US4624740A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Tailoring of via-hole sidewall slope
Assignee: International Business Machines Corp
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Filing: 1985-01-22
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Granted: 1986-11-25
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Expires: 2005-01-22
Abstract
Abstract A method of selectively tailoring the slope of via hole sidewalls. A first polyimide layer (in which the vias are to be formed) is covered by a strippable layer, and the two layers are isotropically etched. By varying the thickness of the strippable layer with respect to that of the polyimide layer, the slope of the via hole sidewalls can be controlled.
Inventors
- 👤 Allan D. Abrams
- 👤 Robert C. Bausmith
- 👤 Karey L. Holland
- 👤 Steven P. Holland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:14
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; H10P50/282; H10P50/283; Y; Y10; Y10S; Y10S438/00; Y10S438/978
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
202 words
A method of forming via holes with sidewalls having a predetermined slope in a first polyimide layer having a first thickness, comprising the steps of: forming a partially cured second polyimide layer of a second thickness on said first polyimide layer; forming a first mask layer on said second polyimide layer; etching apertures in said first mask layer by exposing photolithographically defined regions of said first mask layer to a first etchant which does not appreciably etch said second polyimide layer; isotropically etching apertures in both of said second polyimide layer and said first polyimide layer through said apertures in said first mask layer by exposure to an O2 plasma which does not etch said first mask layer, said second polyimide layer and said first polyimide layer being etched at substantially the same rate, the slope of the sidewalls of the via holes etched in said first polyimide layer being a function of said thickness of the second polyimide layer with respect to said thickness of said first polyimide layer; removing said first mask layer by exposure to said first etchant; and removing said second polyimide layer by exposure to a wet etchant which does not appreciably etch said first polyimide layer.
Claim 2
Independent Claim
202 words
A method of forming via holes with sidewalls having a predetermined slope in a first polyimide layer having a first thickness, comprising the steps of: forming a partially cured second polyimide layer of a second thickness on said first polyimide layer; forming a first mask layer on said second polyimide layer; etching apertures in said first mask layer by exposing photolithographically defined regions of said first mask layer to a first etchant which does not appreciably etch said second polyimide layer; isotropically etching apertures in both of said second polyimide layer and said first polyimide layer through said apertures in said first mask layer by exposure to an O2 plasma which does not etch said first mask layer, said second polyimide layer and said first polyimide layer being etched at substantially the same rate, the slope of the sidewalls of the via holes etched in said first polyimide layer being a function of said thickness of the second polyimide layer with respect to said thickness of said first polyimide layer; removing said first mask layer by exposure to said first etchant; and removing said second polyimide layer by exposure to a wet etchant which does not appreciably etch said first polyimide layer.
Claim 3
Dependent Claim
22 words
The method as recited in claim 1, wherein said second polyimide layer is cured at approximately 120° C. for approximately 20 minutes.
Claim 4
Dependent Claim
67 words
The method as recited in claim 1, wherein said step of etching apertures in said first mask layer comprises the steps of: forming a second mask layer on said first mask layer; patterning said second mask layer to expose regions of said first mask layer; and etching said first mask layer through said second mask layer by exposure to a plasma gas comprised of tetrafluoromethane and oxygen.
Claim 5
Dependent Claim
18 words
The method as recited in claim 3, wherein said first mask layer is comprised of a silicon-rich photoresist.
Claim 6
Dependent Claim
20 words
The method as recited in claim 3, wherein said first mask layer comprises a thin layer of a transparent material.
Claim 7
Dependent Claim
16 words
The method as recited in claim 5, wherein said first mask layer is comprised of silicon.
Claim 8
Dependent Claim
28 words
The method as recited in claim 5, wherein said first mask layer is comprised of a compound selected from the group consisting of borosilicate glass and phosphosilicate glass.
Claim 9
Dependent Claim
29 words
The method as recited in claim 3, wherein said second mask layer is substantially removed during said isotropic etch of said second polyimide layer and said first polyimide layer.
Claim 10
Dependent Claim
16 words
The method as recited in claim 1, wherein said mask layer comprises a layer of silicon.
Claim 11
Dependent Claim
14 words
The method as recited in claim 1, wherein said wet etchant comprises N-methyl pyrrolidinone.
Claim 12
Independent Claim
218 words
A method of forming vias having sidewalls of a controllable slope in a fully cured polyimide layer of a first thickness coated on a processed semiconductor substrate, comprising the steps of: forming a partially cured polyimide layer of a second thickness on said fully cured polyimide layer; forming a transparent masking material on said partially cured polyimide layer; photolithographically defined openings in said transparent masking material by exposure to a CF 4 +O 2 reactive ion etch which does not appreciably attack said partially cured polyimide layer; isotropically etching said partially cured polyimide layer and said fully cured polyimide layer, through said openings in said transparent masking material, in an O 2 , plasma etch that does not appreciably attack said transparent masking material, said partially cured and fully cured polyimide layers being etched at substantially the same rate, said isotropic etch forming vias in said fully cured polyimide layers having sidewalls of a slope determined as a function of said first and second thicknesses of said fully cured polyimide layer and said partially cured polyimide layer, respectively; removing said transparent masking material in an etchant that does not appreciably attack said partially cured polyimide layer; and removing said partially cured polyimide layer by exposure to a wet etchant which does not appreciably attack said first polyimide layer.
Claim 13
Independent Claim
218 words
A method of forming vias having sidewalls of a controllable slope in a fully cured polyimide layer of a first thickness coated on a processed semiconductor substrate, comprising the steps of: forming a partially cured polyimide layer of a second thickness on said fully cured polyimide layer; forming a transparent masking material on said partially cured polyimide layer; photolithographically defined openings in said transparent masking material by exposure to a CF 4 +O 2 reactive ion etch which does not appreciably attack said partially cured polyimide layer; isotropically etching said partially cured polyimide layer and said fully cured polyimide layer, through said openings in said transparent masking material, in an O 2 , plasma etch that does not appreciably attack said transparent masking material, said partially cured and fully cured polyimide layers being etched at substantially the same rate, said isotropic etch forming vias in said fully cured polyimide layers having sidewalls of a slope determined as a function of said first and second thicknesses of said fully cured polyimide layer and said partially cured polyimide layer, respectively; removing said transparent masking material in an etchant that does not appreciably attack said partially cured polyimide layer; and removing said partially cured polyimide layer by exposure to a wet etchant which does not appreciably attack said first polyimide layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-11-24 | 1990-05-26 | 1990-11-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-11-24 | 1994-05-26 | 1994-11-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-11-24 | 1998-05-26 | 1998-11-25 | $7700.00 | Window Closed / Lapsed |