-29
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Granted: 1985-04-23
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Expires: 2003-08-29
Abstract
Abstract Vapor deposition coating can be performed in apparatus in which a plasma of the coating material is generated from the surface of an electrode. The surface area of the electrode from which the plasma is generated can be selectively adjusted by exposing the plasma generating surface of the electrode to the influence of a magnetic field and adjusting the strength of the magnetic field to spread plasma over the evaporative surface of the electrode to permit more efficient utilization of the electrode. Preferably, the electrode is in the form of a flat metal disc (e.g. titanium) and the magnetic field is generated by a wire coil that substantially encircles or is coaxial to the electrode, with the electrode or an associated element functioning as a core for the coil.
Inventors
- 👤 Anatoly A. Andreev
- 👤 Anatoly A. Romanov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 14:50
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32055; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
193 words
An apparatus for vapor deposition coating in which a plasma of coating material is generated from the surface of an electrode, said apparatus comprising: (a) a sacrificial metal cathode having a plasma generating and face containing a depression whose bottom defines the plasma generating surface, so that cathode spots which are created on the generating surface are prevented from moving to the periphery of said end face; (b) means for generating a plasma from said cathode; (c) means for producing an electromagnetic field adjacent said plasma generating surface comprising a magnetic wire coil placed coaxially with said cathode and below the level of the plasma generating surface, so that the lines of force of said electromagnetic field extend in an inclined position with respect to the periphery of the plasma generating surface to influence the movement of the cathode spots on said plasma generating surface; and (d) means for altering the intensity of the electromagnetic field to selectively control the size of the portion of the cathode from which the plasma is generated, so that a uniform distribution of paths of movement of said cathode spots on said plasma generating surface is provided.
Claim 2
Independent Claim
193 words
An apparatus for vapor deposition coating in which a plasma of coating material is generated from the surface of an electrode, said apparatus comprising: (a) a sacrificial metal cathode having a plasma generating and face containing a depression whose bottom defines the plasma generating surface, so that cathode spots which are created on the generating surface are prevented from moving to the periphery of said end face; (b) means for generating a plasma from said cathode; (c) means for producing an electromagnetic field adjacent said plasma generating surface comprising a magnetic wire coil placed coaxially with said cathode and below the level of the plasma generating surface, so that the lines of force of said electromagnetic field extend in an inclined position with respect to the periphery of the plasma generating surface to influence the movement of the cathode spots on said plasma generating surface; and (d) means for altering the intensity of the electromagnetic field to selectively control the size of the portion of the cathode from which the plasma is generated, so that a uniform distribution of paths of movement of said cathode spots on said plasma generating surface is provided.
Claim 3
Dependent Claim
25 words
The apparatus of claim 1 wherein a cathode holder serves as the core of the magnetic wire coil and is actuated by an electric arc.
Claim 4
Dependent Claim
41 words
The apparatus of claim 1 wherein current varying means are operatively connected to said magnetic wire coil so that the intensity of the electromagnetic field on the plasma generating surface may be varied within the range of 5 to 80 oersteds.
Claim 5
Dependent Claim
41 words
The apparatus of claim 2 wherein current varying means are operatively connected to said magnetic wire coil so that the intensity of the electromagnetic field on the plasma generating surface may be varied within the range of 5 to 80 oersteds.
Claim 6
Dependent Claim
36 words
The apparatus of claim 1 wherein a magnetic circuit means operatively envelopes the magnetic wire coil, to increase the inclination of the lines of force of the electromagnetic field with respect to the plasma generating surface.
Claim 7
Dependent Claim
36 words
The apparatus of claim 2 wherein a magnetic circuit means operatively envelopes the magnetic wire coil, to increase the inclination of the lines of force of the electromagnetic field with respect to the plasma generating surface.
Claim 8
Dependent Claim
36 words
The apparatus of claim 3 wherein a magnetic circuit means operatively envelopes the magnetic wire coil, to increase the inclination of the lines of force of the electromagnetic field with respect to the plasma generating surface.
Claim 9
Dependent Claim
36 words
The apparatus of claim 4 wherein a magnetic circuit means operatively envelopes the magnetic wire coil, to increase the inclination of the lines of force of the electromagnetic field with respect to the plasma generating surface.
Claim 10
Dependent Claim
18 words
The apparatus of claim 8 further comprising an anode facing the plasma generating surface which envelopes the cathode.
Claim 11
Dependent Claim
12 words
The apparatus of claim 9 wherein the anode comprises a vacuum chamber.
Claim 12
Dependent Claim
34 words
The apparatus of claim 10 further comprising a trigger electrode means next to the cathode and controlled by an electromagnet, for producing a spark initiating an arc discharge between the cathode and the anode.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-04-22 | 1988-10-22 | 1989-04-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-04-22 | 1992-10-22 | 1993-04-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-04-22 | 1996-10-22 | 1997-04-23 | $7700.00 | Window Closed / Lapsed |