Patent US4863576A successfully refreshed from Google Patents.
US4863576A
Expired / Lapsed
US
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Method and apparatus for hermetic coating of optical fibers
Assignee: Individual
•
Filing: 1988-01-19
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Granted: 1989-09-05
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Expires: 2008-01-19
Abstract
Abstract Apparatus for coating optical fibers with thin hermetic films based on cylindrical magnetron reactive sputtering and charged particle assisted deposition is disclosed. The thin film coated on the fiber is composed of material sputtered from a cylindrical cathode as well as material from reactive feedstock gases. The cylindrical cathode insures uniform deposited film thickness on a cylindrical fiber at high deposition rates. A cylindrical inner extraction grid acts to create ion or electron bombardment of the outer surface of the fiber as it is coated. As a consequence of the enclosed cylindrical geometry, the high magnetron sputtering rate, and the in-situ charged particle bombardment, hermetic coatings of high quality may be placed on fibers pulled through the deposition apparatus at rates of 1-20 meters/second. An external laser beam directed along the longitudinal axis of the cylindrical magnetron may be employed to improve the coating process.
Inventors
- 👤 George J. Collins
- 👤 John R. McNeil
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 01:47
CPC Classifications
C; C03; C03C; C03C25/00; C03C25/10; C03C25/12; C03C25/22; C03C25/226; B; B01; B01J; B01J19/00; B01J19/08; B01J19/12; B01J19/121; B01J19/122; B01J19/126; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C14/354; C23C14/355; C23C14/56; C23C14/562; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405; B01J2219/00; B01J2219/08; B01J2219/0894; B01J2219/12; B01J2219/1203; B01J2219/1206; B01J2219/1209; B01J2219/1221; B01J2219/1224; B01J2219/1227
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
449 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber, the apparatus comprising: vacuum chamber means; a cylindrical magnetron positioned within said vacuum chamber means, the cylindrical magnetron having a longitudinal axis that is substantially coincident with a longitudinal axis of the drawn fiber, the cylindrical magnetron comprising a cylindrical mesh extraction grid coaxially positioned with respect to the drawn fiber to surround the drawn fiber, a cylindrical mesh anode, coextensive with the cylindrical mesh extraction grid, having a diameter greater than the diameter of the cylindrical mesh extraction grid, and coaxially positioned with respect to the drawn fiber to surround the cylindrical mesh extraction grid, a cylindrical cathode, coextensive with the cylindrical mesh extraction grid and cylindrical mesh anode, having a diameter greater than the diameter of the cylindrical mesh anode, and coaxially positioned with respect to the drawn fiber to surround the cylindrical mesh anode, and cylindrical solenoid means, coextensive with the cylindrical mesh extraction grid, cylindrical mesh anode, and cylindrical cathode, having a diameter greater than the diameter of the cylindrical cathode, and coaxially positioned with respect to the drawn fiber to surround the cylindrical cathode, said cylindrical cathode having an inner surface comprising a desired material to be sputtered therefrom and uniformly deposited, through said cylindrical mesh anode and through said cylindrical mesh extraction grid, onto the drawn fiber; power supply means for applying selected voltages to the cylindrical cathode, cylindrical mesh anode, cylindrical mesh extraction grid, and cylindrical solenoid means, the application of said selected voltages causing the formation of a cylindrical plasma substantially confined within a volume enclosed within said cylindrical cathode and without said cylindrical mesh anode; vacuum control means coupled to the vacuum chamber means for establishing and maintaining a desired vacuum within the vacuum chamber means; and gas port means coupled to the vacuum control means and vacuum chamber means for admitting and controlling the flow of one or more selected reactive feedstock gases into the vacuum chamber means; said cylindrical plasma being operative for dissociating the one or more selected reactive feedstock gases into one or more constituent elements, one or more of which constituent elements reacts with the material sputtered from the inner surface of said cylindrical cathode for uniform deposition as a film onto the drawn fiber; said cylindrical solenoid means being operative for trapping plasma electrons within said cylindrical plasma and for increasing the efficiency of ion production; and said cylindrical mesh extraction grid being operative for accelerating ions or electrons created in said cylindrical plasma toward the drawn fiber for bombardment by said ions or electrons of said film deposited on said drawn fiber, thereby providing control over the stoichiometry of said film.
