US4748045A
Expired / Lapsed
US
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Method and apparatus for photodeposition of films on surfaces
Assignee: Massachusetts Institute of Technology
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Filing: 1987-03-16
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Granted: 1988-05-31
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Expires: 2007-03-16
Abstract
Abstract The invention relates to visible-laser deposition reactions of metal containing oxyhalide and carbonyl vapors, such as, chromyl chloride vapor, CrO 2 Cl 2 , or cobalt carbonyl, Co 2 (CO) 8 , for direct writing of metal containing opaque patterns on various substrates (S i , S i O 2 , GaAs and glass). Deposition at low laser power is by photolyses of adsorbed reactant molecules. Higher powers initiate deposition photochemically and continue it with a combined photolytic/pyrolytic reaction, simultaneously inducing a solid-phase conversion of the deposited film. Mixed Cr 2 O 3 /CrO 2 or cobalt thin films of 1-nanometer to several-micrometer thickness, as well as 1-millimeter-long single crystals of Cr 2 O 3 or cobalt, can be grown with this process, the former at rates up to 3 /μm/s. Thin chromium oxide films produced in this manner are strongly ferromagnetic.
Inventors
- 👤 Daniel J. Ehrlich
- 👤 Mordecai Rothschild
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:22
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; G; G03; G03F; G03F1/00; G03F1/68; G03F1/72; C23C16/00; C23C16/04; C23C16/047; C23C16/44; C23C16/48; C23C16/483; G03F7/00; G03F7/20; G03F7/2041; G03F7/2043; H; H01; H01F; H01F41/00; H01F41/14; H01F41/20; H01F41/22; H01F41/32; H01F41/34
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
82 words
A method for deposition of metal containing films on a surface of a substrate disposed in a reaction chamber comprising the steps of: (a) introducing a visible absorbing gaseous polymetal carbonyl vapor precursor into said chamber; (b) generating a beam of visible light directed at or near the surface upon which deposition is desired; (c) initiating deposition with said beam of visible light via a substantially photolytic dissociation of said precursor resulting in formation of metal containing material on said substrate surface.
Claim 2
Independent Claim
82 words
A method for deposition of metal containing films on a surface of a substrate disposed in a reaction chamber comprising the steps of: (a) introducing a visible absorbing gaseous polymetal carbonyl vapor precursor into said chamber; (b) generating a beam of visible light directed at or near the surface upon which deposition is desired; (c) initiating deposition with said beam of visible light via a substantially photolytic dissociation of said precursor resulting in formation of metal containing material on said substrate surface.
Claim 3
Dependent Claim
51 words
The method of claim 1 wherein the polymetal carbonyl vapor precursor is taken from the class comprising: Mn 2 (CO) 10 , Fe 2 (CO) 9 , Fe 3 (CO) 12 , CO 2 (CO) 8 , Ir 4 (CO) 12 , MnRe(CO) 10 , and Fe 2 Os(CO) 12 .
Claim 4
Dependent Claim
41 words
The method of claim 1 wherein the substrate comprises a photo-mask to be repaired or a circuit to be modified or repaired and the light is directed in a pattern to form a pattern of opaque film adherent on the substrate.
Claim 5
Dependent Claim
49 words
The method of claim 1 wherein after initiating a deposit of a metal containing film, the beam of visible light is progressively focused away from the substrate surface at a rate proportional to the film growth rate to form a substantially single crystal metal compound film on the substrate.
Claim 6
Dependent Claim
12 words
The method of claim 1 wherein the substrate is visible light transparent.
Claim 7
Dependent Claim
16 words
The method of claim 1 wherein the reaction process after initiation is primarily pyrolytic in nature.
Claim 8
Dependent Claim
14 words
The method of claim 1 wherein the precursor is Co 2 (CO) 8 .
Claim 9
Dependent Claim
31 words
The method of claim 1 wherein the precursor comprises a polymetal carbonyl wherein the metal is selected from the group consisting of Manganese (Mn), Iron (Fe), Cobalt (Co) and Iridium (Ir).
Claim 10
Independent Claim
63 words
A method for photodeposition of cobalt film on a surface of a photomask substrate disposed in a reaction chamber comprising the steps of: (a) introducing gaseous CO 2 (CO) 8 at lower vapor pressure into said chamber; (b) focusing a continuous wave beam of coherent, visible light at or near the surface of said substrate to initiate deposition of cobalt on said surface.
Claim 11
Independent Claim
63 words
A method for photodeposition of cobalt film on a surface of a photomask substrate disposed in a reaction chamber comprising the steps of: (a) introducing gaseous CO 2 (CO) 8 at lower vapor pressure into said chamber; (b) focusing a continuous wave beam of coherent, visible light at or near the surface of said substrate to initiate deposition of cobalt on said surface.
Claim 12
Dependent Claim
110 words
Apparatus for repair of photomask defects comprising: (a) a deposition chamber, (b) means for supporting said photomask in said-chamber, (c) a continuous wave laser source of energy operating at a wavelength between about 700-nm and 350-nm, (d) an optical system for focusing said energy toward a portion of said photomask surface to be repaired at a position on or adjacent said surface portion, and (e) means for introducing a vapor of a visible absorbing metal carbonyl into said chamber adjacent to said surface, for effecting a substantially photolytic photodecomposition of the metal component of said vapor for depositing said metal component in a predetermined pattern on the photomask surface portion.
