Positive-working radiation-sensitive coating solution and positive photoresist material with monoalkyl ether of 1,2-propanediol as solvent

Claim 2

A positive-working radiation-sensitive coating solution suitable as a photoresist, consisting essentially of, in admixture, (i) at least one polymeric binder which is soluble or swellable in alkaline media and soluble in mono-C 1 to C 4 -alkyl ethers of 1,2-propanediol, said binder being present in an amount between about 30 and 90 percent by weight, relative to the total solids of said coating solution; (ii) a sufficient amount of at least one radiation-sensitive compound to impart radiation sensitivity to said coating solution; and (iii) an organic solvent present in an amount sufficient to solubilize said binder, which organic solvent consists essentially of a mono-C 1 to C 4 -alkyl ether of 1,2propanediol in an amount of between about 80% and 100% by weight of said organic solvent.

Claim 3

A coating solution as claimed in claim 1, wherein said alkyl ether is a C 2 -alkyl ether of 1,2-propanediol.

Claim 4

A coating solution as claimed in claim 1, wherein said alkyl ether is a monomethyl ether of 1,2-propanediol.

Claim 5

A coating solution as claimed in claim 1, further comprising a polymeric binder which is insoluble in water but soluble in aqueous-alkaline solutions.

Claim 6

A coating solution as claimed in claim 1, wherein said radiation-sensitive compound is a 1,2-naphthoquinone-2-diazide.

Claim 7

A coating solution as claimed in claim 1, comprising a radiation-sensitive combination of (a) a compound containing at least one C-O-C bond which can be split by acid and (b) a compound which upon irradiation forms a strong acid.

Claim 8

A coating solution as claimed in claim 4, wherein said polymeric binder comprises a novolak.

Claim 9

A coating solution as claimed in claim 1, wherein said organic solvent comprises between about 65 and 100% by weight of a 1,2-propanediol mono-C 1 to C 4 -alkyl ether.

Claim 10

A coating solution as claimed in claim 1, wherein said organic solvent comprises between about 80 and 100% by weight of at least one from the group consisting of a 1,2-propanediol monomethyl ether and a 1,2-propanediol monoethyl ether.

Claim 11

A photoresist material, comprising a support and a light-sensitive layer provided on said support, said layer being the product of a process comprising the step of coating said support with a positive-working radiation-sensitive coating solution which is suitable as a photoresist an which consists essentially of, in admixture (i) at last one polymeric binder which is soluble or swellable in alkaline media and soluble in mono-C 1 to C 4 -alkyl ethers of 1,2-propanediol, said binder being present in an amount between about 30 and 90 percent by weight, relative to the total solids of said coating solution; (ii) a sufficient amount of at least one radiation-sensitive compound to impart radiation sensitivity to said coating solution; and (iii) an organic solvent present in an amount sufficient to solubilize said binder, which organic solvent consists essentially of a mono-C 1 to C 4 -alkyl ether of 1,2-propanediol in an amount of between about 80% and 100% by weight of said organic solvent, such that said light-sensitive layer contains, after drying, about 1% of said organic solvent.

Claim 12

A photoresist material, comprising a support and a light-sensitive layer provided on said support, said layer being the product of a process comprising the step of coating said support with a positive-working radiation-sensitive coating solution which is suitable as a photoresist an which consists essentially of, in admixture (i) at last one polymeric binder which is soluble or swellable in alkaline media and soluble in mono-C 1 to C 4 -alkyl ethers of 1,2-propanediol, said binder being present in an amount between about 30 and 90 percent by weight, relative to the total solids of said coating solution; (ii) a sufficient amount of at least one radiation-sensitive compound to impart radiation sensitivity to said coating solution; and (iii) an organic solvent present in an amount sufficient to solubilize said binder, which organic solvent consists essentially of a mono-C 1 to C 4 -alkyl ether of 1,2-propanediol in an amount of between about 80% and 100% by weight of said organic solvent, such that said light-sensitive layer contains, after drying, about 1% of said organic solvent.

Claim 13

A coating solution as claimed in claim 1, wherein said organic solvent consists of said ether.

Claim 14

A photoresist material as claimed in claim 10, wherein said organic solvent consists of said ether.

Claim 15

A photoresist material according to claim 10, wherein said organic solvent further consists essentially of a second, higher-boiling organic solvent, such that up to 2% of said higher-boiling solvent remains in said layer after drying.