Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
154 words
A process for producing a layered composite construction material for sliding and friction members of the type having a substrate layer, comprising: forming an intermediate layer on the substrate layer, forming a diffusion barrier layer on the intermediate layer, and forming a functional layer on the diffusion barrier layer, wherein the diffusion barrier layer is from 0.5 to 5 um thick and consists of a metallic material, characterized by forming said diffusion barrier layer as an essentially cubic face-centered crystal lattice by the steps of cathode sputtering from a target while maintaining the substrate temperature substantially between 120° C. and 200° C., adjusting the plasma pressure to substantially between 10 -3 and 5×10 -2 mbar, and applying a voltage of substantially between 300 and 700 volts between the substrate layer and the target so as to provide a practically vacancy-free recrystallized structure of the cubic face-centered crystal lattice making up the diffusion barrier layer.
Claim 2
Dependent Claim
154 words
A process for producing a layered composite construction material for sliding and friction members of the type having a substrate layer, comprising: forming an intermediate layer on the substrate layer, forming a diffusion barrier layer on the intermediate layer, and forming a functional layer on the diffusion barrier layer, wherein the diffusion barrier layer is from 0.5 to 5 um thick and consists of a metallic material, characterized by forming said diffusion barrier layer as an essentially cubic face-centered crystal lattice by the steps of cathode sputtering from a target while maintaining the substrate temperature substantially between 120° C. and 200° C., adjusting the plasma pressure to substantially between 10 -3 and 5×10 -2 mbar, and applying a voltage of substantially between 300 and 700 volts between the substrate layer and the target so as to provide a practically vacancy-free recrystallized structure of the cubic face-centered crystal lattice making up the diffusion barrier layer.
Claim 3
Dependent Claim
44 words
Process in accordance with claim 1, characterized in that a negative electrical potential is applied to the substrate during the formation of the diffusion barrier layer, which potential is smaller by an order of magnitude than the negative electrical potential applied to the target.
Claim 4
Dependent Claim
44 words
Process in accordance with claim 1, characterized in that the heating of the substrate to the temperature desired in the formation of the diffusion barrier layer is carried out by means of the reverse cathodic sputtering for etching the surface of the intermediate layer.
Claim 5
Dependent Claim
41 words
Process in accordance with claim 1, characterized in that, during the course of the cathodic sputtering for the formation of the diffusion barrier layer, the substrate and the diffusion barrier layer are post-heated on the side which is to be coated.
Claim 6
Dependent Claim
26 words
Process in accordance with claim 1, characterized in that the formation of the diffusion barrier layer is carried out by cathodic sputtering in a magnetic field.
Claim 7
Dependent Claim
25 words
Process in accordance with claim 1, characterized in that, immediately after the diffusion barrier layer is applied, the functional layer is applied by cathodic sputtering.
Claim 8
Dependent Claim
74 words
Process in accordance with claim 6, characterized in that, when forming the functional layer using a plasma composition different from that used in forming the diffusion barrier layer, a thin protective layer is first applied by cathodic sputtering to the diffusion barrier layer, using a plasma having essentially the same composition as for the formation of the diffusion barrier layer, said protective layer preferably being made of the material intended for the functional layer.
Claim 9
Dependent Claim
31 words
Process in accordance with claim 7, characterized in that the target used for formation of the protective barrier layer by cathodic sputtering, is subjected to a pretreatment which brings about degassing.
Claim 10
Dependent Claim
32 words
Process in accordance with claim 1, characterized in that the material contained in the target to be used for the formation of the diffusion barrier layer is subjected to a degassing pretreatment.
Claim 11
Dependent Claim
28 words
The method as defined in claim 1, wherein the target for the cathode sputtering comprises a nickel-tin alloy having a tin content of at least 10% by weight.
Claim 12
Dependent Claim
50 words
The process according to claim 1, in that prior to the application of the diffusion barrier layer to the intermediate layer (2), the intermediate layer (2) is subjected to an etch of its surface by reverse cathodic sputtering in a vacuum, and immediately thereafter the diffusion barrier layer is applied.