US4883744A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Forming a polymide pattern on a substrate
Assignee: International Business Machines Corp
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Filing: 1988-05-17
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Granted: 1989-11-28
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Expires: 2008-05-17
Abstract
Abstract A polyimide pattern is formed on a substrate by providing a layer of photosensitive polyimide precursor containing the polyimide precursor and a compound having a photosensitive group on the substrate and prebaking the layer. The layer is then exposed imagewise to actinic radiation through a photomask to form an exposed image pattern of the polyimide precursor in the layer. The unexposed areas of the layer are removed using a liquid developer and the exposed image pattern is cured by heating. In one aspect of the present invention, the prebaking step employs a judicious selection of times and temperature to eliminate the problem of formation of a white residue that occurs from using prior art prebake procedures. In another aspect of the present invention, a particular liquid developer composition is employed to facilitate the formation of sloped vias in the polyimide. In another aspect of the present invention, a particular range of exposure wavelength(s) is employed to obtain smooth walled vias.
Inventors
- 👤 Natalie B. Feilchenfeld
- 👤 Stephen J. Fuerniss
- 👤 John J. Glenning
- 👤 Walter P. Pawlowski
- 👤 Giana M. Phelan
- 👤 Paul G. Rickerl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:26
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0387; G03F7/16; G03F7/168; G03F7/26; G03F7/30; G03F7/32
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
151 words
A process of forming a polyimide pattern on a substrate which comprises: (a) providing on the substrate a layer of photosensitive polyimide precursor comprising a polyimide precursor and a compound having a photosensitive group; (b) prebaking the layer of photosensitive polyimide precursor by placing the layer in an oven and ramping up the temperature of the oven to about 90° C. and maintaining at about 90° C. for up to about 2 minutes, then ramping down to about 80° C. and maintaining about 80° C. for about 90 minutes to 150 minutes and cooling down to at least about 60° C.; (c) exposing said layer imagewise to actinic radiation through a photomask to form an exposed image pattern of polyimide precursor in the layer; (d) removing unexposed areas of the layer with a liquid developer; and (e) curing the exposed image pattern of the polyimide precursor in the layer by heating.
Claim 2
Dependent Claim
151 words
A process of forming a polyimide pattern on a substrate which comprises: (a) providing on the substrate a layer of photosensitive polyimide precursor comprising a polyimide precursor and a compound having a photosensitive group; (b) prebaking the layer of photosensitive polyimide precursor by placing the layer in an oven and ramping up the temperature of the oven to about 90° C. and maintaining at about 90° C. for up to about 2 minutes, then ramping down to about 80° C. and maintaining about 80° C. for about 90 minutes to 150 minutes and cooling down to at least about 60° C.; (c) exposing said layer imagewise to actinic radiation through a photomask to form an exposed image pattern of polyimide precursor in the layer; (d) removing unexposed areas of the layer with a liquid developer; and (e) curing the exposed image pattern of the polyimide precursor in the layer by heating.
Claim 3
Dependent Claim
37 words
The process of claim 1 wherein said liquid developer contains about 50-75% by volume of N-methyl-2-pyrrolidone; about 5-10% by volume of water; about 1-4% by volume of isopropyl alcohol; and about 15-40% by volume of methyl alcohol.
Claim 4
Dependent Claim
17 words
The process of claim 1 wherein the polyimide precursor composition is applied as a solution in N-methyl-2-pyrrolidone.
Claim 5
Dependent Claim
18 words
The process of claim 1 wherein the solution has a viscosity of about 10 to about 16 poise.
Claim 6
Dependent Claim
22 words
The process of claim 1 wherein the final thickness of the layer of photosensitive polyimide is about 5 to about 20 micrometers.
Claim 7
Dependent Claim
22 words
The process of claim 1 wherein the final thickness of the layer of photosensitive polyimide is about 8 to about 10 micrometers.
Claim 8
Dependent Claim
27 words
The process of claim 1 wherein said layer is cooled down to at least about 60° C. at a rate of about 2 to about 4° C./minute.
Claim 9
Dependent Claim
22 words
The process of claim 1 wherein the temperature is maintained at about 90° C. for about 15 seconds to about 2 minutes.
