Patent US4861425A successfully refreshed from Google Patents.
US4861425A
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US
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Lift-off process for terminal metals
Assignee: International Business Machines Corp
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Filing: 1988-08-22
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Granted: 1989-08-29
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Expires: 2008-08-22
Abstract
Abstract A process is described for selective removal of unwanted metallization from the surface of a semiconductor device. The process comprises the usual deposition of a configurable image defining layer on the surface of the device upon which a suitable pad limiting metallurgy (PLM) has already been deposited. The layer is then opened over the pad limiting metallurgy using standard techniques and coated with a layer of the terminal metal. The coated device is then heated to just above the melting point of the terminal metal causing the melted metal, through surface tension to form a ball of metal on the PLM and to form small globules of metal on the surface of the layer and then permitted to cool. When cooled the layer is removed using the usual techniques. Because the coating of terminal metal is no longer a continuous layer on the surface of the mask, removal of the polymer mask can be accomplished in about one-tenth of the time required when compared to a deposited terminal metal layer that is not melted. Also because of the effects of surface tension the metal coating need only be one-half the thickness required under the prior art techniques.
Inventors
- 👤 Stuart E. Greer
- 👤 Robert T. Howard, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 17:33
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/20; H10W72/01; H10W72/012; H10W72/01251; H10W72/01255; H10W72/019; H10W72/251; H10W72/252; H10W72/90; H10W72/921; H10W72/923; H10W72/951; H10W72/952; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/951
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
83 words
A lift-off process for removing a metallic layer deposited over a layer of masking material deposited on a semiconductor device comprising the steps of: depositing a layer of masking material on the surface of the semiconductor device, creating an opening in the layer of masking material, and depositing a layer of metal over said layer of masking material and in said opening, heating said metal layer to cause melting of said metal layer in said opening, removing said metal outside of said opening.
Claim 2
Dependent Claim
83 words
A lift-off process for removing a metallic layer deposited over a layer of masking material deposited on a semiconductor device comprising the steps of: depositing a layer of masking material on the surface of the semiconductor device, creating an opening in the layer of masking material, and depositing a layer of metal over said layer of masking material and in said opening, heating said metal layer to cause melting of said metal layer in said opening, removing said metal outside of said opening.
Claim 3
Dependent Claim
12 words
The process of claim 1 wherein the masking material is a photoresist.
Claim 4
Dependent Claim
18 words
The process of claim 2 wherein the opening in the masking material is created by a photolithographic process.
Claim 5
Dependent Claim
21 words
The process of claim 2 wherein said layer of metal has a melting point below the degradation temperature of the photoresist.
Claim 6
Dependent Claim
15 words
The process of claim 4 wherein said heating is achieved by using a heated chamber.
Claim 7
Dependent Claim
15 words
The process of claim 4 wherein said heating is achieved by using a laser beam.
Claim 8
Dependent Claim
118 words
A lift-off process for removing a metallic layer deposited over a layer of masking material deposited on a semiconductor device comprising the steps of: creating a layer of insulating material on a selected surface of the device, forming openings in selected regions of said insulating layer, depositing a first metallic layer in said opening, depositing a layer of masking material on the surface of the layer of insulating material, creating a plurality of openings in the layer of masking material, and depositing a second metallic layer over said layer of masking material and in said openings, characterized by heating said second metallic layer to cause melting of said second metallic layer, and removing said layer of masking material.
Claim 9
Dependent Claim
118 words
A lift-off process for removing a metallic layer deposited over a layer of masking material deposited on a semiconductor device comprising the steps of: creating a layer of insulating material on a selected surface of the device, forming openings in selected regions of said insulating layer, depositing a first metallic layer in said opening, depositing a layer of masking material on the surface of the layer of insulating material, creating a plurality of openings in the layer of masking material, and depositing a second metallic layer over said layer of masking material and in said openings, characterized by heating said second metallic layer to cause melting of said second metallic layer, and removing said layer of masking material.
Claim 10
Dependent Claim
18 words
The process of claim 7 wherein said insulating layer and said layer of masking material are different polymers.
Claim 11
Dependent Claim
21 words
The process of claim 8 wherein said openings in said insulating layer and said layer of masking material are formed photolithographically.
Claim 12
Dependent Claim
16 words
The process of claim 9 wherein said first metallic layer is comprised of chrome-copper-gold or chrome-copper-chrome.
Claim 13
Dependent Claim
16 words
The process of claim 10 wherein said second metal layer is comprised of lead and tin.
Claim 14
Dependent Claim
31 words
The process of claim 10 wherein said second metallic layer has a melting point below the melting point of the first metallic layer and below the degradation temperature of the polymers.
Claim 15
Dependent Claim
24 words
The process of claim 12 wherein said layer of masking material is removed from the layer of insulating material by a chemical stripping action.
Claim 16
Dependent Claim
30 words
The process of claim 10 wherein said semiconductor device is positioned at an angle of more than twenty degrees to the horizontal while said second metallic layer is being heated.
Claim 17
Dependent Claim
23 words
The process of claim 14 wherein said device is heated in a chamber to a temperature of between 300° C. and 450° C.
Claim 18
Dependent Claim
15 words
The process of claim 10 wherein said second metallic layer is heated with a laser.
Claim 19
Dependent Claim
14 words
The process of claim 7 wherein said insulating layer is composed of a glass.
Claim 20
Dependent Claim
21 words
The process of claim 7 wherein said second metallic layer is approximately one-half the thickness of said layer of masking material.
Claim 21
Dependent Claim
167 words
A lift-off process for removing a metallic layer deposited over a photoresist layer deposited on a semiconductor device comprising the steps of: creating a layer of insulating material on a surface of the device, forming openings in selected regions of said insulating layer, depositing a first metallic layer in said openings, depositing a layer of photoresist, having a polymerization temperature and a depolymerization temperature, on the surface of said insulating layer, photolithographically creating a plurality of openings in the photoresist layer, over selected regions of said first deposited metallic layer, depositing a second metallic layer over said photoresist layer and in said openings in said photoresist layer, said second layer having a melting point less than the melting point of said first metallic layer and less than the polymerization temperature and the depolymerization temperature of the photoresist, heating said second metal layer to cause melting of said second metal layer, and removing said photoresist from the surface of said insulating layer by using a chemical stripping agent.
Claim 22
Dependent Claim
167 words
A lift-off process for removing a metallic layer deposited over a photoresist layer deposited on a semiconductor device comprising the steps of: creating a layer of insulating material on a surface of the device, forming openings in selected regions of said insulating layer, depositing a first metallic layer in said openings, depositing a layer of photoresist, having a polymerization temperature and a depolymerization temperature, on the surface of said insulating layer, photolithographically creating a plurality of openings in the photoresist layer, over selected regions of said first deposited metallic layer, depositing a second metallic layer over said photoresist layer and in said openings in said photoresist layer, said second layer having a melting point less than the melting point of said first metallic layer and less than the polymerization temperature and the depolymerization temperature of the photoresist, heating said second metal layer to cause melting of said second metal layer, and removing said photoresist from the surface of said insulating layer by using a chemical stripping agent.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-28 | 1993-02-27 | 1993-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-28 | 1997-02-27 | 1997-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-28 | 2001-02-27 | 2001-08-29 | $7700.00 | Window Closed / Lapsed |