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US4840853A
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Surface structure of AlN substrate and a process for producing the same
Assignee: Niterra Co Ltd
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Filing: 1987-03-09
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Granted: 1989-06-20
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Expires: 2007-03-09
Abstract
Abstract A surface structure of AlN substrate comprising: an AlN substrate, an intermediate layer disposed on the AlN substrate, and a metallized layer disposed on said intermediate layer, said intermediate layer comprising at least aluminum, nitrogen and oxygen. The metallized layer has a main component of one of Mo-Mn alloy, MO and W, and has a thickness of 1-20 μm. This surface structure is produced by coating a surface of AlN substrate with metallizing layer components, heat treating the resultant coated substrate at a temperature of 200°-500° C. under an oxidizing atmosphere, and further heating the heat treated coated substrate at a temperature of 1200°-1400° C. under a nonoxidizing atmosphere having a dew point of -35° to 5° C.
Inventors
- 👤 Satoshi Iio
- 👤 Akiyasu Okuno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:05
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B35/00; C04B35/515; C04B35/58; C04B35/581; C04B41/45; C04B41/52; H; H05; H05K; H05K1/00; H05K1/02; H05K1/09; H05K1/092; H05K3/00; H05K3/38; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
38 words
A surface structure for a AlN substrate comprising: an AlN substrate, an intermediate layer disposed on the AlN substrate, and a metallized layer disposed on said intermediate layer, said intermediate layer comprising at least aluminum, nitrogen and oxygen.
Claim 2
Dependent Claim
38 words
A surface structure for a AlN substrate comprising: an AlN substrate, an intermediate layer disposed on the AlN substrate, and a metallized layer disposed on said intermediate layer, said intermediate layer comprising at least aluminum, nitrogen and oxygen.
Claim 3
Dependent Claim
27 words
The surface structure as defined in claim 1, wherein said metallized layer has a main component selected from the group consisting of Mo--Mn alloy, Mo and W.
Claim 4
Dependent Claim
18 words
The surface structure as defined in claim 1 wherein said intermediate layer has a thickness of 1-20 μm.
Claim 5
Dependent Claim
55 words
The surface structure as defined in claim 3, wherein said metallizing layer components further contain at least one selected from the group consisting of: Mg, Ca, Sr, Ba, Y, Ti, Zr, V, Cr, Nb, Mo, Mn, B, Al, Si, La, Hf and Ta; and oxides and nitrides thereof, provided that oxide must be present therein.
Claim 6
Dependent Claim
34 words
The surface structure as defined in claim 1, wherein at least 40% by weight Al, at least 1% by weight N and at least 0.1% by weight oxygen are present in said intermediate layer.
Claim 7
Dependent Claim
25 words
The surface structure as defined in claim 5, wherein Al is 50-70% by weight, N is 10-30% by weight and oxygen is 1-30% by weight.
Claim 8
Dependent Claim
23 words
The surface structure as defined in claim 1, wherein said main component of the metallized layer amounts to at least 70% by weight.
Claim 9
Dependent Claim
59 words
The surface structure as defined in claim 7, wherein said metallized layer further comprises at least one additional component selected from the group consisting of Mg, Ca, Sr, Ba, Y, Ti, Zr, V, Cr, Nb, Mo, Mn, B, Al, Si, La, Hf, Ta, and oxides and nitrides of these elements provided that one of said additional components is oxide.
Claim 10
Dependent Claim
32 words
The surface structure as defined in claim 8, wherein said additional component amounts to 3-30% by weight of the metallized layer, provided that the oxide amounts to at least 3% by weight.
Claim 11
Dependent Claim
17 words
The surface structure defined in claim 2, wherein said intermediate layer has a thickness of 1-20 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-19 | 1992-12-19 | 1993-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-19 | 1996-12-19 | 1997-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-19 | 2000-12-19 | 2001-06-20 | $7700.00 | Window Closed / Lapsed |