Patent US4833067A successfully refreshed from Google Patents.
US4833067A
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Developing solution for positive-working photoresist comprising tmah and non-ionic surfactant
Assignee: Tokyo Ohka Kogyo Co Ltd
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Filing: 1988-09-19
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Granted: 1989-05-23
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Expires: 2008-09-19
Abstract
Abstract The aqueous developing solution of the invention for positive-working photoresist compositions contains, in addition to an organic basic compound free from metallic ions, such as tetramethyl ammonium hydroxide and choline, as the principal ingredient, from 50 to 5000 ppm of an acetylene alcohol. In comparison with conventional developing solutions, the inventive developing solution is advantageous in the uniformity of the patterned photoresist layer, higher sensitivity and smaller temperature dependency of development and less drawbacks due to foaming of the solution.
Inventors
- 👤 Hatsuyuki Tanaka
- 👤 Hidekatsu Kohara
- 👤 Yoshiyuki Sato
- 👤 Shingo Asaumi
- 👤 Toshimasa Nakayama
- 👤 Akira Yokota
- 👤 Hisashi Nakane
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 21:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; G03F7/322; G03C; G03C5/00; G03C5/18
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
204 words
A one-step developing solution for positive-working photoresist compositions which comprises: (a) an aqueous medium; (b) an organic base compound free from metallic ions selected from the group consisting of tetraalkyl ammonium hydroxide and choline in an amount sufficient to obtain a pH of between 11.0 and 13.5; and (c) 50 to 5000 ppm by weight, based on the amount of the developing solution, of a acetylene alcohol-based surface active agent selected from the group consisting of the compounds represented by the general formula I: ##STR6## wherein R 1 is a hydrogen atom or a monovalent group represented by the general formula II ##STR7## R 2 , R 3 , R 4 and R 5 are each a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and n and m are, each independently from the other, zero or a positive integer not exceeding 20, and the compounds represented by the general formula III ##STR8## wherein R 6 is a hydrogen atom or a monovalent group represented by the general formula--Cr 9 R 10 OH, and R 7 , R 8 , R 9 and R 10 are each a hydrogen atom or an alkyl group having 1 to 5 carbon atoms.
Claim 2
Dependent Claim
204 words
A one-step developing solution for positive-working photoresist compositions which comprises: (a) an aqueous medium; (b) an organic base compound free from metallic ions selected from the group consisting of tetraalkyl ammonium hydroxide and choline in an amount sufficient to obtain a pH of between 11.0 and 13.5; and (c) 50 to 5000 ppm by weight, based on the amount of the developing solution, of a acetylene alcohol-based surface active agent selected from the group consisting of the compounds represented by the general formula I: ##STR6## wherein R 1 is a hydrogen atom or a monovalent group represented by the general formula II ##STR7## R 2 , R 3 , R 4 and R 5 are each a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and n and m are, each independently from the other, zero or a positive integer not exceeding 20, and the compounds represented by the general formula III ##STR8## wherein R 6 is a hydrogen atom or a monovalent group represented by the general formula--Cr 9 R 10 OH, and R 7 , R 8 , R 9 and R 10 are each a hydrogen atom or an alkyl group having 1 to 5 carbon atoms.
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JPH0612547A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-22 | 1992-11-21 | 1993-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-22 | 1996-11-21 | 1997-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-22 | 2000-11-21 | 2001-05-23 | $7700.00 | Window Closed / Lapsed |