Claim 2
Dependent Claim
449 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber, the apparatus comprising: vacuum chamber means; a cylindrical magnetron positioned within said vacuum chamber means, the cylindrical magnetron having a longitudinal axis that is substantially coincident with a longitudinal axis of the drawn fiber, the cylindrical magnetron comprising a cylindrical mesh extraction grid coaxially positioned with respect to the drawn fiber to surround the drawn fiber, a cylindrical mesh anode, coextensive with the cylindrical mesh extraction grid, having a diameter greater than the diameter of the cylindrical mesh extraction grid, and coaxially positioned with respect to the drawn fiber to surround the cylindrical mesh extraction grid, a cylindrical cathode, coextensive with the cylindrical mesh extraction grid and cylindrical mesh anode, having a diameter greater than the diameter of the cylindrical mesh anode, and coaxially positioned with respect to the drawn fiber to surround the cylindrical mesh anode, and cylindrical solenoid means, coextensive with the cylindrical mesh extraction grid, cylindrical mesh anode, and cylindrical cathode, having a diameter greater than the diameter of the cylindrical cathode, and coaxially positioned with respect to the drawn fiber to surround the cylindrical cathode, said cylindrical cathode having an inner surface comprising a desired material to be sputtered therefrom and uniformly deposited, through said cylindrical mesh anode and through said cylindrical mesh extraction grid, onto the drawn fiber; power supply means for applying selected voltages to the cylindrical cathode, cylindrical mesh anode, cylindrical mesh extraction grid, and cylindrical solenoid means, the application of said selected voltages causing the formation of a cylindrical plasma substantially confined within a volume enclosed within said cylindrical cathode and without said cylindrical mesh anode; vacuum control means coupled to the vacuum chamber means for establishing and maintaining a desired vacuum within the vacuum chamber means; and gas port means coupled to the vacuum control means and vacuum chamber means for admitting and controlling the flow of one or more selected reactive feedstock gases into the vacuum chamber means; said cylindrical plasma being operative for dissociating the one or more selected reactive feedstock gases into one or more constituent elements, one or more of which constituent elements reacts with the material sputtered from the inner surface of said cylindrical cathode for uniform deposition as a film onto the drawn fiber; said cylindrical solenoid means being operative for trapping plasma electrons within said cylindrical plasma and for increasing the efficiency of ion production; and said cylindrical mesh extraction grid being operative for accelerating ions or electrons created in said cylindrical plasma toward the drawn fiber for bombardment by said ions or electrons of said film deposited on said drawn fiber, thereby providing control over the stoichiometry of said film.
Claim 3
Dependent Claim
85 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the vacuum chamber means comprises a central portion adjacent the cylindrical magnetron and inlet and outlet portions; the apparatus further comprising differential pumping means coupled to the inlet and outlet portions of the vacuum chamber means for establishing differential pressures between the central portion of the vacuum chamber means, the inlet and outlet portions of the vacuum chamber means, and an ambient environment outside the vacuum chamber means.
Claim 4
Dependent Claim
118 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 further comprising: laser means for generating a laser beam; optical means for facilitating entry of the laser beam into the vacuum chamber means adjacent a first end of the drawn fiber and exit of the laser beam therefrom adjacent a second end of the drawn fiber and for directing the laser beam along the longitudinal axis of the drawn fiber within the vacuum chamber means for selectively augmenting dissociation of the one or more selected reactive feedstock gases into one or more constituent elements for uniform deposition of said one or more constituent elements onto an outer surface of the drawn fiber.
Claim 5
Dependent Claim
26 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises aluminum.
Claim 6
Dependent Claim
26 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises silicon.
Claim 7
Dependent Claim
26 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises magnesium.
Claim 8
Dependent Claim
26 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises tin.
Claim 9
Dependent Claim
26 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises titanium.
Claim 10
Dependent Claim
26 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises zirconium.
Claim 11
Dependent Claim
26 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises cerium.
