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US4587197A Expired / Lapsed US ⏱️ 0.0 years remaining

Flexible photosensitive polymer composition with azide and/or amine compound, poly(amic acid) and highly polar compound with boiling point above 150° C.

Assignee: Hitachi Ltd
•
Filing: 1984-02-08
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Granted: 1986-05-06
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Expires: 2004-02-08
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Abstract

Abstract A photosensitive polymer composition comprising (A) a poly(amic acid), (B) a compound or a mixture of compounds which can form a compound having two or more amino groups in the molecule, and (C) at least one compound having a boiling point of 150° C. or higher at atmospheric pressure and selected from the group consisting of ##STR1## wherein R a , R b , R c , m and n are as defined in the specification, has good properties and does not produce cracks on a pattern at the time of development obtained from said composition.

Inventors

  • 👤 Mithumasa Kojima
  • 👤 Fumio Kataoka
  • 👤 Fusaji Shoji
  • 👤 Hitoshi Yokono

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 03:36
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0387; C; C08; C08L; C08L79/00; C08L79/04; C08L79/08; G03F7/008; G03F7/012; G03F7/0125; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/12; Y10S430/128

Claims Analysis

Total Claims: 15
Claim 1
Independent Claim 208 words
A photosensitive polymer composition comprising an admixture of: (A) 100 parts by weight of a poly(amic acid), (B) a compound or a mixture of compounds which is photosensitive and which can form a compound having two or more amino groups by irradiation with light selected from the group consisting of (i) a mixture of at least one bisazide in an amount of 0.1 to 100 parts by weight and at least one amine having at least one group of the formula: >C=C< in an amount of 1 to 400 parts by weight and (ii) 1 to 100 parts by weight of at least one amine compound having an aromatic azido group or an aromatic sulfonylazido group, and (C) 1 to 50 parts by weight of at least one compound with high polarity, having a boiling point of 150° C. or higher under atmospheric pressure and not reacting with any other component of the composition, and being selected from the group consisting of compounds of the formula: ##STR20## R b and R c are independently hydrogen, a lower alkyl group or an acetyl group; and m is an integer of 1 to 10, and compounds of the formula: ##STR21## wherein R b and R c are as defined above.
Claim 2
Dependent Claim 208 words
A photosensitive polymer composition comprising an admixture of: (A) 100 parts by weight of a poly(amic acid), (B) a compound or a mixture of compounds which is photosensitive and which can form a compound having two or more amino groups by irradiation with light selected from the group consisting of (i) a mixture of at least one bisazide in an amount of 0.1 to 100 parts by weight and at least one amine having at least one group of the formula: >C=C< in an amount of 1 to 400 parts by weight and (ii) 1 to 100 parts by weight of at least one amine compound having an aromatic azido group or an aromatic sulfonylazido group, and (C) 1 to 50 parts by weight of at least one compound with high polarity, having a boiling point of 150° C. or higher under atmospheric pressure and not reacting with any other component of the composition, and being selected from the group consisting of compounds of the formula: ##STR20## R b and R c are independently hydrogen, a lower alkyl group or an acetyl group; and m is an integer of 1 to 10, and compounds of the formula: ##STR21## wherein R b and R c are as defined above.
Claim 3
Dependent Claim 52 words
A composition according to claim 1, wherein the component (B) is a mixture of at least one bisazide in an amount of 0.1 to 100 parts by weight and at least one amine having at least one group of the formula: >C=C< in an amount of 1 to 400 parts by weight.
Claim 4
Dependent Claim 24 words
A composition according to claim 1, wherein the component (C) is at least one compound selected from the group consisting of triethylene glycol ##STR22##
Claim 5
Dependent Claim 27 words
A composition according to claim 1, wherein the poly(amic acid) has a repeating unit of the formula: ##STR23## and n is an integer of 1 or 2.
Claim 6
Dependent Claim 21 words
A composition according to claim 1, wherein the bisazide is at least one compound selected from the group consisting of ##STR24##
Claim 7
Dependent Claim 21 words
A composition according to claim 1, wherein the amine is at least one member selected from the group consisting of ##STR25##
Claim 8
Dependent Claim 36 words
A composition according to claim 1, wherein the component (B) is at least one amine compound having an aromatic azido group or an aromatic sulfonylazido group in an amount of 1 to 100 parts by weight.
Claim 9
Dependent Claim 24 words
A composition according to claim 7, wherein the component (C) is at least one compound selected from the group consisting of triethylene glycol ##STR26##
Claim 10
Dependent Claim 27 words
A composition according to claim 7, wherein the poly(amic acid) has a repeating unit of the formula: ##STR27## and n is an integer of 1 or 2.
Claim 11
Dependent Claim 22 words
A composition according to claim 7, wherein the amine compound is at least one member selected from the group consisting of ##STR28##
Claim 12
Dependent Claim 31 words
A composition according to claim 2, wherein the component (C) is at least one compound selected from the group consisting of triethylene glycol, tetraethylene glycol, glycerin, and tetraethylene glycol dimethyl ether.
Claim 13
Dependent Claim 27 words
A composition according to claim 2, wherein the poly(amic acid) has a repeating unit of the formula: ##STR29## and n is an integer of 1 or 2.
Claim 14
Dependent Claim 21 words
A composition according to claim 2, wherein the bisazide is at least one compound selected from the group consisting of ##STR30##
Claim 15
Dependent Claim 21 words
A composition according to claim 2, wherein the amine is at least one member selected from the group consisting of ##STR31##

References Cited (Backward Citations)

US2990281A Cited
US4254197A Cited
US4107391A Cited
US4148654A Cited
US4268601A Cited
US4216019A Cited
US4356247A Cited
US4451551A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-05-05 1989-11-04 1990-05-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-05-05 1993-11-04 1994-05-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-05-05 1997-11-04 1998-05-06 $7700.00 Window Closed / Lapsed

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