US4910123A
Expired / Lapsed
US
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Pattern forming method
Assignee: Panasonic Holdings Corp
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Filing: 1987-12-24
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Granted: 1990-03-20
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Expires: 2007-12-24
Abstract
Abstract Disclosed is a pattern forming method using pattern forming material which is reactive to a light of 249 nm or so such as DUV light or excimer laser light and applicable to manufacture of semiconductors. The material used in this method includes resin which includes a bonding unit of <IMAGE> and has low absorption near 249 nm after light exposure, and is soluble in a solvent which dissolves the resin. By this method, a fine pattern of high contrast can be obtained.
Inventors
- 👤 Masayuki Endo
- 👤 Masaru Sasago
- 👤 Kazufumi Ogawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 12:29
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; C; C08; C08F; C08F8/00; C08F8/30; C08G; C08G8/00; C08G8/28; Y; Y10; Y10S; Y10S430/00; Y10S430/146
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
129 words
A pattern forming method comprising: a. applying on a substrate a pattern forming material which is composed of a diazo compound which includes a bonding unit of ##STR72## has high absorption of light at or near 249 nm before exposure thereto and low absorption of light at or near 249 nm after exposure thereto and which material is soluble in a solvent which dissolves said resin after said exposure; said compound having a ##STR73## bonding unit being formed by reacting a resin having a ##STR74## bonding unit, to produce a reaction product and then forming said diazo compound from the reaction product; b. selectively exposing said pattern forming material to such light at or near 249 nm; and c. developing said pattern forming material by applying said solvent thereto.
Claim 2
Dependent Claim
129 words
A pattern forming method comprising: a. applying on a substrate a pattern forming material which is composed of a diazo compound which includes a bonding unit of ##STR72## has high absorption of light at or near 249 nm before exposure thereto and low absorption of light at or near 249 nm after exposure thereto and which material is soluble in a solvent which dissolves said resin after said exposure; said compound having a ##STR73## bonding unit being formed by reacting a resin having a ##STR74## bonding unit, to produce a reaction product and then forming said diazo compound from the reaction product; b. selectively exposing said pattern forming material to such light at or near 249 nm; and c. developing said pattern forming material by applying said solvent thereto.
Claim 3
Dependent Claim
22 words
The method of claim 1, wherein said light near 249 nm is a pulse light as oscillated from a KrF excimer laser.
Claim 4
Dependent Claim
15 words
The method of claim 1, wherein said solvent is small in absorption near 249 nm.
Claim 5
Dependent Claim
13 words
The method of claim 1, wherein said solvent is diethylene glycol dimethyl ether.
Claim 6
Dependent Claim
25 words
The method of claim 1, wherein said compound which has low absorption near 249 nm is a resin which includes at least one OH group.
Claim 7
Dependent Claim
18 words
The method of claim 5, wherein said resin which includes at least one OH group is novolak resin.
Claim 8
Dependent Claim
14 words
The method of claim 1, wherein said resin includes at least one nitrogen atom.
Claim 9
Dependent Claim
11 words
The method of claim 1, wherien said resin includes imide bonding.
Claim 10
Dependent Claim
18 words
The method of claim 1, wherein the diazo-formation is carried out by use of para toluene sulfonyl diazide.
Claim 11
Dependent Claim
11 words
The method of claim 1, wherein said resin includes amide bonding.
Claim 12
Dependent Claim
10 words
The method of claim 1, wherein said solvent is alkaline.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-03-19 | 1993-09-18 | 1994-03-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-03-19 | 1997-09-18 | 1998-03-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-03-19 | 2001-09-18 | 2002-03-20 | $7700.00 | Window Closed / Lapsed |