Claim 13
Dependent Claim
110 words
Apparatus for repair of photomask defects comprising: (a) a deposition chamber, (b) means for supporting said photomask in said-chamber, (c) a continuous wave laser source of energy operating at a wavelength between about 700-nm and 350-nm, (d) an optical system for focusing said energy toward a portion of said photomask surface to be repaired at a position on or adjacent said surface portion, and (e) means for introducing a vapor of a visible absorbing metal carbonyl into said chamber adjacent to said surface, for effecting a substantially photolytic photodecomposition of the metal component of said vapor for depositing said metal component in a predetermined pattern on the photomask surface portion.
Claim 14
Dependent Claim
14 words
The apparatus of claim 10 wherein said laser is a continuous wave ion laser.
Claim 15
Dependent Claim
12 words
The apparatus of claim 10 wherein said laser is an argon-ion laser.
Claim 16
Dependent Claim
13 words
The apparatus of claim 10 wherein said laser is a metal vapor laser.
Claim 17
Dependent Claim
77 words
Apparatus for depositing a metal film on a substrate surface comprising: (a) a reaction chamber adapted to contain a visible absorbing gaseous polymetal carbonyl, (b) a substrate, (c) a source of continuous wave visible laser light, (d) means for directing a beam of said visible light at or near the substrate surface upon which a substantially photolytic deposition is desired to induce dissociation of said polymetal carbonyl resulting in formation of metallic material on said substrate surface.
Claim 18
Dependent Claim
77 words
Apparatus for depositing a metal film on a substrate surface comprising: (a) a reaction chamber adapted to contain a visible absorbing gaseous polymetal carbonyl, (b) a substrate, (c) a source of continuous wave visible laser light, (d) means for directing a beam of said visible light at or near the substrate surface upon which a substantially photolytic deposition is desired to induce dissociation of said polymetal carbonyl resulting in formation of metallic material on said substrate surface.
Claim 19
Dependent Claim
25 words
The apparatus of claim 14 wherein the substrate is a photomask, the polymetal carbonyl is CO 2 (CO) 8 and the metallic material is cobalt.
Claim 20
Independent Claim
102 words
A method for deposition of metal containing films on a surface of a substrate disposed in a reaction chamber comprising the steps of: (a) introducing a gaseous metal oxyhalide vapor precursor into said chamber wherein the metal of the metal oxyhalide is selected from the group consisting of Tantalum (Ta), Niobium (Nb) and Vanadium (V); (b) generating a beam of continuous visible light directed at or near the surface upon which deposition is desired; and (c) initiating deposition with said beam of visible light via a substantially photolytic dissociation of said precursor, resulting in formation of metallic material on said substrate surface.
Claim 21
Independent Claim
102 words
A method for deposition of metal containing films on a surface of a substrate disposed in a reaction chamber comprising the steps of: (a) introducing a gaseous metal oxyhalide vapor precursor into said chamber wherein the metal of the metal oxyhalide is selected from the group consisting of Tantalum (Ta), Niobium (Nb) and Vanadium (V); (b) generating a beam of continuous visible light directed at or near the surface upon which deposition is desired; and (c) initiating deposition with said beam of visible light via a substantially photolytic dissociation of said precursor, resulting in formation of metallic material on said substrate surface.
Claim 22
Dependent Claim
12 words
The method of claim 16 wherein the precursor is VOCl 3 .
Claim 23
Independent Claim
81 words
A method for deposition of metal containing films on a surface of a substrate disposed in a reaction chamber comprising the steps of: (a) introducing a gaseous metal nitrosylcarbonyl vapor precursor into said chamber; (b) generating a beam of continuous visible light directed at or near the surface upon which deposition is required; (c) initiating deposition with said beam of visible light via a substantially photolytic dissociation of said precursor resulting in formation of metal containing material on said substrate surface.
Claim 24
Independent Claim
81 words
A method for deposition of metal containing films on a surface of a substrate disposed in a reaction chamber comprising the steps of: (a) introducing a gaseous metal nitrosylcarbonyl vapor precursor into said chamber; (b) generating a beam of continuous visible light directed at or near the surface upon which deposition is required; (c) initiating deposition with said beam of visible light via a substantially photolytic dissociation of said precursor resulting in formation of metal containing material on said substrate surface.
Claim 25
Dependent Claim
26 words
The method of claim 18 wherein the metal nitrosylcarbonyl vapor precursor is taken from the class comprising Co(CO) 3 NO and Fe(CO) 2 (NO) 2 .
Claim 26
Independent Claim
87 words
A method for deposition of metal containing films on a surface of a substrate disposed in a reaction chamber comprising the steps of: (a) introducing a visible absorbing gaseous metal precursor compound containing PF 3 groups into said reaction chamber; (b) generating a continuous beam of visible light directed at or near the surface upon which deposition is required; (c) initiating deposition with said beam of visible light via a substantially photolytic dissociation of said precursor resulting in formation of metal containing material on said substrate surface.
Claim 27
Independent Claim
87 words
A method for deposition of metal containing films on a surface of a substrate disposed in a reaction chamber comprising the steps of: (a) introducing a visible absorbing gaseous metal precursor compound containing PF 3 groups into said reaction chamber; (b) generating a continuous beam of visible light directed at or near the surface upon which deposition is required; (c) initiating deposition with said beam of visible light via a substantially photolytic dissociation of said precursor resulting in formation of metal containing material on said substrate surface.
Claim 28
Dependent Claim
14 words
The method of claim 20 wherein the precursor is Pt(PF 3 ) 4 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-31 | 1991-11-30 | 1992-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-31 | 1995-11-30 | 1996-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-31 | 1999-11-30 | 2000-05-31 | $7700.00 | Window Closed / Lapsed |