US4897154A — Post dry-etch cleaning method for restoring wafer…

Claim 1

Independent Claim 140 words

A process for restoring a monocrystalline semiconductor wafer after sustaining crystallinity damage due to dry etching, said process comprising the steps of: performing dry etching on selected portions of a semiconductor wafer with an etching gas mixture which causes crystallinity damage and the formation of a dry etch residue film on said selected portions of said semiconductor wafer; removing said dry etch residue layer from the etched portions and actively forming by the application of energy a continuous oxide layer on said selected etched portions of said semiconductor wafer; rapid thermal annealing said wafer by heating said wafer to a temperature of at least 700° C. for less than 30 seconds to drive said oxide layer down into said wafer a small amount, to obtain impurity gettering, and to restore crystallinity below said oxide layer; and removing said oxide layer.

Claim 2

Dependent Claim 140 words

A process for restoring a monocrystalline semiconductor wafer after sustaining crystallinity damage due to dry etching, said process comprising the steps of: performing dry etching on selected portions of a semiconductor wafer with an etching gas mixture which causes crystallinity damage and the formation of a dry etch residue film on said selected portions of said semiconductor wafer; removing said dry etch residue layer from the etched portions and actively forming by the application of energy a continuous oxide layer on said selected etched portions of said semiconductor wafer; rapid thermal annealing said wafer by heating said wafer to a temperature of at least 700° C. for less than 30 seconds to drive said oxide layer down into said wafer a small amount, to obtain impurity gettering, and to restore crystallinity below said oxide layer; and removing said oxide layer.

Claim 3

Dependent Claim 29 words

A process as defined in claim 1, wherein said oxide forming step comprises the step of forming an oxide with a thickness on the order of tens of Angstroms.

Claim 4

Dependent Claim 33 words

A process as defined in claim 1, further comprising a cleaning step after said oxide forming step for removing undesirable metallics and organics from said wafer etched portions prior to rapid thermal annealing.

Claim 5

Dependent Claim 35 words

A process as defined in claim 3, wherein said rapid thermal annealing step comprises the step of heating said wafer to a temperature of on the order of 900°-1200° C. for less than 30 seconds.

Claim 6

Dependent Claim 27 words

A process as defined in claim 1, wherein said oxide removing step is chosen from the group of steps consisting of removing with HF and dry etching.

Claim 7

Dependent Claim 25 words

A process as defined in claim 1, wherein said dry etch residue removing step and said oxide layer forming step are performed in one step.

Claim 8

Dependent Claim 35 words

A process as defined in claim 6, wherein said one step comprises the step of oxygen ashing said wafer to remove said residue film and to form said oxide layer on said selected etched portions.

Claim 9

Dependent Claim 36 words

A process as defined in claim 7, wherein said rapid thermal annealing step comprises the step of heating said wafer to a temperature of on the order of 900° C.-1200° C. for less than 30 seconds.

Claim 10

Dependent Claim 21 words

A process as defined in claim 8, wherein said oxide removing step comprises the step of removing said oxide with HF.

Claim 11

Dependent Claim 34 words

A process as defined in claim 9, further comprising a cleaning step following said oxide layer forming step for removing undesirable metallics and organics on said wafer etched portions prior to rapid thermal annealing.

Claim 12

Dependent Claim 34 words

A process as defined in claim 10, wherein said rapid thermal annealing step comprises the step of annealing said wafer at a temperature of on the order of 1100° C. for approximately 10 seconds.

Claim 13

Dependent Claim 140 words

A process for restoring a monocrystalline silicon wafer after sustaining crystallinity damage due to dry etching, said crystallinity damage underlying a residue film produced on the surface of said wafer by said etching, said process comprising the steps of: performing dry etching on a silicon wafer, thereby causing crystallinity damage and the formation of a residue film on the surface of said wafer; subjecting said wafer to an oxygen ashing treatment to remove said residue film and to form a continuous oxide thereon; rapid thermal annealing said wafer by heating to a temperature of at least 900° C. for on the order of 10 seconds to drive said oxide down into said wafer by a small amount, to getter impurities to the oxide, and restore crystallinity where said damage has occurred; and removing the oxide formed on said wafer surface.

Claim 14

Dependent Claim 140 words

A process for restoring a monocrystalline silicon wafer after sustaining crystallinity damage due to dry etching, said crystallinity damage underlying a residue film produced on the surface of said wafer by said etching, said process comprising the steps of: performing dry etching on a silicon wafer, thereby causing crystallinity damage and the formation of a residue film on the surface of said wafer; subjecting said wafer to an oxygen ashing treatment to remove said residue film and to form a continuous oxide thereon; rapid thermal annealing said wafer by heating to a temperature of at least 900° C. for on the order of 10 seconds to drive said oxide down into said wafer by a small amount, to getter impurities to the oxide, and restore crystallinity where said damage has occurred; and removing the oxide formed on said wafer surface.

Claim 15

Dependent Claim 37 words

A process as defined in claim 12, wherein said rapid thermal annealing step comprises the step of heating said wafer to a temperature of on the order of 1100° C. for on the order of 10 seconds.

Claim 16

Dependent Claim 22 words

A process as defined in claim 12, wherein said oxide removing step comprises the step of dry etching to remove said oxide.

Claim 17

Dependent Claim 29 words

A process as defined in claim 12, wherein said oxide forming step comprises the step of forming an oxide with a thickness on the order of tens of Angstroms.

Claim 18

Dependent Claim 31 words

A process as defined in claim 12, further comprising a cleaning step following said oxygen ashing treatment to remove undesirable metallics and organics from said wafer prior to rapid thermal annealing.

Claim 19

Dependent Claim 25 words

A process as defined in claim 16, wherein said oxide removing step comprises the step of utilizing a solution containing HF to remove said oxide.

Claim 20

Dependent Claim 37 words

A process as defined in claim 17, wherein said rapid thermal annealing step comprises the step of heating said wafer to a temperature of on the order of 1100° C. for on the order of 10 seconds.

Claim 21

Dependent Claim 35 words

A process as defined in claim 18, wherein said cleaning step comprises the steps of: cleaning with an H 2 SO 4 /HNO 3 bath; and cleaning with a hot H 2 SO 4 bath.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1993-01-29	1993-07-31	1994-01-30	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1997-01-29	1997-07-31	1998-01-30	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2001-01-29	2001-07-31	2002-01-30	$7700.00	Window Closed / Lapsed

Post dry-etch cleaning method for restoring wafer properties

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