Claim 10
Dependent Claim
41 words
The process of claim 8 wherein the oven is at a temperature of about 60° C. for about 10 minutes prior to the ramping up to about 90° C. and wherein said ramping is at a rate of about 6° C./minute.
Claim 11
Dependent Claim
21 words
The process of claim 9 wherein the ramping down to about 80° C. is at a rate of about 1° C./minute.
Claim 12
Dependent Claim
28 words
The process of claim 10 wherein the layer is cooled down to at least about 60° C. at a rate of about ° C./minute to about 4° C./minute.
Claim 13
Dependent Claim
33 words
The process of claim 1 wherein said layer is exposed to actinic radiation having a wavelength of 365 nm to 436 nm at an energy level of about 150 to about 350 mj/cm2.
Claim 14
Dependent Claim
22 words
The process of claim 12 wherein said radiation is 436 nm and said energy level is about 250 to about 350 mj/cm2.
Claim 15
Dependent Claim
129 words
A process of forming a polyimide pattern on a substrate wherein the pattern includes sloped wall vias with sidewall profile of less than 70° from the horizontal which comprises: (a) providing on the substrate a layer of photosensitive polyimide precursor comprising a polyimide precursor and a compound having a photosensitive group; (b) prebaking the layer of photosensitive polyimide precursor; (c) exposing said layer imagewise to actinic radiation through a photomask to form an exposed image pattern of polyimide precursor in the layer; (d) removing unexposed areas of the layer with a liquid developer containing about 50-75% by volume of N-methyl-2-pyrrolidone; about 5-10% by volume of water; about 1-4% by volume of methyl alcohol; and (e) curing the exposed image pattern of the polyimide precursor in the layer by heating.
Claim 16
Dependent Claim
129 words
A process of forming a polyimide pattern on a substrate wherein the pattern includes sloped wall vias with sidewall profile of less than 70° from the horizontal which comprises: (a) providing on the substrate a layer of photosensitive polyimide precursor comprising a polyimide precursor and a compound having a photosensitive group; (b) prebaking the layer of photosensitive polyimide precursor; (c) exposing said layer imagewise to actinic radiation through a photomask to form an exposed image pattern of polyimide precursor in the layer; (d) removing unexposed areas of the layer with a liquid developer containing about 50-75% by volume of N-methyl-2-pyrrolidone; about 5-10% by volume of water; about 1-4% by volume of methyl alcohol; and (e) curing the exposed image pattern of the polyimide precursor in the layer by heating.
Claim 17
Dependent Claim
22 words
The process of claim 14 wherein the final thickness of the layer of photosensitive polyimide is about 5 to about 20 micrometers.
Claim 18
Dependent Claim
22 words
The process of claim 14 wherein the final thickness of the layer of photosensitive polyimide is about 8 to about 10 micrometers.
Claim 19
Dependent Claim
17 words
The process of claim 14 wherein the polyimide precursor composition is applied as a solution in N-methyl-2-pyrrolidone.
Claim 20
Dependent Claim
18 words
The process of claim 17 wherein the solution has a viscosity of about 10 to about 16 poise.
Claim 21
Dependent Claim
36 words
The process of claim 14 wherein said developer contains about 62.3% by volume of N-methyl-2pyrrolidone; about 8.9% by volume of water; about 2.7% by volume of isopropyl alcohol; and about 26.1% by volume of methyl alcohol.
Claim 22
Dependent Claim
33 words
The process of claim 14 wherein said layer is exposed to actinic radiation having a wavelength of 365 nm to 436 nm at an energy level of about 150 to about 350 mj/cm2.
Claim 23
Dependent Claim
22 words
The process of claim 20 wherein said radiation is 436 nm and said energy level is about 250 to about 350 mj/cm2.
References Cited (Backward Citations)
US4243743A
Cited
US4411983A
Cited
US4287297A
Cited
US4576892A
Cited
US4369090A
Cited
US4353778A
Cited
US4431478A
Cited
US4547455A
Cited
US4587197A
Cited
US4661435A
Cited
US4578328A
Cited
US4624740A
Cited
US4639290A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-11-27 | 1993-05-29 | 1993-11-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-11-27 | 1997-05-29 | 1997-11-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-11-27 | 2001-05-29 | 2001-11-28 | $7700.00 | Window Closed / Lapsed |