Claim 12
Dependent Claim
26 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises boron.
Claim 13
Dependent Claim
26 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises lanthanum.
Claim 14
Dependent Claim
27 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises titanium disilicide.
Claim 15
Dependent Claim
27 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises tantalum disilicide.
Claim 16
Dependent Claim
27 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the inner surface of the cylindrical cathode comprises tungsten disilicide.
Claim 17
Dependent Claim
43 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 further comprising an annular cooling cavity positioned adjacent the cylindrical cathode and means for circulating a coolant within the annular cooling cavity for cooling the cylindrical cathode.
Claim 18
Dependent Claim
179 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 further comprising one or more additional cylindrical magnetrons positioned within the vacuum chamber means in spaced apart tandem relationship with said cylindrical magnetron and along the longitudinal axis thereof, each of the one or more additional cylindrical magnetrons comprising a cylindrical mesh extraction grid, a cylindrical mesh anode, coextensive with the cylindrical mesh extraction grid, and having a diameter greater than the diameter of the cylindrical mesh extraction grid, a cylindrical cathode, coextensive with the cylindrical mesh extraction grid and cylindrical mesh anode, and having a diameter greater than the diameter of the cylindrical mesh anode, and cylindrical solenoid means, coextensive with the cylindrical mesh extraction grid, cylindrical mesh anode, and cylindrical cathode, and having a diameter greater than the diameter of the cylindrical cathode; said power supply means being operative for applying independently controllable voltages to the cylindrical cathode, cylindrical mesh anode, cylindrical mesh extraction grid, and cylindrical solenoid means of said cylindrical magnetron and the one or more additional cylindrical magnetrons.
Claim 19
Dependent Claim
50 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 17 wherein an inner surface of the cylindrical cathode of said cylindrical magnetron and an inner surface of the cylindrical cathode of one of the one or more additional cylindrical magnetrons comprise two different materials.
Claim 20
Dependent Claim
37 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 18 wherein one of said two different materials comprises a refractory metal and the other of said two different materials comprises silicon.
Claim 21
Dependent Claim
33 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein the cylindrical cathode and the cylindrical mesh extraction grid are fabricated to include a common material.
Claim 22
Dependent Claim
25 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 20 wherein the common material comprises a metal ceramic material.
Claim 23
Dependent Claim
25 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 20 wherein the common material comprises a metal carbon material.
Claim 24
Dependent Claim
27 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein a feedstock gas comprises a mixture of argon and nitrogen.
Claim 25
Dependent Claim
27 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein a feedstock gas comprises a mixture of argon and methane.
Claim 26
Dependent Claim
28 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein a feedstock gas comprises a mixture of argon and nitrogen trifluoride.
Claim 27
Dependent Claim
27 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein a feedstock gas comprises a mixture of argon and fluorine.
Claim 28
Dependent Claim
28 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein a feedstock gas comprises a mixture of argon and nitrogen oxide.
Claim 29
Dependent Claim
27 words
Apparatus for depositing a thin film hermetic coating on a drawn fiber as in claim 1 wherein a feedstock gas comprises a mixture of argon and ammonia.
