Light receiving member for use in electrophotography and process for the production thereof

Claim 1

A light receiving member for use in electrophotography comprising a substrate for electrophotography and a light receiving layer comprising: (i) a charge injection inhibition layer of 0.01 to 10 μm in thickness, (ii) a photoconductive layer of 1 to 100 μm in thickness and (iii) a surface layer of 0.003 to 30 μm in thickness being disposed in this sequence from the side of said substrate; said charge injection inhibition layer comprising one kind of material selected from the group consisting of (a) amorphous material containing silicon atoms as the main constituent and 30 to 5×10 4 atomic ppm of a conductivity controlling element and (b) polycrystalline material containing silicon atoms as the main constituent and 30 to 5×10 4 atomic ppm of a conductivity controlling element; said photoconductive layer comprising an amorphous material containing silicon atoms as the main constituent and at least one kind of atom selected from the group consisting of hydrogen atoms and halogen atoms in a total amount of 1 to 40 atomic %; said surface layer having a free surface and comprising a polycrystalline material containing silicon atoms, 0.001 to 90 atomic % of carbon atoms and 41 to 70 atomic % of hydrogen atoms; at least said surface layer being formed by chemically reacting a precursor (C) generated from (c) a silicon-and halogen-containing compound by subjecting said compound (c) to the action of an excitation energy, another precursor (D) generated from (d) a carbon- and halogen-containing compound by subjecting said compound (d) to the action of an excitation energy and an active species (e) generated from a substance (E) selected from the group consisting of H 2 HF, HCl, HBr, and HI by subjecting said substance (E) to the action of an excitation energy while adjusting the volume ratio of each said precursor to said active species to be in the range of 20:1 to 1:20 based on flow ratio in the absence of a plasma.