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US4859279A
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Method for prescribed, structured deposition of micro-structures with laser light
Assignee: Siemens AG
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Filing: 1988-08-31
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Granted: 1989-08-22
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Expires: 2008-08-31
Abstract
Abstract An improvement of a method for structured LCVD deposition onto, in particular, non-homogenous material of a substrate member, wherein a metal film of, in particular, tungsten that has a leveling effect with respect to reflectivity and/or lateral heat propagation is provided on a substrate surface before the deposition.
Inventors
- 👤 Dieter Baeuerle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:06
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/04; C23C16/047; C23C16/02; C23C16/0272; C23C16/0281; H; H05; H05K; H05K3/00; H05K3/10; H05K3/108; H05K3/14; H05K3/146; H05K2203/00; H05K2203/10; H05K2203/107; H05K2203/13; H05K2203/1333; H05K2203/1338; H05K3/38; H05K3/388
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
58 words
A method for generating a structured surface on a substrate comprising the steps of: covering at least a portion of said surface of said substrate with a metal film; structuring said surface of said substrate at selected locations by laser-controlled vapor deposition with said film in place; and removing portions of said film unaffected by said vapor deposition.
Claim 2
Independent Claim
58 words
A method for generating a structured surface on a substrate comprising the steps of: covering at least a portion of said surface of said substrate with a metal film; structuring said surface of said substrate at selected locations by laser-controlled vapor deposition with said film in place; and removing portions of said film unaffected by said vapor deposition.
Claim 3
Dependent Claim
43 words
A method as claimed in claim 1, wherein the step of covering at least a portion of said surface of said substrate with a metal film is further defined by covering at least a portion of said surface of said substrate with tungsten.
Claim 4
Dependent Claim
54 words
A method as claimed in claim 1, wherein the step of covering at least a portion of said surface of said substrate with a metal film is further defined by covering at least a portion of said surface of said substrate with a material selected from the group consisting of molybdenum, chromium and nickel.
Claim 5
Dependent Claim
54 words
A method as claimed in claim 1, wherein the step of covering at least a portion of said surface of said substrate with a metal film is further defined by covering at least a portion of said surface of said substrate with a metal film having a thickness from one nm through ten nm.
Claim 6
Dependent Claim
45 words
A method as claimed in claim 2, wherein the step of removing portions of said film unaffected by said vapor deposition is further defined by removing portions of said film unaffected by said vapor deposition with a mixture of acqueous potassium hydroxide and hydrogen peroxide.
Claim 7
Dependent Claim
27 words
A method as claimed in claim 1, wherein said structure of the deposition is limited by controllable deflection of the laser emission employed in a writing method.
Claim 8
Independent Claim
30 words
A method according to claim , further comprising: transferring said structure onto said substrate surface using the principle of projection exposure, being transferred with laser emission from a projection original.
Claim 9
Dependent Claim
27 words
A method as claimed in claim 1, further comprising: depositing a contact metal of a material selected from the group consisting of Cu, W, Mo and Au.
Claim 10
Dependent Claim
44 words
A method as claimed in claim 1, wherein the step of structuring said surface of said substrate at selected locations, by laser-controlled vapor deposition with said film in place is further defined by depositing SiO 2 and Al 2 O 3 at selected locations.
Claim 11
Dependent Claim
18 words
A method as claimed in claim 1, further comprising: selecting said substrate member to be a non-homogeneous material.
Claim 12
Dependent Claim
16 words
A method as claimed in claim 10, further comprising: selecting said substrate member to be ceramic.
Claim 13
Dependent Claim
17 words
A method as claimed in claim 10, further comprising: selecting said substrate member to be a composite.
Claim 14
Dependent Claim
18 words
A method as claimed in claim 1, further comprising: selecting said substrate member to be a silicon wafer.
Claim 15
Dependent Claim
18 words
A method as claimed in claim 10, further comprising: selecting said substrate member to be a silicon wafer.
Claim 16
Dependent Claim
18 words
A method as claimed in claim 1, further comprising: using said method for the manufacture of a mask.
Claim 17
Dependent Claim
18 words
A method as claimed in claim 1, further comprising: using said method for the manufacture of electrical interconnects.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-21 | 1993-02-20 | 1993-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-21 | 1997-02-20 | 1997-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-21 | 2001-02-20 | 2001-08-22 | $7700.00 | Window Closed / Lapsed |