Patent US2756147A successfully refreshed from Google Patents.
Patent US4897966A successfully refreshed from Google Patents.
US4897966A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing apparatus
Assignee: Mitsubishi Materials Silicon Corp
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Filing: 1987-08-18
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Granted: 1990-02-06
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Expires: 2007-08-18
Abstract
Abstract An apparatus for polishing one of opposite faces of a slab member includes a surface plate, a mounting member, an urging shaft and a pressure transmitting member. The surface plate has a flat upper surface and is rotatable about an axis perpendicular to the upper surface. The mounting member has an upper face and a lower face to which the other face of the slab member is fixedly secured, and is disposed above the surface plate in such a manner that the one face of the slab member to be polished is held in contact with the upper surface of the surface plate. The urging shaft is connected to the mounting member for urging the mounting member toward the surface plate at a prescribed urging pressure to bring the one face of the slab member into pressure contact with the upper surface of the surface plate. The pressure transmitting member is interposed between the mounting member and the urging shaft for causing the urging pressure of the urging shaft to exert on the upper face of the mounting member. The transmitting member has a deformable chamber which contains a fluid therein.
Inventors
- 👤 Yutaka Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:01
CPC Classifications
H; H10; H10P; H10P52/00; B; B24; B24B; B24B37/00; B24B37/27; B24B37/30
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
289 words
An apparatus for polishing one of opposite faces of a slab member comprising: (a) a surface plate having a flat upper surface and being rotatable about an axis perpendicular to said upper surface; (b) a mounting member having an upper face and a lower face to which the other face of said slab member is fixedly secured, and said mounting member being disposed above said surface plate in such a manner that said one face of the slab member to be polished is held in contact with said upper surface of the surface plate; (c) urging means operably connected to said mounting member for urging said mounting member toward said surface plate at a prescribed urging pressure to bring said one face of the slab member into pressure contact with said upper surface of said surface plate; and (d) pressure transmitting means interposed between said mounting member and said urging means for causing the urging pressure of said urging means to be exerted on said upper face of said mounting member, said transmitting means comprising a mounting head connected to said urging means and having a recess formed in a lower face thereof, and a flexible container containing a fluid therein and housed in said recess of said mounting head with an upper surface thereof being held in contact with an inner surface of said recess while a lower surface of said container is held in contact with said upper face of said mounting member; said flexible container comprising an elongated tube having upper and lower faces and being wound in a vortical form and having opposite closed ends, said upper and lower faces of said elongated tube being secured by top and bottom seats of resilient material, respectively.
Claim 2
Independent Claim
289 words
An apparatus for polishing one of opposite faces of a slab member comprising: (a) a surface plate having a flat upper surface and being rotatable about an axis perpendicular to said upper surface; (b) a mounting member having an upper face and a lower face to which the other face of said slab member is fixedly secured, and said mounting member being disposed above said surface plate in such a manner that said one face of the slab member to be polished is held in contact with said upper surface of the surface plate; (c) urging means operably connected to said mounting member for urging said mounting member toward said surface plate at a prescribed urging pressure to bring said one face of the slab member into pressure contact with said upper surface of said surface plate; and (d) pressure transmitting means interposed between said mounting member and said urging means for causing the urging pressure of said urging means to be exerted on said upper face of said mounting member, said transmitting means comprising a mounting head connected to said urging means and having a recess formed in a lower face thereof, and a flexible container containing a fluid therein and housed in said recess of said mounting head with an upper surface thereof being held in contact with an inner surface of said recess while a lower surface of said container is held in contact with said upper face of said mounting member; said flexible container comprising an elongated tube having upper and lower faces and being wound in a vortical form and having opposite closed ends, said upper and lower faces of said elongated tube being secured by top and bottom seats of resilient material, respectively.
Claim 3
Dependent Claim
18 words
A polishing apparatus according to claim 1, in which said vortical elongated tube is of a doughnut shape.
References Cited (Backward Citations)
US2441108A
Cited
US3579917A
Cited
DE2132174A1
Cited
US3740900A
Cited
US3849948A
Cited
DE2252503A1
Cited
SU743850A1
Cited
DD208576A1
Cited
EP0156746A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-02-05 | 1993-08-07 | 1994-02-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-02-05 | 1997-08-07 | 1998-02-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-02-05 | 2001-08-07 | 2002-02-06 | $7700.00 | Window Closed / Lapsed |