US4170541A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rotating resonator for large substrate tables in sputtering systems
Assignee: Varian Medical Systems Inc
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Filing: 1978-08-14
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Granted: 1979-10-09
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Expires: 1998-08-14
Abstract
Abstract An RF sputtering system having a rotating substrate table includes a resonant circuit adapted to rotate with the substrate table whereby reactive currents need not propagate across the rotating RF connector through which RF power is supplied to the rotating table.
Inventors
- 👤 Lawrence T. Lamont, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:48
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/505
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
89 words
A sputtering apparatus for connection to a radio frequency power generator for depositing material on articles, said apparatus comprising wall means defining a portion of a vacuum enclosure, rotating electrode means adapted to support radio frequency voltage, said rotating electrode further adapted to rotate with respect to said wall means, resonating circuit means disposed to rotate with said rotating electrode means, hermetic coupling means for coupling radio frequency energy to said rotating electrode through said wall means, said coupling means maintaining a substantially hermetic seal with said wall means.
Claim 2
Dependent Claim
89 words
A sputtering apparatus for connection to a radio frequency power generator for depositing material on articles, said apparatus comprising wall means defining a portion of a vacuum enclosure, rotating electrode means adapted to support radio frequency voltage, said rotating electrode further adapted to rotate with respect to said wall means, resonating circuit means disposed to rotate with said rotating electrode means, hermetic coupling means for coupling radio frequency energy to said rotating electrode through said wall means, said coupling means maintaining a substantially hermetic seal with said wall means.
Claim 3
Dependent Claim
27 words
The apparatus of claim 1 comprising a ground shield disposed between said wall means and said electrode means, said ground shield adapted to rotate with said electrode.
Claim 4
Dependent Claim
15 words
The apparatus of claim 1 wherein said rotating electrode is adapted to hold said articles.
Claim 5
Dependent Claim
20 words
The apparatus of claim 1 wherein said resonating circuit is resonant at the frequency of said radio frequency power generator.
Claim 6
Dependent Claim
15 words
The apparatus of claim 4 wherein said resonating circuit comprises an inductance and a capacitance.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-10-08 | 1983-04-09 | 1983-10-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-10-08 | 1987-04-09 | 1987-10-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-10-08 | 1991-04-09 | 1991-10-09 | $7700.00 | Window Closed / Lapsed |