US4478703A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering system
Assignee: Kawasaki Motors Ltd
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Filing: 1984-03-29
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Granted: 1984-10-23
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Expires: 2004-03-29
Abstract
Abstract A sputtering system including a workpiece and at least one target located in a vacuum reaction furnace, wherein a magnetic field is generated between the workpiece and the target and a electric field perpendicular to the magnetic field generated between the workpiece and the target is additionally generated. A plurality of targets may be located around the workpiece and either the workpiece or the targets may be rotated when the magnetron discharge is generated.
Inventors
- 👤 Mizuo Edamura
- 👤 Takashi Kajikawa
- 👤 Koji Okamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:19
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
116 words
A sputtering system comprising: a vacuum reaction furnace including a furnace body; a workpiece located substantially is a central portion of said vacuum reaction furnace; a plurality of targets located around said workpiece along the circumference of an imaginary circle and spaced apart from the workpiece a predetermined distance, said targets being spaced apart equidistantly from each other; rotating means connected to said workpiece for rotating same; and magnetic field generating means located within each said target and on an outer periphery of said furnace body for generating a magnetic field between said workpiece and each said target and a magnetic field located perpendicular to said magnetic field generated between said workpiece and each said target.
Claim 2
Dependent Claim
116 words
A sputtering system comprising: a vacuum reaction furnace including a furnace body; a workpiece located substantially is a central portion of said vacuum reaction furnace; a plurality of targets located around said workpiece along the circumference of an imaginary circle and spaced apart from the workpiece a predetermined distance, said targets being spaced apart equidistantly from each other; rotating means connected to said workpiece for rotating same; and magnetic field generating means located within each said target and on an outer periphery of said furnace body for generating a magnetic field between said workpiece and each said target and a magnetic field located perpendicular to said magnetic field generated between said workpiece and each said target.
Claim 3
Dependent Claim
119 words
A sputtering system comprising: a magnetic reaction furnace including a furnace body; a workpiece located substantially in a central portion of said vacuum reaction furnace; a plurality of targets located around said workpiece along the curcumference of an imaginary circle and spaced apart from the workpiece a predetermined distance, said targets being spaced apart equidistantly from each other; rotating means connected to said targets for rotating same about said workpiece; and magnetic field generating means located within each said target and on an outer periphery of said furnace body for generating a magnetic field between said workpiece and each said target and a magnetic field located perpendicular to said magnetic field generated between said workpiece and each said target.
Claim 4
Dependent Claim
119 words
A sputtering system comprising: a magnetic reaction furnace including a furnace body; a workpiece located substantially in a central portion of said vacuum reaction furnace; a plurality of targets located around said workpiece along the curcumference of an imaginary circle and spaced apart from the workpiece a predetermined distance, said targets being spaced apart equidistantly from each other; rotating means connected to said targets for rotating same about said workpiece; and magnetic field generating means located within each said target and on an outer periphery of said furnace body for generating a magnetic field between said workpiece and each said target and a magnetic field located perpendicular to said magnetic field generated between said workpiece and each said target.
Claim 5
Dependent Claim
119 words
A sputtering system comprising: a vacuum reaction furnace including a furnace body; a workpiece and a target located in said vacuum reaction furnace; magnetic field generating means for generating a magnetic field in the vicinity of said target; glow discharge setting up means for setting up a glow discharge by using either said target or said furnace body as an anode and said workpiece as a cathode; sputtering means for performing sputtering by using said target as a cathode and said workpiece as an anode; a polarity converter for switching said target and workpiece from the cathode to the anode and vice versa; and a heater mounted on an inner surface of said furnace body for heating said workpiece.
Claim 6
Dependent Claim
119 words
A sputtering system comprising: a vacuum reaction furnace including a furnace body; a workpiece and a target located in said vacuum reaction furnace; magnetic field generating means for generating a magnetic field in the vicinity of said target; glow discharge setting up means for setting up a glow discharge by using either said target or said furnace body as an anode and said workpiece as a cathode; sputtering means for performing sputtering by using said target as a cathode and said workpiece as an anode; a polarity converter for switching said target and workpiece from the cathode to the anode and vice versa; and a heater mounted on an inner surface of said furnace body for heating said workpiece.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-23 | 1988-04-23 | 1988-10-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-23 | 1992-04-23 | 1992-10-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-23 | 1996-04-23 | 1996-10-23 | $7700.00 | Window Closed / Lapsed |