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US4851302A
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Functional ZnSe:H deposited films
Assignee: Canon Inc
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Filing: 1988-07-20
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Granted: 1989-07-25
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Expires: 2008-07-20
Abstract
Abstract There is provided a functional ZnSe:H deposited film composed of zinc atoms, selenium atoms, and at least hydrogen atoms, with the content of hydrogen atoms being 1 to 4 atomic % and the ratio of crystal grains per unit volume being 65 to 85 vol %. It is capable of efficient doping and is stable to irradiation. It can be made into a high conductivity p-type of n-type ZnSe:H:M film by doping. It can be efficiently deposited on a non-single crystal substrate such as metal, glass, and synthetic resin which was incapable of efficient depositing. Thus the invention makes it possible to form a high-functional device such as a photovoltaic element of ZnSe film on a non-single crystal substrate.
Inventors
- 👤 Katsumi Nakagawa
- 👤 Shunichi Ishihara
- 👤 Kozo Arao
- 👤 Yasushi Fujioka
- 👤 Akira Sakai
- 👤 Masahiro Kanai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 19:06
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/10; H10F77/12; H10F77/123; H10F77/1233; G; G06; G06F; G06F9/00; G06F9/06; G06F9/46; G06F9/48; G06F9/4806; G06F9/4843; H10F10/00; H10F10/10; H10F10/14; H10F71/00; H10F71/125; H10F77/16; H10F77/169; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/24; H10P14/29; H10P14/2901; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3431; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; H10P14/3446; Y; Y02; Y02D; Y02D10/00; Y02E; Y02E10/00; Y02E10/50; Y02E10/543; Y02E10/547; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528; Y10T428/12771; Y10T428/12785; Y10T428/12792
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
44 words
A functional deposited compound film on a non-single crystal substrate comprising of zinc, selenium, and hydrogen atoms, characterized in that the content of hydrogen atoms is 1 to 4 atomic% and the ratio of crystal grains per unit volume is 65 to 85 vol%.
Claim 2
Dependent Claim
44 words
A functional deposited compound film on a non-single crystal substrate comprising of zinc, selenium, and hydrogen atoms, characterized in that the content of hydrogen atoms is 1 to 4 atomic% and the ratio of crystal grains per unit volume is 65 to 85 vol%.
Claim 3
Dependent Claim
33 words
A functional, deposited compound film as claimed in claim 1 which additionally contains a doping element belonging to Group I or V of the periodic table and has the characteristics of p-type semiconductor.
Claim 4
Dependent Claim
24 words
A functional deposited compound film as claimed in claim 1, wherein the doping element belonging to Group I of the periodic table is lithium.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-24 | 1993-01-23 | 1993-07-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-24 | 1997-01-23 | 1997-07-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-24 | 2001-01-23 | 2001-07-25 | $7700.00 | Window Closed / Lapsed |