US4254197A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process of forming photoresist layer on a glass substrate
Assignee: Hitachi Ltd
•
Filing: 1978-12-18
•
Granted: 1981-03-03
•
Expires: 1998-12-18
Abstract
Abstract When a low molecular weight dihydric or trihydric alcohol is added to a photoresist composition comprising a water-soluble polymer substance and a bisazide photo-crosslinking agent, the fluidity of the composition is improved and the drying speed is moderately retarded and it enables the formation of a photoresist layer having a uniform film thickness and uniform drying degree. The said alcohol is exemplified by ethylene glycol, glycerol, etc. and is preferably added in an amount of 5-300 parts by weight per 100 parts by weight of the water-soluble polymer substance.
Inventors
- 👤 Kiyoshi Miura
- 👤 Naomitsu Watanabe
- 👤 Yoshifumi Tomita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:35
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; G03F7/0085; G03F7/085
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
150 words
In a process for forming a photosensitive photoresist layer on a glass substrate in which a photoresist composition is coated on said substrate, said substrate is rotated so that said photoresist composition is distributed on said substrate uniformly and said composition is thereafter allowed to dry, the improvement wherein said photoresist composition comprises an aqueous solution containing water, a bisazide photo-crosslinking agent, a water-soluble polymeric substance capable of being photo-crosslinked by said bisazide photo-crosslinking agent, and a dihydric alcohol having a molecular weight of 60 to 110 in an amount sufficient to increase the fluidity of said composition and retard the drying rate of water from said composition so that the photoresist layer formed by coating said composition onto a substrate and drying has a uniform film thickness; said composition containing 5 to 300 parts by weight of said alcohol per 100 parts by weight of said water-soluble polymeric substance.
Claim 2
Dependent Claim
150 words
In a process for forming a photosensitive photoresist layer on a glass substrate in which a photoresist composition is coated on said substrate, said substrate is rotated so that said photoresist composition is distributed on said substrate uniformly and said composition is thereafter allowed to dry, the improvement wherein said photoresist composition comprises an aqueous solution containing water, a bisazide photo-crosslinking agent, a water-soluble polymeric substance capable of being photo-crosslinked by said bisazide photo-crosslinking agent, and a dihydric alcohol having a molecular weight of 60 to 110 in an amount sufficient to increase the fluidity of said composition and retard the drying rate of water from said composition so that the photoresist layer formed by coating said composition onto a substrate and drying has a uniform film thickness; said composition containing 5 to 300 parts by weight of said alcohol per 100 parts by weight of said water-soluble polymeric substance.
Claim 3
Dependent Claim
18 words
A process according to claim 1, wherein the substrate is the front panel of a color television receiver.
Claim 4
Dependent Claim
13 words
A process according to claim 1, wherein the dihydric alcohol is ethylene glycol.
Claim 5
Dependent Claim
13 words
A process according to claim 1, wherein the dihydric alcohol is propylene glycol.
Claim 6
Dependent Claim
13 words
A process according to claim 1, wherein the dihydric alcohol is 1,3-butylene glycol.
Claim 7
Dependent Claim
13 words
A process according to claim 1, wherein the dihydric alcohol is diethylene glycol.
Claim 8
Dependent Claim
12 words
A process according to claim 1, wherein the dihydric alcohol is 1,5-pentanediol.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-03-02 | 1984-09-01 | 1985-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-03-02 | 1988-09-01 | 1989-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-03-02 | 1992-09-01 | 1993-03-03 | $7700.00 | Window Closed / Lapsed |