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US4835592A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor wafer with dice having briding metal structure and method of manufacturing same

Assignee: IXYS LLC
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Filing: 1988-04-28
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Granted: 1989-05-30
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Expires: 2008-04-28
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Abstract

Abstract A monolithic semiconductor device and method of manufacturing same having improved high voltage performance. When the device is in wafer form, a metallization structure is formed over scribe zones which are disposed along the scribe lines which define the edge of each device. The scribe zones are normally not covered with oxide during conventional semiconductor fabrication so that an ohmic contact is formed with semiconductor body. The metal structure includes a peripheral section which extend around the active region of each device and extension sections which extend across the scribe lines and interconnect the peripheral sections. The metal structure clamps the voltage at the edge of each device, both prior and subsequent to wafer breaking, which prevents as depletion region created by a reverse-biased junction from extending to the edge of the device under high voltage conditions. As a result, high voltage performance is improved.

Inventors

  • 👤 Nathan Zommer

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 03:20
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/102; H10D62/103; H10D62/105; H10W; H10W20/00; H10W20/40

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 103 words
A semiconductor die comprising: a semiconductor body of selected conductivity having an upper surface which includes at least one active region, the body having a peripheral edge; a contact region of greater conductivity than the selected conductivity, the contact region surrounding the semiconductor body and extending into the semiconductor body from the upper surface and extending to the peripheral edge in at least one region; and an electrically conductive metal structure disposed on the upper surface on the contact region, the electrically conductive metal structure extending to the peripheral edge in the at least one region and extending completely around the semiconductor body.
Claim 2
Dependent Claim 103 words
A semiconductor die comprising: a semiconductor body of selected conductivity having an upper surface which includes at least one active region, the body having a peripheral edge; a contact region of greater conductivity than the selected conductivity, the contact region surrounding the semiconductor body and extending into the semiconductor body from the upper surface and extending to the peripheral edge in at least one region; and an electrically conductive metal structure disposed on the upper surface on the contact region, the electrically conductive metal structure extending to the peripheral edge in the at least one region and extending completely around the semiconductor body.
Claim 3
Dependent Claim 22 words
A semiconductor die as in claim 1 wherein the electrically conductive metal structure comprises four interconnected strips forming a generally rectangular pattern.
Claim 4
Dependent Claim 20 words
A semiconductor die as in claim 2 wherein the strips are displaced from the peripheral edge of the semiconductor body.
Claim 5
Dependent Claim 38 words
A semiconductor die as in claim 3 wherein the electrically conductive metal structure includes a plurality of extension sections, each one of which extends to the peripheral edge of the semiconductor body at spaced-apart locations along the edge.
Claim 6
Dependent Claim 38 words
A semiconductor die as in claim 4 wherein the upper surface is generally rectangular and the plurality of extension sections includes at least one extension section extending from the electrically conductive metal structure to each of the edges.
Claim 7
Dependent Claim 34 words
A semiconductor die as in claim 2 wherein the interconnected strips intersect to form four corners and an extension section extends from each of the corners to the peripheral edge of the semiconductor body.
Claim 8
Dependent Claim 20 words
A semiconductor die as in claim 1 wherein the electrically conductive metal structure is ohmically connected to the contact region.
Claim 9
Dependent Claim 100 words
A semiconductor wafer comprising: a plurality of integrated circuits formed in the wafer, each circuit including a central portion and a periphery, the periphery of each circuit being separated on the wafer from every other circuit so as to define scribe lines therebetween; a contact region of greater conductivity than the wafer, the contact region extending into the wafer beneath the scribe lines, and not extending into the central portion; and an electrically conductive structure disposed on the contact region and not on the central portion, and extending to the scribe lines in at least one location on each circuit.
Claim 10
Dependent Claim 100 words
A semiconductor wafer comprising: a plurality of integrated circuits formed in the wafer, each circuit including a central portion and a periphery, the periphery of each circuit being separated on the wafer from every other circuit so as to define scribe lines therebetween; a contact region of greater conductivity than the wafer, the contact region extending into the wafer beneath the scribe lines, and not extending into the central portion; and an electrically conductive structure disposed on the contact region and not on the central portion, and extending to the scribe lines in at least one location on each circuit.
Claim 11
Dependent Claim 33 words
A wafer as in claim 8 wherein the electrically conductive structure only intermittently extends to the scribe lines yet forms a continuous boundary around the central portion of each of the integrated circuits.
Claim 12
Dependent Claim 18 words
A wafer as in claim 8 wherein the electrically conductive structure is ohmically connected to the contact region.
Claim 13
Dependent Claim 21 words
A wafer as in claim 10 wherein each of the circuits is rectangular and the scribe lines form an orthogonal pattern.

References Cited (Backward Citations)

US3436612A Cited
US3772576A Cited
US4219827A Cited
US4364078A Cited
US4312011A Cited
US4625227A Cited
US4656055A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-05-29 1992-11-28 1993-05-30 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-05-29 1996-11-28 1997-05-30 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-05-29 2000-11-28 2001-05-30 $7700.00 Window Closed / Lapsed

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