Patent US4871644A successfully refreshed from Google Patents.
US4871644A
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Photoresist compositions with a bis-benzotriazole
Assignee: OCG Microelectronic Materials Inc
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Filing: 1987-09-22
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Granted: 1989-10-03
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Expires: 2007-09-22
Abstract
Abstract Photoresist compositions which operate positively and contain at least one ocmpound of the formula I ##STR1## in which X is --C n H 2n --, --O--, --S-- or --C(O)--, n being a number from 1 to 6. These compositions are particularly suitable for use as positively-operating copying lacquers.
Inventors
- 👤 Sigrid Bauer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/0226
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
75 words
A photoresist composition which operates positively and comprises a mixture of a light sensitive o-quinone diazide compound present in sufficient amount to produce a positive resist image, and of from 1 to 15 percent by weight, based on the total solids in the compositions, of at least one compound of the formula I ##STR3## in which X is --C n H 2n --, --O--, --S-- or --C(O)--, n being a number from 1 to 6.
Claim 2
Dependent Claim
75 words
A photoresist composition which operates positively and comprises a mixture of a light sensitive o-quinone diazide compound present in sufficient amount to produce a positive resist image, and of from 1 to 15 percent by weight, based on the total solids in the compositions, of at least one compound of the formula I ##STR3## in which X is --C n H 2n --, --O--, --S-- or --C(O)--, n being a number from 1 to 6.
Claim 3
Dependent Claim
19 words
A composition according to claim 1, in which X in the formula I is --C n H 2n --.
Claim 4
Dependent Claim
13 words
A composition according to claim 2, in which X is --CH 2 --.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-02 | 1993-04-03 | 1993-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-02 | 1997-04-03 | 1997-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-02 | 2001-04-03 | 2001-10-03 | $7700.00 | Window Closed / Lapsed |