US4059449A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photoresist containing a thiodipropionate compound
Assignee: RCA Corp
•
Filing: 1976-09-30
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Granted: 1977-11-22
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Expires: 1996-09-30
Abstract
Abstract This invention relates to a photoresist consisting of a novolak resin and a sensitizer containing a thiodipropionate compound.
Inventors
- 👤 Thomas Francis Rosenkranz
- 👤 Richard Joseph Himics
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/0226
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
66 words
A photoresist composition comprising: a. an alkali-soluble novolak resin b. a naphthoquinone-(1,2)-diazide sulfonic acid ester sensitizer; and c. a thiodipropionate compound of the formula ##STR6## wherein R is an alkyl or alkenyl group having 6 to 24 carbon atoms and wherein the relative proportion of the thiodipropionate compound is from about 0.5 to 15 parts by weight per 100 parts by weight of the novolak resin.
Claim 2
Dependent Claim
66 words
A photoresist composition comprising: a. an alkali-soluble novolak resin b. a naphthoquinone-(1,2)-diazide sulfonic acid ester sensitizer; and c. a thiodipropionate compound of the formula ##STR6## wherein R is an alkyl or alkenyl group having 6 to 24 carbon atoms and wherein the relative proportion of the thiodipropionate compound is from about 0.5 to 15 parts by weight per 100 parts by weight of the novolak resin.
Claim 3
Dependent Claim
16 words
A composition according to claim 1 wherein the novolak resin is prepared from cresol and formaldehyde.
Claim 4
Dependent Claim
11 words
A composition according to claim 1 wherein the sensitizer is 2,4-bis(6-diazo-5,6-dihydro-5-oxo-1-naphthalenesulfonyloxy)benzophenone.
Claim 5
Dependent Claim
28 words
A composition according to claim 1 wherein the sensitizer is a mixture of a diester diazide of the structure ##STR7## in admixture with corresponding monoester and triester byproducts.
Claim 6
Dependent Claim
29 words
A composition according to claim 1 wherein the relative proportion of the sensitizer is from about 1 to 50% of the combined weight of the sensitizer and novolak resin.
Claim 7
Dependent Claim
29 words
A composition according to claim 1 wherein the relative proportion of the sensitizer is from about 1 to 25% of the combined weight of the sensitizer and novolak resin.
Claim 8
Dependent Claim
22 words
A composition according to claim 1 wherein the thiodipropionate compound wherein R is an alkyl group having 12 to 16 carbon atoms.
Claim 9
Dependent Claim
13 words
A composition according to claim 1 wherein the thiodipropionate compound is dilauryl thiodipropionate.
Claim 10
Dependent Claim
29 words
A composition according to claim 1 wherein the relative proportion of the thiodipropionate compound is about 7.5 parts by weight per 100 parts by weight of the novolak resin.
Claim 11
Dependent Claim
15 words
A composition according to claim 1 wherein the composition further comprises a hindered phenolic antioxidant.
Claim 12
Dependent Claim
15 words
A composition according to claim 10 wherein the hindered phenolic has the following formula: ##STR8##
Claim 13
Dependent Claim
33 words
A composition according to claim 10 wherein the relative proportion of the hindered phenolic is from about 25 parts to 150 parts by weight per 100 parts by weight of the thiodipropionate compound.
Claim 14
Dependent Claim
25 words
A composition according to claim 10 wherein the hindered phenolic is about 100 parts by weight per 100 parts by weight of the thiodipropionate compound.
References Cited (Backward Citations)
US3046111A
Cited
US3440212A
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US3644282A
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US3773723A
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US3950173A
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US3933885A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-11-21 | 1981-05-23 | 1981-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-11-21 | 1985-05-23 | 1985-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-11-21 | 1989-05-23 | 1989-11-22 | $7700.00 | Window Closed / Lapsed |