Claim 30
Independent Claim
385 words
A method for depositing a thin film hermetic coating onto a drawn fiber comprising: introducing a fiber to be coated into a vacuum chamber apparatus that includes a cylindrical magnetron having a longitudinal axis substantially coincident with a longitudinal axis of the drawn fiber, having a cylindrical mesh extraction grid coaxially positioned with respect to the drawn fiber to surround the drawn fiber, having a cylindrical mesh anode, coextensive with the cylindrical mesh extraction grid, of diameter greater than that of the cylindrical extraction grid, and coaxialy positioned with respect to the drawn fiber to surround the cylindrical mesh extraction grid, having a cylindrical cathode, coextensive with the cylindrical mesh extraction grid and cylindrical mesh anode, of diameter greater than that of the cylindrical mesh anode, and coaxially positioned with respect to the drawn fiber to surround the cylindrical mesh anode, and having a cylindrical solenoid, coextensive with the cylindrical mesh extraction grid, cylindrical mesh anode, and cylindrical cathode, of diameter greater than that of the cylindrical cathode, and coaxially positioned with respect to the drawn fiber to surround the cylindrical cathode; extablishing a controlled gas atmosphere within the vacuum chamber apparatus, the controlled gas atmosphere including a rare gas and one or more reactive feedstock gases; applying operating voltages to the elements of the cylindrical magnetron such that a cylindrical plasma is formed and substantially confined within a volume enclosed within the cylindrical cathode and without the cylindrical mesh anode, such that ions or electrons created in the cylindrical plasma are accelerated toward the drawn fiber for bombardment by said ions or electrons of the film deposited on the drawn fiber, such that a cathode material of an inner surface of the cylindrical cathode is sputtered therefrom and uniformly deposited, through the cylindrical mesh anode and through the cylindrical mesh extraction grid, onto an outer surface of the drawn fiber, and such that the cylindrical plasma dissociates the one or more reactive feedstock gases into one or more constituent elements, one or more of which constituent elements reacts with the material sputtered from the inner surface of the cylindrical cathode for uniform deposition onto the outer surface of the drawn fiber; and drawing the fiber along the longitudinal axis of the cylindrical magnetron at a constant rate to uniformly coat a desired length thereof.
Claim 31
Independent Claim
385 words
A method for depositing a thin film hermetic coating onto a drawn fiber comprising: introducing a fiber to be coated into a vacuum chamber apparatus that includes a cylindrical magnetron having a longitudinal axis substantially coincident with a longitudinal axis of the drawn fiber, having a cylindrical mesh extraction grid coaxially positioned with respect to the drawn fiber to surround the drawn fiber, having a cylindrical mesh anode, coextensive with the cylindrical mesh extraction grid, of diameter greater than that of the cylindrical extraction grid, and coaxialy positioned with respect to the drawn fiber to surround the cylindrical mesh extraction grid, having a cylindrical cathode, coextensive with the cylindrical mesh extraction grid and cylindrical mesh anode, of diameter greater than that of the cylindrical mesh anode, and coaxially positioned with respect to the drawn fiber to surround the cylindrical mesh anode, and having a cylindrical solenoid, coextensive with the cylindrical mesh extraction grid, cylindrical mesh anode, and cylindrical cathode, of diameter greater than that of the cylindrical cathode, and coaxially positioned with respect to the drawn fiber to surround the cylindrical cathode; extablishing a controlled gas atmosphere within the vacuum chamber apparatus, the controlled gas atmosphere including a rare gas and one or more reactive feedstock gases; applying operating voltages to the elements of the cylindrical magnetron such that a cylindrical plasma is formed and substantially confined within a volume enclosed within the cylindrical cathode and without the cylindrical mesh anode, such that ions or electrons created in the cylindrical plasma are accelerated toward the drawn fiber for bombardment by said ions or electrons of the film deposited on the drawn fiber, such that a cathode material of an inner surface of the cylindrical cathode is sputtered therefrom and uniformly deposited, through the cylindrical mesh anode and through the cylindrical mesh extraction grid, onto an outer surface of the drawn fiber, and such that the cylindrical plasma dissociates the one or more reactive feedstock gases into one or more constituent elements, one or more of which constituent elements reacts with the material sputtered from the inner surface of the cylindrical cathode for uniform deposition onto the outer surface of the drawn fiber; and drawing the fiber along the longitudinal axis of the cylindrical magnetron at a constant rate to uniformly coat a desired length thereof.
Claim 32
Dependent Claim
72 words
A method for depositing a thin film hermetic coating onto a drawn fiber as in claim 29, further comprising the step of: optically introducing a laser beam into the vacuum chamber aparatus adjacent a first end of the drawn fiber and along the longitudinal axis of the drawn fiber within the vacuum chamber apparatus for selectively augmenting dissociation of the one or more reactive feedstock gases into one or more constituent elements.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-04 | 1993-03-06 | 1993-09-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-04 | 1997-03-06 | 1997-09-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-04 | 2001-03-06 | 2001-09-05 | $7700.00 | Window Closed / Lapsed |