Patent US4847673A successfully refreshed from Google Patents.
US4847673A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor device
Assignee: Mitsubishi Electric Corp
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Filing: 1987-04-20
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Granted: 1989-07-11
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Expires: 2007-04-20
Abstract
Abstract Grooves having a predetermined depth are formed on an insulating layer, and an electrode wiring layer is provided in the grooves of the insulating layer. The electrode wiring layer is formed to fill the grooves either completely or partially to a predetermined thickness on the inner wall surfaces of the grooves.
Inventors
- 👤 Takayuki Matsukawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 09:38
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056; H10W20/057; H10W20/40; H10W20/41; H10W20/435
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
71 words
A semiconductor device comprising: a semiconductor substrate; a first insulating layer formed on said semiconductor substrate; a plurality of grooves formed on said first insulating layer into a depth which is less than a thickness of said first insulating layer; an electrode wiring layer formed in said grooves so as to have a generally C-shaped cross section; and a second insulating layer formed in an opening of said electrode wiring layer.
Claim 2
Dependent Claim
71 words
A semiconductor device comprising: a semiconductor substrate; a first insulating layer formed on said semiconductor substrate; a plurality of grooves formed on said first insulating layer into a depth which is less than a thickness of said first insulating layer; an electrode wiring layer formed in said grooves so as to have a generally C-shaped cross section; and a second insulating layer formed in an opening of said electrode wiring layer.
Claim 3
Dependent Claim
27 words
The semiconductor device of claim 1, wherein said electrode wiring and second insulating layers have their surfaces substantially flush with a surface of said first insulating layer.
References Cited (Backward Citations)
US3947957A
Cited
US4566940A
Cited
US4682204A
Cited
US4471524A
Cited
US4613888A
Cited
US4646126A
Cited
JPS6088443A
Cited
US4734754A
Cited
US4630088A
Cited
US4605470A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-10 | 1993-01-09 | 1993-07-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-10 | 1997-01-09 | 1997-07-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-10 | 2001-01-09 | 2001-07-11 | $7700.00 | Window Closed / Lapsed |