Group III-V compound field effect transistor with diffusion barrier

Claim 2

A field effect transistor comprising a body having at least a surface layer which is semi-insulating, characterized by a low-doped Group III-V compound epitaxial channel layer disposed on the semi-insulating surface layer, a highly-doped Group III-V compound epitaxial contact-facilitating layer, a low-doped Group III-V compound epitaxial barrier layer disposed between said channel and contact-facilitating layers and being sufficiently thick so as to prevent dopant impurities from diffusing from the latter into the former, said channel layer having a bandgap not less than that of said contact-facilitating layer and said barrier layer, means forming source and drain contacts to said contact-facilitating layer, and gate electrode means for controlling the flow of current in said channel and between said source and drain contacts.

Claim 3

The transistor of claim 1 wherein said channel layer comprises a material selected from the group consisting of InP, InGaAs, and AlInAs,

Claim 4

The transistor of claim 2 wherein said material is an In-based Group III-V compound and said contact-facilitating layer and said barrier layer comprise InGaAs.

Claim 5

The transistor of claim 3 wherein said channel layer comprises InGaAs and further including an InP layer disposed between said barrier layer and said channel layer.

Claim 6

The transistor of claim 4 wherein said InP layer is so disposed only in the regions thereof under said source and drain contacts.

Claim 7

A field effect transistor comprising a body having at least a surface layer which is semi-insulating, characterized by a low-doped In-based Group III-V compound epitaxial channel layer disposed on the semi-insulating surface layer, a highly-doped In-based Group III-V compound epitaxial contact-facilitating layer, a low-doped In-based Group III-V compound epitaxial barrier layer disposed between said channel and contact-facilitating layers and being sufficiently thick so as to prevent dopant impurities from diffusing from the latter into the former, said channel layer having a bandgap not less than that of said contact-facilitating layer and said barrier layer, means forming source and drain contacts to said contact-facilitating layer, and gate electrode means for controlling the flow of current in said channel and between said source and drain contacts.

Claim 8

A field effect transistor comprising a body having at least a surface layer which is semi-insulating, characterized by a low-doped In-based Group III-V compound epitaxial channel layer disposed on the semi-insulating surface layer, a highly-doped In-based Group III-V compound epitaxial contact-facilitating layer, a low-doped In-based Group III-V compound epitaxial barrier layer disposed between said channel and contact-facilitating layers and being sufficiently thick so as to prevent dopant impurities from diffusing from the latter into the former, said channel layer having a bandgap not less than that of said contact-facilitating layer and said barrier layer, means forming source and drain contacts to said contact-facilitating layer, and gate electrode means for controlling the flow of current in said channel and between said source and drain contacts.

Claim 9

The transistor of claim 6 wherein said channel layer comprises a material selected from the group consisting of InP, InGaAs and AlInAs.

Claim 10

The transistor of claim 7 wherein said contact-facilitating layer and said barrier layer comprise InGaAs.

Claim 11

The transistor of claim 8 wherein said channel layer comprises InGaAs and further including an InP layer disposed between said barrier layer and said channel layer.

Claim 12

A field effect transistor comprising a body having at least a surface layer which is semi-insulating, characterized by a low-doped InP-based epitaxial channel layer disposed on the semi-insulating surface layer, a highly-doped InGaAs-based epitaxial contact-facilitating layer, a low-doped InGaAs-based epitaxial barrier layer disposed between said channel and contact-facilitating layers and being sufficiently thick so as to prevent dopant impurities from diffusing from the latter into the former, means forming source and drain contacts to said contact-facilitating layer, and gate electrode means for controlling the flow of current in said channel and between said source and drain contacts.

Claim 13

A field effect transistor comprising a body having at least a surface layer which is semi-insulating, characterized by a low-doped InP-based epitaxial channel layer disposed on the semi-insulating surface layer, a highly-doped InGaAs-based epitaxial contact-facilitating layer, a low-doped InGaAs-based epitaxial barrier layer disposed between said channel and contact-facilitating layers and being sufficiently thick so as to prevent dopant impurities from diffusing from the latter into the former, means forming source and drain contacts to said contact-facilitating layer, and gate electrode means for controlling the flow of current in said channel and between said source and drain contacts.

Claim 14

The transistor of claim 10 wherein said gate electrode means include a groove formed in said InGaAs-based layers which exposes a portion of said channel layer, a dielectric layer disposed on at least said portion and a metal layer disposed on said dielectric layer.

Claim 15

The transistor of claim 11 wherein said contact-facilitating means includes an ohmic metal contact to said contact-facilitating layer on each side of said groove.

Claim 16

The transistor of claims 10, 11 or 12, wherein said channel and barrier layers have a carrier concentration of ≲10 15 cm -3 .

Claim 17

An enhancement mode field effect transistor comprising an InP single crystal body having at least a surface layer which is semi-insulating, an unintentionally doped InP epitaxial channel layer having a carrier concentration of ≲10 15 cm -3 disposed on said surface layer, a highly doped n-type In 0 .53 Ga 0 .47 As epitaxial contact-facilitating layer, an unintentionally doped In 0 .53 Ga 0 .47 As epitaxial barrier layer having a carrier concentration of ≲10 15 cm -3 disposed between said channel layer and said contact-facilitating layer and being sufficiently thick so as to prevent dopant impurities from diffusing from the latter into the former, said In 0 .53 Ga 0 .47 as layers having a groove extending therethrough and exposing a portion of said channel layer, source and drain ohmic contacts diposed on said contact-facilitating layer on opposite sides of said groove, a SiO 2 layer disposed on at least said portion, and a gate metal electrode disposed on said SiO 2 layer for controlling the flow of current between said source and drain contacts.

Claim 18

An enhancement mode field effect transistor comprising an InP single crystal body having at least a surface layer which is semi-insulating, an unintentionally doped InP epitaxial channel layer having a carrier concentration of ≲10 15 cm -3 disposed on said surface layer, a highly doped n-type In 0 .53 Ga 0 .47 As epitaxial contact-facilitating layer, an unintentionally doped In 0 .53 Ga 0 .47 As epitaxial barrier layer having a carrier concentration of ≲10 15 cm -3 disposed between said channel layer and said contact-facilitating layer and being sufficiently thick so as to prevent dopant impurities from diffusing from the latter into the former, said In 0 .53 Ga 0 .47 as layers having a groove extending therethrough and exposing a portion of said channel layer, source and drain ohmic contacts diposed on said contact-facilitating layer on opposite sides of said groove, a SiO 2 layer disposed on at least said portion, and a gate metal electrode disposed on said SiO 2 layer for controlling the flow of current between said source and drain contacts.