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US4896936A Expired / Lapsed US ⏱️ 0.0 years remaining

Component mounted to substrate with overlying bridge-shaped supporte

Assignee: British Telecommunications PLC
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Filing: 1989-01-30
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Granted: 1990-01-30
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Expires: 2009-01-30
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Abstract

Abstract The invention relates to the mounting of a movable member such as an optical mirror (3) by bridges (4-7) between a pair of supports (1,2). The supports (1,2), bridges (4-7) and mirror (3) are integrally formed from a silicon substrate. A pair of electrically conductive paths (8,9) are formed by doping or metallising portions of the assembly so that by passing controlled currents through the paths, thermal expansion of parts of the paths will cause deflection of the mirror (3). The assembly is particularly useful for deflecting optical beams.

Inventors

  • 👤 Ian W. Stanley

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 14:20
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/14; H01S5/141; G; G01; G01D; G01D5/00; G01D5/26; G01D5/266; G01J; G01J3/00; G01J3/12; G01J3/26; G02; G02B; G02B26/00; G02B26/001; G02B6/00; G02B6/24; G02B6/26; G02B6/28; G02B6/2804; G02B6/2817; G02B6/32; G02B6/36; G02B6/38; G02B6/3801; G02B6/3803; G02B6/42; G02B6/4201; G02B6/4219; G02B6/4228; G02B6/423; G02B6/293; G02B6/29346; G02B6/29358; G02B6/35; G02B6/351; G02B6/3512; G02B6/3516; G02B6/3564; G02B6/3568; G02B6/357; H01S3/00; H01S3/10; H01S3/105; H01S3/1055; Y; Y10; Y10S; Y10S359/00; Y10S359/90

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 57 words
In combination: a component secured to the lower side of a bridge-shaped support, at least one of the support and the substrate including locator means for locating the support in at least one direction relatively to the substrate, said support and component being secured to a substrate with the component located between the support and the substrate.
Claim 2
Dependent Claim 57 words
In combination: a component secured to the lower side of a bridge-shaped support, at least one of the support and the substrate including locator means for locating the support in at least one direction relatively to the substrate, said support and component being secured to a substrate with the component located between the support and the substrate.
Claim 3
Dependent Claim 20 words
A combination according to claim 1, wherein the locator means locates the support in two directions relatively to the substrate.
Claim 4
Dependent Claim 20 words
A combination according to claim 2, wherein the support and the substrate have complementary locating positions constituting the locator means.
Claim 5
Dependent Claim 15 words
A combination according to claim 3, wherein the locating portions comprise complementary ridges and recesses.
Claim 6
Dependent Claim 17 words
A combination according to claim 4, wherein the locating portions comprise complementary V-shaped ridges and V-shaped recesses.
Claim 7
Dependent Claim 17 words
A combination according to any of claims 2 to 5, wherein the component comprises an optical component.
Claim 8
Dependent Claim 18 words
A component according to claim 6, wherein the component comprises a laser chip or an optical sensor chip.
Claim 9
Dependent Claim 23 words
A combination according to any of claims 2 to 5, wherein one or both of the substrate and support comprise a single crystal.
Claim 10
Dependent Claim 16 words
A combination according to claim 8, wherein one or both the substrate and support comprise silicon.
Claim 11
Dependent Claim 17 words
A combination according to any of claims 2 to 5, wherein the support is a bridge-like structure.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-01-29 1993-07-31 1994-01-30 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-01-29 1997-07-31 1998-01-30 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-01-29 2001-07-31 2002-01-30 $7700.00 Window Closed / Lapsed

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